JPH01286376A - Discharge tube for gas laser device - Google Patents
Discharge tube for gas laser deviceInfo
- Publication number
- JPH01286376A JPH01286376A JP11517188A JP11517188A JPH01286376A JP H01286376 A JPH01286376 A JP H01286376A JP 11517188 A JP11517188 A JP 11517188A JP 11517188 A JP11517188 A JP 11517188A JP H01286376 A JPH01286376 A JP H01286376A
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- metal electrode
- gas
- laser device
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 33
- 239000002184 metal Substances 0.000 claims abstract description 33
- 230000010355 oscillation Effects 0.000 claims abstract description 11
- 239000002826 coolant Substances 0.000 claims abstract description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000010949 copper Substances 0.000 claims abstract description 3
- 229910052802 copper Inorganic materials 0.000 claims abstract description 3
- 238000001816 cooling Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 2
- 239000000470 constituent Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 abstract description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052709 silver Inorganic materials 0.000 abstract description 2
- 239000004332 silver Substances 0.000 abstract description 2
- 239000004411 aluminium Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野〕
本発明は、高周波放電を利用した高速ガス軸流型放電励
起型のガスレーザ装置用放電管に関し、特に放電管電極
部の構成形状に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a discharge tube for a high-speed gas axial flow type discharge excitation type gas laser device that utilizes high-frequency discharge, and particularly to the configuration shape of a discharge tube electrode portion.
第３図に従来技術による放電管部周辺の概念図を示す。 FIG. 3 shows a conceptual diagram of the vicinity of the discharge tube section according to the prior art.
図において、１は放電管であり、石英製の角形ガラスパ
イプで構成されており、その外周部に２ａ及び２ｂの金
属電極を備えている。３は高周波電源であり、金属電極
２ａ及び２ｂを介して高周波電力を、放電管１の内部を
高速で通過する４のレーザガス流に供給する。５は放電
管ホルダー、６は固定フランジ、７ａ、７ｂ、７ｃはネ
オブレンまたはパイトン等のゴム製の０リングであり、
これらによって放電管１を固定している。In the figure, a discharge tube 1 is made of a square glass pipe made of quartz, and has metal electrodes 2a and 2b on its outer periphery. 3 is a high frequency power supply, which supplies high frequency power to the laser gas flow 4 passing through the discharge tube 1 at high speed through metal electrodes 2a and 2b. 5 is a discharge tube holder, 6 is a fixed flange, 7a, 7b, 7c are O-rings made of rubber such as neorene or pyton,
The discharge tube 1 is fixed by these.
８は水冷式のラジェータユニットであり、９の冷却風を
送風して放電管１を冷却する。なお、レーザ光を発生す
る為に必要なレーザ共振器を構成する光学部品、及びレ
ーザガス４を循環させるルーツプロワ等は省略しである
。A water-cooled radiator unit 8 blows the cooling air 9 to cool the discharge tube 1 . Note that optical components constituting a laser resonator necessary for generating laser light, a roots blower for circulating laser gas 4, and the like are omitted.
第２図は放電管１の金属電極部の構成図である。FIG. 2 is a configuration diagram of the metal electrode portion of the discharge tube 1. As shown in FIG.
ここで、放電管１は冷却風９により冷却され、内部の熱
は主に金属電極２ａ及び２ｂを通して外部に排出される
。しかし、この電極部分のみでは放熱面積が小さく冷却
効果が不十分な為、放電管１を通過するレーザガス４の
温度が上昇し１、放電管自体の温度も、その下流側で約
３５０ ’Ｃにまで上昇する。Here, the discharge tube 1 is cooled by the cooling air 9, and the internal heat is mainly discharged to the outside through the metal electrodes 2a and 2b. However, since the heat dissipation area is small and the cooling effect is insufficient with only this electrode part, the temperature of the laser gas 4 passing through the discharge tube 1 rises, and the temperature of the discharge tube itself also reaches about 350'C on the downstream side. rises to.
この結果、レーザ発振効率（入力電気エネルギーに対す
るレーザ出力の比率）が低下する。また、この高温度に
より固定用０リング７ａ、７ｂ、７Ｃが劣化してレーザ
ガス４のリークを起こし、レーザ発振動作を維持できな
くなる状態が発生する場合がある。 本発明はこのよう
な点に鑑みてなされたものであり、金属電極部に集中し
て冷却媒体が通過できるように金属電極の形状を構成す
ることにより、放電管の温度上昇を抑制して、レーザ発
振効率を向上させたガスレーザ装置用放電管を提供する
ことを目的とする。As a result, the laser oscillation efficiency (ratio of laser output to input electrical energy) decreases. Further, due to this high temperature, the fixing O-rings 7a, 7b, and 7C deteriorate, causing leakage of the laser gas 4, and a situation may occur in which the laser oscillation operation cannot be maintained. The present invention has been made in view of these points, and by configuring the shape of the metal electrode so that the cooling medium can pass through the metal electrode portion in a concentrated manner, the temperature rise in the discharge tube can be suppressed. An object of the present invention is to provide a discharge tube for a gas laser device with improved laser oscillation efficiency.
本発明では上記課題を解決するために、レーザガス流軸
とレーザ発振光軸とが同軸で、かつ高周波放電励起用の
放電方向が、該レーザガス流軸及び該レーザ発振光軸と
直交するように構成された高速ガス軸流型放電励起ガス
レーザ装置に用いられるガスレーザ装置用放電管におい
て、金属電極部に集中して冷却媒体が通過できるように
該金属電極の形状を構成し、
放電管内部で発生する熱を前記金属電極を通して効率的
に外部に排出することを特徴とするガスレーザ装置用放
電管を提供することを目的とする。In order to solve the above problems, the present invention is configured such that the laser gas flow axis and the laser oscillation optical axis are coaxial, and the discharge direction for high-frequency discharge excitation is orthogonal to the laser gas flow axis and the laser oscillation optical axis. In a discharge tube for a gas laser device used in a high-speed gas axial flow type discharge excited gas laser device, the shape of the metal electrode is configured so that a cooling medium can pass through the metal electrode portion in a concentrated manner, and the cooling medium generated inside the discharge tube is It is an object of the present invention to provide a discharge tube for a gas laser device, which is characterized in that heat is efficiently discharged to the outside through the metal electrode.
〔作用］
金属電極を冷却媒体により集中的に冷却することにより
、放電管内部で発生する熱を効率良く外部に排出するこ
とができ、放電管の温度上昇が抑制される。[Function] By intensively cooling the metal electrode with a cooling medium, the heat generated inside the discharge tube can be efficiently discharged to the outside, and the rise in temperature of the discharge tube is suppressed.
第１図は本発明の一実施例のガスレーザ装置用放電管の
構成図である。図において、１は放電管であり、石英製
のガラスパイプで構成されている。FIG. 1 is a block diagram of a discharge tube for a gas laser device according to an embodiment of the present invention. In the figure, 1 is a discharge tube, which is made of a quartz glass pipe.
２ａ及び２ｂは金属電極であり、電気抵抗ならびに熱抵
抗の小さいアルミニウム、または銅等で構成されている
。そして、放電管１との間のエアギャップをなくす為に
、銀ペーストを電極面全体に均一に塗布して、放電管１
の外壁に接着されている。金属電極２ａ及び２ｂの内部
には１３の冷却水が循環するｅ １０ａ、１０ｂ１１
１ａ、ｌｌｂは真鍮製の継手であり、電極部本体にロー
付けされている。１０ａ及び１０ｂは給水口、ｌｌａ及
びｌｌｂは排水口である。これらの間は１２のナイロン
製の配管チューブにより接続されている。Metal electrodes 2a and 2b are made of aluminum, copper, or the like, which has low electrical resistance and thermal resistance. Then, in order to eliminate the air gap between the discharge tube 1 and the discharge tube 1, silver paste is applied uniformly over the entire electrode surface.
is glued to the exterior wall. 13 cooling water circulates inside the metal electrodes 2a and 2b e 10a, 10b11
1a and llb are brass joints, which are brazed to the electrode body. 10a and 10b are water supply ports, and lla and llb are drain ports. These are connected by 12 nylon piping tubes.
複数個ある他の放電管への配管ならびにレーザ装置に設
けられる冷却水供給、排水口への配管も同種の配管チュ
ーブを用いている。The same type of piping tubes are used for the piping to the other plurality of discharge tubes as well as the piping to the cooling water supply and drain ports provided in the laser device.
そして、外部に設けられた図示されていない高周波電源
から金属電極２ａ及び２ｂを介して２ＭＨｚの高周波電
力が供給され、ガス流４を放電、励起してレーザビーム
を発振、増幅させる。なお、ミラー等の光学部品は省略
しである。Then, 2 MHz high frequency power is supplied from an externally provided high frequency power source (not shown) via the metal electrodes 2a and 2b, and the gas flow 4 is discharged and excited to oscillate and amplify the laser beam. Note that optical components such as mirrors are omitted.
金属電極をこのような構成にすることにより、金属電極
が集中的に冷却される。従って、放電管内部で発生する
熱は、熱抵抗の小さい金属電極を通して効率良く外部に
排出することができ、従来３５０℃にまで上昇していた
レーザガス下流側に当たる金属電極周辺部の温度は１８
０°Ｃまで低下する。その結果、放電管１の内部のレー
ザガス流４の温度が低下しレーザ発振効率が向上すると
同時に、放電管を保持するＯリング７ａ、７ｂ、７Ｃの
温度も低下してその信頼性が向上する。By configuring the metal electrode in this manner, the metal electrode is cooled intensively. Therefore, the heat generated inside the discharge tube can be efficiently discharged to the outside through the metal electrode with low thermal resistance, and the temperature around the metal electrode on the downstream side of the laser gas, which conventionally rose to 350°C, has been reduced to 18°C.
The temperature drops to 0°C. As a result, the temperature of the laser gas flow 4 inside the discharge tube 1 decreases, improving laser oscillation efficiency, and at the same time, the temperature of the O-rings 7a, 7b, 7C that hold the discharge tube decreases, improving their reliability.
なお、上記の説明では金属電極内部を冷却する冷却媒体
として水を使用したが、絶縁性があれば他の冷却媒体で
あっても良く、例えばフレオン等の気体でも良い。In the above description, water was used as a cooling medium for cooling the inside of the metal electrode, but other cooling medium may be used as long as it has insulation properties, and for example, a gas such as Freon may be used.
また、金属電極の構造を、外部に設けた送風ファンによ
り冷却できるように空冷式に適した放熱フィン構造の構
成としても、同様の効果が得られる。Further, the same effect can be obtained by configuring the metal electrode structure to have a radiation fin structure suitable for air cooling so that it can be cooled by an external blower fan.
以上説明したように本発明では、金属電極部を集中的に
冷却できるようにしたので、放電管内部で発生する熱が
効率良く外部に排出することができ、レーザガス温度が
低下し、レーザ発振効率が向上する。また、放電管の温
度が低下することにより、これを支持する放電管ホルダ
ーの固定用０リングの信頼性が向上する。As explained above, in the present invention, since the metal electrode part can be cooled intensively, the heat generated inside the discharge tube can be efficiently discharged to the outside, reducing the laser gas temperature and increasing the laser oscillation efficiency. will improve. Further, since the temperature of the discharge tube is lowered, the reliability of the fixing O-ring of the discharge tube holder that supports the discharge tube is improved.
第１図は本発明の一実施例のガスレーザ装置用放電管の
金属電極部の構成図、
第２図は従来のガスレーザ装置用放電管の金属電極部の
構成図、
第３図は従来の放電管部周辺の概念図である。
ニー・−・・・−・・−放電管
２ａ、２ ｂ 、−−−−−−−−−・−・−金属電極
３−−−−−・・−・・−高周波電源
４−・・−−−一−・−・−・レーザガス流５−・・−
・−・・・・−・−放電管ホルダー６〜−一−−−−−
−−−−・−固定フランシフ ａ 、 ７ ｂ 、 ７
ｃ−−−−−−−−−−−−一固定用Ｏリング１０
ａ 、 １０ ｂ−＝−−−−−−−−一給水口１１
ａ 、 １ ｌ ｂ−−−−−−−−−−−一排水口
１２−−−−−−−−−−−−−−一配管チューブ１３
−・−−−−−−ｍ−・・・−冷却水特許出願人 ファ
ナック株式会社
代理人 弁理士 服部毅巖
第２図Fig. 1 is a block diagram of a metal electrode part of a discharge tube for a gas laser device according to an embodiment of the present invention, Fig. 2 is a block diagram of a metal electrode part of a conventional discharge tube for a gas laser device, and Fig. 3 is a block diagram of a conventional discharge tube. It is a conceptual diagram of the vicinity of a pipe part. Knee -------Discharge tubes 2a, 2b, ----Metal electrode 3-----High frequency power source 4-- −−−1−・−・−・Laser gas flow 5−・・−
・−・・−・−Discharge tube holder 6～−1−−−−−
------Fixed franchise a, 7 b, 7
c-----------One fixing O-ring 10
a, 10 b-=--------1 water supply port 11
a, 1 l b----------------One drain port 12---------------One piping tube 13
−・−−−−−−m−・・・− Cooling water patent applicant Fanuc Co., Ltd. agent Patent attorney Takeshi Hattori Figure 2
Claims (1)
かつ高周波放電励起用の放電方向が、該レーザガス流軸
及び該レーザ発振光軸と直交するように構成された高速
ガス軸流型放電励起ガスレーザ装置に用いられるガスレ
ーザ装置用放電管において、 金属電極部に集中して冷却媒体が通過できるように該金
属電極の形状を構成し、 放電管内部で発生する熱を前記金属電極を通して効率的
に外部に排出することを特徴とするガスレーザ装置用放
電管。 （２） 前記金属電極の構造は該金属電極の内部に液体
または気体等の冷却媒体が通過できるように構成されて
いることを特徴とする特許請求の範囲第１項記載のガス
レーザ装置用放電管。 （３） 前記金属電極の構造は外部に設けた送風ファン
により冷却できるよう空冷式に適した放熱フィン構造を
備えていることを特長とする特許請求の範囲第１項記載
のガスレーザ装置用放電管。（４） 前記金属電極は、
対向する各電極の構成形状が同一であることを特長とす
る特許請求の範囲第１項記載のガスレーザ装置用放電管
。 （５） 前記金属電極の構成材料は電気抵抗ならびに熱
抵抗の小さいアルミニウム、または銅等であることを特
長とする特許請求の範囲第１項記載のガスレーザ装置用
放電管。[Claims] (1) The laser gas flow axis and the laser oscillation optical axis are coaxial,
In a discharge tube for a gas laser device used in a high-speed gas axial flow type discharge-excited gas laser device configured such that a discharge direction for high-frequency discharge excitation is orthogonal to the laser gas flow axis and the laser oscillation optical axis, a metal electrode portion A discharge tube for a gas laser device, characterized in that the shape of the metal electrode is configured so that a cooling medium can pass through the discharge tube in a concentrated manner, and heat generated inside the discharge tube is efficiently discharged to the outside through the metal electrode. (2) The discharge tube for a gas laser device according to claim 1, wherein the structure of the metal electrode is such that a cooling medium such as liquid or gas can pass through the metal electrode. . (3) The discharge tube for a gas laser device according to claim 1, wherein the structure of the metal electrode is provided with a radiation fin structure suitable for an air cooling type so that it can be cooled by an external blower fan. . (4) The metal electrode is
2. The discharge tube for a gas laser device according to claim 1, wherein each of the opposing electrodes has the same configuration shape. (5) The discharge tube for a gas laser device according to claim 1, characterized in that the constituent material of the metal electrode is aluminum, copper, or the like, which has low electrical resistance and thermal resistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11517188A JPH01286376A (en) | 1988-05-12 | 1988-05-12 | Discharge tube for gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11517188A JPH01286376A (en) | 1988-05-12 | 1988-05-12 | Discharge tube for gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01286376A true JPH01286376A (en) | 1989-11-17 |
Family
ID=14656103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11517188A Pending JPH01286376A (en) | 1988-05-12 | 1988-05-12 | Discharge tube for gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01286376A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017075736A1 (en) * | 2015-11-03 | 2017-05-11 | 徐海军 | Radio frequency laser with water-passing valve block |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5943583A (en) * | 1982-07-30 | 1984-03-10 | レロイ・ヴイ・サツタ−・ジユニア | Electrode device with laser bore and gas laser |
| JPS6239083A (en) * | 1985-08-14 | 1987-02-20 | Mitsubishi Electric Corp | Gas laser device |
| JPS6263482A (en) * | 1985-09-13 | 1987-03-20 | Mitsubishi Electric Corp | Gas laser device |
| JPS6288384A (en) * | 1985-10-15 | 1987-04-22 | Mitsubishi Electric Corp | Gas laser device |
-
1988
- 1988-05-12 JP JP11517188A patent/JPH01286376A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5943583A (en) * | 1982-07-30 | 1984-03-10 | レロイ・ヴイ・サツタ−・ジユニア | Electrode device with laser bore and gas laser |
| JPS6239083A (en) * | 1985-08-14 | 1987-02-20 | Mitsubishi Electric Corp | Gas laser device |
| JPS6263482A (en) * | 1985-09-13 | 1987-03-20 | Mitsubishi Electric Corp | Gas laser device |
| JPS6288384A (en) * | 1985-10-15 | 1987-04-22 | Mitsubishi Electric Corp | Gas laser device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017075736A1 (en) * | 2015-11-03 | 2017-05-11 | 徐海军 | Radio frequency laser with water-passing valve block |
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