JPS5918695Y2 - ion laser tube - Google Patents

ion laser tube

Info

Publication number
JPS5918695Y2
JPS5918695Y2 JP2455681U JP2455681U JPS5918695Y2 JP S5918695 Y2 JPS5918695 Y2 JP S5918695Y2 JP 2455681 U JP2455681 U JP 2455681U JP 2455681 U JP2455681 U JP 2455681U JP S5918695 Y2 JPS5918695 Y2 JP S5918695Y2
Authority
JP
Japan
Prior art keywords
anode
laser tube
ion laser
water
drainage pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2455681U
Other languages
Japanese (ja)
Other versions
JPS57138356U (en
Inventor
兼治 山口
Original Assignee
工業技術院長
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長 filed Critical 工業技術院長
Priority to JP2455681U priority Critical patent/JPS5918695Y2/en
Publication of JPS57138356U publication Critical patent/JPS57138356U/ja
Application granted granted Critical
Publication of JPS5918695Y2 publication Critical patent/JPS5918695Y2/en
Expired legal-status Critical Current

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Description

【考案の詳細な説明】 この考案は、高出力イオンレーザ管の陽極の構造に関す
る。
[Detailed Description of the Invention] This invention relates to the structure of an anode of a high-power ion laser tube.

一般にイオンレーザは、レーザ管内にアルゴンガスまた
はクリプトンガスを封入して陽極と陰極間に電圧を加え
て放電させ、レーザ管の両端におかれた光共振器を形成
する1対の反射鏡の角度を適宜に調整してレーザ発振を
得る。
In general, ion lasers are made by filling a laser tube with argon gas or krypton gas and applying a voltage between the anode and cathode to generate a discharge, and the angle between a pair of reflecting mirrors that form an optical resonator placed at both ends of the laser tube. is adjusted appropriately to obtain laser oscillation.

このようなイオンレーザ装置は数種類の発振波長を有し
、かつ出力値が大きいことから医用、計測、情報処理、
加工などの大くの分野に使用されている。
These ion laser devices have several types of oscillation wavelengths and a large output value, so they are used in medical, measurement, information processing, and other applications.
It is used in many fields such as processing.

高出力イオンレーザ管は数100■の放電電圧と数十A
〜数百Aの大電流放電下で使用されるため、陽極で消費
される陽極損失は数百W〜数KWにもおよぶ。
High-power ion laser tube has a discharge voltage of several hundred square meters and several tens of A.
Since it is used under a large current discharge of ~ several hundred A, the anode loss consumed in the anode reaches several hundred W to several KW.

陽極に使用される材料は仕事関数、蒸気圧、耐消費電力
、融点、熱伝導度などの熱的性質と加工や冷却構造の容
易さが選択の基準となり、グラファイト、モリブデン、
銅等の材質が一般に用いられる。
Materials used for the anode are selected based on thermal properties such as work function, vapor pressure, power consumption, melting point, and thermal conductivity, as well as ease of processing and cooling structure, and include graphite, molybdenum,
Materials such as copper are generally used.

しかし、陽極損失が数百W〜数KWにおよぶ場合、グラ
ファイトは放射冷却によるため、表面積を大きくしなけ
ればならないので形状が大きくなる欠点があり、モリブ
デンは加工性が悪く高価となるなどの欠点があるため、
加工が容易で安価であり、直接冷却が可能で陽極許容損
失を大きくとれる銅が最も適している。
However, when the anode loss ranges from hundreds of watts to several kilowatts, graphite has the disadvantage of having a large surface area because it uses radiation cooling, resulting in a large shape, and molybdenum has disadvantages such as poor workability and being expensive. Because there is
Copper is the most suitable because it is easy to process, inexpensive, can be directly cooled, and has a large anode allowable loss.

イオンレーザ管の陽極の構成としてプラズマ細管の延長
上にもける中空同軸形のものと、プラズマ細管軸上から
離れた場所にもうけるものとが有る。
There are two types of configurations for the anode of an ion laser tube: a hollow coaxial type that is placed on an extension of the plasma capillary, and an anode that is installed at a location away from the axis of the plasma capillary.

これらを水冷する場合、前者は陽極自身を外囲器の一部
とし、外囲器をおおうようにウォータジャケットをもう
けてプラズマ細管と陽極を同時に冷却するよ、うにする
が、陽極とウォータジャケットは水を介して電気的に接
続されるので、電気的に遮断する手段としてジャケット
に絶縁物(ガラス等)を用いる必要があり、機械的に弱
くなる。
When cooling these with water, in the former case, the anode itself is part of the envelope, and a water jacket is provided to cover the envelope so that the plasma capillary and the anode are cooled at the same time. Since it is electrically connected through water, it is necessary to use an insulating material (glass, etc.) in the jacket as a means of electrically blocking it, making it mechanically weak.

又プラズマ細管と同時に冷却するため、冷却効率が悪く
なる等の欠点がある。
Furthermore, since it is cooled at the same time as the plasma thin tube, there are drawbacks such as poor cooling efficiency.

一方、後者のプラズマ細管軸上から離れた場所にもうけ
るような陽極形態においては、レーザ管全体が大きくな
る等の欠点がある。
On the other hand, the latter type of anode, in which the anode is provided at a location away from the axis of the plasma capillary, has drawbacks such as an increase in the size of the entire laser tube.

この考案の目的は、上述の欠点を取り除いたイオンレー
ザ管を提供することである。
The aim of this invention is to provide an ion laser tube that eliminates the above-mentioned drawbacks.

本考案は、プラズマ細管の延長上にもうけた中空同軸形
でプラズマ細管のウォータジャケットとは別系統で冷却
する構造を有する陽極を具備したことを特徴とする。
The present invention is characterized by having a hollow coaxial anode provided on an extension of the plasma capillary and having a structure that cools the anode separately from the water jacket of the plasma capillary.

以下、本考案につき実施例を挙げ図面に従って詳細に説
明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to embodiments and drawings.

イオンレーザ管14は陽極4.陰極5.グラフアイトチ
゛イスク2と絶縁用スペーサ3とを交互に積層し絶縁支
柱15にて連結されたプラズマ細管、これらを囲い水冷
されるべき細管部外囲器1、その他の外囲器7およびブ
リュースタ窓8を主たる構成要素としている。
The ion laser tube 14 has an anode 4. Cathode 5. A plasma capillary tube in which graphite chips 2 and insulating spacers 3 are alternately laminated and connected by insulating struts 15, a capillary envelope 1 that surrounds these and is to be water-cooled, other envelopes 7, and Brewster. The window 8 is the main component.

陰極5は外囲器1に取付けられた導入棒6によって固定
されている。
The cathode 5 is fixed by an introduction rod 6 attached to the envelope 1.

陽極4と陰極5間に数100 Vの電圧を印加し、グラ
ファイトディスク2の中心孔で数百Aの下電流放電を行
うと、陽極4の陽極損失は数KWにおよぶが、陽極4に
もうけた水冷用の給排水用パイプ9を通して陽極4を直
接水冷することによって、陽極損失に耐えることが出来
る。
When a voltage of several 100 V is applied between the anode 4 and the cathode 5 and a current discharge of several hundred A is performed at the center hole of the graphite disk 2, the anode loss of the anode 4 amounts to several KW, but the anode 4 has no loss. By directly cooling the anode 4 with water through the water cooling pipe 9, it is possible to withstand anode loss.

第2図に陽極4の近傍のレーザ管の断面図を示す。FIG. 2 shows a cross-sectional view of the laser tube near the anode 4.

陽極4はレーザ光が通過する中空部16を有した銅の中
空円筒部材12.13よりなり中空円筒部材12の外周
と中空部16間には円周の水冷用溝17がもうけられて
おり、中空円筒部材12と13はロー付けにて一体化さ
れている。
The anode 4 is made of a copper hollow cylindrical member 12,13 having a hollow part 16 through which the laser beam passes, and a circumferential water cooling groove 17 is provided between the outer periphery of the hollow cylindrical member 12 and the hollow part 16. The hollow cylindrical members 12 and 13 are integrated by brazing.

水冷用の溝17には対向するように給排水パイプ9が中
空円筒部材12にロー付けで一体化されている。
A water supply and drainage pipe 9 is integrated with the hollow cylindrical member 12 by brazing so as to face the water cooling groove 17.

給排水用パイプ9の延長上にはコバー(Kv)金属の封
入皿11がロー付けされており、一方外囲器1の延長上
にはKv金金属封入皿10が取付けられている。
A Kovar (Kv) metal enclosure plate 11 is brazed on the extension of the water supply and drainage pipe 9, while a Kv gold metal enclosure plate 10 is attached to the extension of the envelope 1.

Kv金金属封入皿10の内径はKv金金属封入皿11の
外径に嵌合するようにしておきKv金金属封入皿10と
11とをアーク溶接することによって真空気密保持する
The inner diameter of the Kv gold metal enclosure plate 10 is made to fit the outer diameter of the Kv gold metal enclosure plate 11, and the Kv gold metal enclosure plates 10 and 11 are kept vacuum-tight by arc welding.

陽極4の冷却水とプラズマ細管の冷却水とは別系統にす
ることが出来るので電位関係の取扱いは容易となり、且
つ陽極単独に冷却可能となるためプラズマ細管の発熱影
響されることなく冷却を十分行うことが出来る。
Since the cooling water for the anode 4 and the cooling water for the plasma capillary can be separated from each other, it is easy to handle the potential relationship.Also, since the anode can be cooled independently, sufficient cooling can be achieved without being affected by the heat generated by the plasma capillary. It can be done.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの考案の一実施例であるイオンレーザ管を示
す側面図、第2図は陽極構造を示すレーザ管の断面図で
ある。
FIG. 1 is a side view showing an ion laser tube as an embodiment of this invention, and FIG. 2 is a sectional view of the laser tube showing the anode structure.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 陽極、陰極、プラズマ細管からなるイオンレーザ管にお
いて、前記陰極は、中央にレーザ光が通過可能な中空部
を有しかつ外周と中空部との間に水冷用の溝を有する中
空円筒部材13と、給排水用パイプ9が取付けられ、中
央にレーザ光通過可能な中空部を有する中空円筒部材1
2とを、前記水冷用溝と給排水用パイプ9が連通ずるよ
うに固着した構造を有し、前記給排水パイプ9に取付け
た封入皿11を外囲器1の端部に設けられた封入皿10
に嵌合させて固定したことを特徴とするイオンレーザ管
In an ion laser tube consisting of an anode, a cathode, and a plasma thin tube, the cathode includes a hollow cylindrical member 13 having a hollow part in the center through which laser light can pass, and a groove for water cooling between the outer periphery and the hollow part. , a hollow cylindrical member 1 to which a water supply and drainage pipe 9 is attached and which has a hollow part in the center through which a laser beam can pass.
2 is fixed so that the water cooling groove and the water supply/drainage pipe 9 communicate with each other, and the containment dish 11 attached to the water supply/drainage pipe 9 is provided at the end of the envelope 1.
An ion laser tube characterized in that it is fitted and fixed to.
JP2455681U 1981-02-25 1981-02-25 ion laser tube Expired JPS5918695Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2455681U JPS5918695Y2 (en) 1981-02-25 1981-02-25 ion laser tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2455681U JPS5918695Y2 (en) 1981-02-25 1981-02-25 ion laser tube

Publications (2)

Publication Number Publication Date
JPS57138356U JPS57138356U (en) 1982-08-30
JPS5918695Y2 true JPS5918695Y2 (en) 1984-05-30

Family

ID=29822267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2455681U Expired JPS5918695Y2 (en) 1981-02-25 1981-02-25 ion laser tube

Country Status (1)

Country Link
JP (1) JPS5918695Y2 (en)

Also Published As

Publication number Publication date
JPS57138356U (en) 1982-08-30

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