JPS56131983A - Gas laser device - Google Patents

Gas laser device

Info

Publication number
JPS56131983A
JPS56131983A JP3537380A JP3537380A JPS56131983A JP S56131983 A JPS56131983 A JP S56131983A JP 3537380 A JP3537380 A JP 3537380A JP 3537380 A JP3537380 A JP 3537380A JP S56131983 A JPS56131983 A JP S56131983A
Authority
JP
Japan
Prior art keywords
discharge
discharging
space
distribution
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3537380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6310916B2 (en, 2012
Inventor
Shuji Ogawa
Shigenori Yagi
Norikazu Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3537380A priority Critical patent/JPS56131983A/ja
Publication of JPS56131983A publication Critical patent/JPS56131983A/ja
Publication of JPS6310916B2 publication Critical patent/JPS6310916B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/036Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/041Arrangements for thermal management for gas lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP3537380A 1980-03-19 1980-03-19 Gas laser device Granted JPS56131983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3537380A JPS56131983A (en) 1980-03-19 1980-03-19 Gas laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3537380A JPS56131983A (en) 1980-03-19 1980-03-19 Gas laser device

Publications (2)

Publication Number Publication Date
JPS56131983A true JPS56131983A (en) 1981-10-15
JPS6310916B2 JPS6310916B2 (en, 2012) 1988-03-10

Family

ID=12440089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3537380A Granted JPS56131983A (en) 1980-03-19 1980-03-19 Gas laser device

Country Status (1)

Country Link
JP (1) JPS56131983A (en, 2012)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06209131A (ja) * 1992-07-06 1994-07-26 Heraeus Noblelight Gmbh 高出力ビーム発生装置
KR20000056778A (ko) * 1999-02-22 2000-09-15 송순달 구리 이온 레이저
US6285703B1 (en) 1997-10-24 2001-09-04 Trumpf Lasertechnik Gmbh Laser resonator
JP2011096616A (ja) * 2009-11-02 2011-05-12 E Square:Kk プラズマ表面処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5097289A (en, 2012) * 1973-12-26 1975-08-02
JPS5424591A (en) * 1977-07-26 1979-02-23 Mitsubishi Electric Corp Gas laser unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5097289A (en, 2012) * 1973-12-26 1975-08-02
JPS5424591A (en) * 1977-07-26 1979-02-23 Mitsubishi Electric Corp Gas laser unit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06209131A (ja) * 1992-07-06 1994-07-26 Heraeus Noblelight Gmbh 高出力ビーム発生装置
US6285703B1 (en) 1997-10-24 2001-09-04 Trumpf Lasertechnik Gmbh Laser resonator
KR20000056778A (ko) * 1999-02-22 2000-09-15 송순달 구리 이온 레이저
JP2011096616A (ja) * 2009-11-02 2011-05-12 E Square:Kk プラズマ表面処理装置

Also Published As

Publication number Publication date
JPS6310916B2 (en, 2012) 1988-03-10

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