JPS6424480A - Pulsed gas laser - Google Patents

Pulsed gas laser

Info

Publication number
JPS6424480A
JPS6424480A JP18161487A JP18161487A JPS6424480A JP S6424480 A JPS6424480 A JP S6424480A JP 18161487 A JP18161487 A JP 18161487A JP 18161487 A JP18161487 A JP 18161487A JP S6424480 A JPS6424480 A JP S6424480A
Authority
JP
Japan
Prior art keywords
laser
discharge space
discharge
infrared
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18161487A
Other languages
Japanese (ja)
Inventor
Shinji Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP18161487A priority Critical patent/JPS6424480A/en
Publication of JPS6424480A publication Critical patent/JPS6424480A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To improve a laser in its general emission efficiency and to prolong the service life of laser gas and of high-voltage switching elements by a method wherein laser gas confined in a discharge space is irradiated with infrared rays before the termination of a glow discharge enabling stimulated emission of light for an enhanced generation of excimers. CONSTITUTION:An infrared laser device 4 is so arranged that an infrared laser beam 10 after a reflector 5 may travel along the optical axis of an excimer laser beam 11 and land in a discharge space 3 between discharge electrodes 2. Difference in delay time between delay circuits 8 and 8' is appropriately set so that the discharge space 3 may be irradiated with the infrared laser beam 10 from the infrared laser device 4 prior to the termination of glow discharge. This allows halogen molecules contained in laser gas in the discharge space 3 to be excited prior to hitting low-speed electrons generated in the glow discharge process. This accelerates the generation of negative ions that comes next. More ion.ion reunions are accomplished for the generation of more excimers. The result is a laser device capable of higher, general oscillation efficiency.
JP18161487A 1987-07-20 1987-07-20 Pulsed gas laser Pending JPS6424480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18161487A JPS6424480A (en) 1987-07-20 1987-07-20 Pulsed gas laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18161487A JPS6424480A (en) 1987-07-20 1987-07-20 Pulsed gas laser

Publications (1)

Publication Number Publication Date
JPS6424480A true JPS6424480A (en) 1989-01-26

Family

ID=16103881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18161487A Pending JPS6424480A (en) 1987-07-20 1987-07-20 Pulsed gas laser

Country Status (1)

Country Link
JP (1) JPS6424480A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2804019A2 (en) 2013-04-25 2014-11-19 Canon Kabushiki Kaisha Object information acquiring apparatus and control method thereof
US10293374B2 (en) 2013-04-25 2019-05-21 Canon Kabushiki Kaisha Capacitive transducer and method of manufacturing same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2804019A2 (en) 2013-04-25 2014-11-19 Canon Kabushiki Kaisha Object information acquiring apparatus and control method thereof
US9683971B2 (en) 2013-04-25 2017-06-20 Canon Kabushiki Kaisha Object information acquiring apparatus and control method thereof
US10293374B2 (en) 2013-04-25 2019-05-21 Canon Kabushiki Kaisha Capacitive transducer and method of manufacturing same

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