JPS63104441A - 半導体装置の保管装置 - Google Patents

半導体装置の保管装置

Info

Publication number
JPS63104441A
JPS63104441A JP61252363A JP25236386A JPS63104441A JP S63104441 A JPS63104441 A JP S63104441A JP 61252363 A JP61252363 A JP 61252363A JP 25236386 A JP25236386 A JP 25236386A JP S63104441 A JPS63104441 A JP S63104441A
Authority
JP
Japan
Prior art keywords
carrier
vacuum chamber
door
semiconductor device
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61252363A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563016B2 (enrdf_load_stackoverflow
Inventor
Yasuo Aoki
青木　保雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Yamagata Ltd
Original Assignee
NEC Yamagata Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Yamagata Ltd filed Critical NEC Yamagata Ltd
Priority to JP61252363A priority Critical patent/JPS63104441A/ja
Publication of JPS63104441A publication Critical patent/JPS63104441A/ja
Publication of JPH0563016B2 publication Critical patent/JPH0563016B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61252363A 1986-10-22 1986-10-22 半導体装置の保管装置 Granted JPS63104441A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61252363A JPS63104441A (ja) 1986-10-22 1986-10-22 半導体装置の保管装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61252363A JPS63104441A (ja) 1986-10-22 1986-10-22 半導体装置の保管装置

Publications (2)

Publication Number Publication Date
JPS63104441A true JPS63104441A (ja) 1988-05-09
JPH0563016B2 JPH0563016B2 (enrdf_load_stackoverflow) 1993-09-09

Family

ID=17236250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61252363A Granted JPS63104441A (ja) 1986-10-22 1986-10-22 半導体装置の保管装置

Country Status (1)

Country Link
JP (1) JPS63104441A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011228391A (ja) * 2010-04-16 2011-11-10 Dan-Takuma Technologies Inc 保管システムおよび保管方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57156903A (en) * 1981-03-23 1982-09-28 Hitachi Ltd Automatic stockpiler for products
JPS6228359A (ja) * 1985-07-17 1987-02-06 株式会社　和広武 真空コンテナ
JPS62169347A (ja) * 1985-10-24 1987-07-25 テキサス　インスツルメンツ　インコ−ポレイテツド 処理済ウエーハを所望の真空状態下で保管する方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57156903A (en) * 1981-03-23 1982-09-28 Hitachi Ltd Automatic stockpiler for products
JPS6228359A (ja) * 1985-07-17 1987-02-06 株式会社　和広武 真空コンテナ
JPS62169347A (ja) * 1985-10-24 1987-07-25 テキサス　インスツルメンツ　インコ−ポレイテツド 処理済ウエーハを所望の真空状態下で保管する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011228391A (ja) * 2010-04-16 2011-11-10 Dan-Takuma Technologies Inc 保管システムおよび保管方法

Also Published As

Publication number Publication date
JPH0563016B2 (enrdf_load_stackoverflow) 1993-09-09

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