JPS6297296A - 薄膜ｅｌパネル - Google Patents
薄膜ｅｌパネルInfo
- Publication number
- JPS6297296A JPS6297296A JP60235399A JP23539985A JPS6297296A JP S6297296 A JPS6297296 A JP S6297296A JP 60235399 A JP60235399 A JP 60235399A JP 23539985 A JP23539985 A JP 23539985A JP S6297296 A JPS6297296 A JP S6297296A
- Authority
- JP
- Japan
- Prior art keywords
- panel
- thin film
- layer
- dielectric breakdown
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 22
- 239000010408 film Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 230000015556 catabolic process Effects 0.000 description 19
- 230000007547 defect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 etc.) Chemical compound 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60235399A JPS6297296A (ja) | 1985-10-23 | 1985-10-23 | 薄膜ｅｌパネル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60235399A JPS6297296A (ja) | 1985-10-23 | 1985-10-23 | 薄膜ｅｌパネル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6297296A true JPS6297296A (ja) | 1987-05-06 |
| JPH0550837B2 JPH0550837B2 (enrdf_load_stackoverflow) | 1993-07-30 |
Family
ID=16985511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60235399A Granted JPS6297296A (ja) | 1985-10-23 | 1985-10-23 | 薄膜ｅｌパネル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6297296A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5885798U (ja) * | 1981-12-07 | 1983-06-10 | カルソニックカンセイ株式会社 | エレクトロルミネツセンス素子 |
| JPS6261295A (ja) * | 1985-09-11 | 1987-03-17 | 沖電気工業株式会社 | 薄膜ｅｌ素子及びその製造方法 |
-
1985
- 1985-10-23 JP JP60235399A patent/JPS6297296A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5885798U (ja) * | 1981-12-07 | 1983-06-10 | カルソニックカンセイ株式会社 | エレクトロルミネツセンス素子 |
| JPS6261295A (ja) * | 1985-09-11 | 1987-03-17 | 沖電気工業株式会社 | 薄膜ｅｌ素子及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0550837B2 (enrdf_load_stackoverflow) | 1993-07-30 |
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