JPS6294987A - Mis電界効果型半導体装置及びその情報の検出方法 - Google Patents
Mis電界効果型半導体装置及びその情報の検出方法Info
- Publication number
- JPS6294987A JPS6294987A JP60235735A JP23573585A JPS6294987A JP S6294987 A JPS6294987 A JP S6294987A JP 60235735 A JP60235735 A JP 60235735A JP 23573585 A JP23573585 A JP 23573585A JP S6294987 A JPS6294987 A JP S6294987A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- channel region
- gate insulating
- charge trapping
- drain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 230000005669 field effect Effects 0.000 title claims description 13
- 238000000034 method Methods 0.000 title description 6
- 238000009792 diffusion process Methods 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
Landscapes
- Static Random-Access Memory (AREA)
- Read Only Memory (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60235735A JPS6294987A (ja) | 1985-10-21 | 1985-10-21 | Mis電界効果型半導体装置及びその情報の検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60235735A JPS6294987A (ja) | 1985-10-21 | 1985-10-21 | Mis電界効果型半導体装置及びその情報の検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6294987A true JPS6294987A (ja) | 1987-05-01 |
| JPH0571146B2 JPH0571146B2 (https=) | 1993-10-06 |
Family
ID=16990444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60235735A Granted JPS6294987A (ja) | 1985-10-21 | 1985-10-21 | Mis電界効果型半導体装置及びその情報の検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294987A (https=) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6459960A (en) * | 1987-08-31 | 1989-03-07 | Agency Ind Science Techn | Nonvolatile semiconductor memory element |
| JPH01161770A (ja) * | 1987-12-17 | 1989-06-26 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置 |
| JPH01212472A (ja) * | 1988-02-19 | 1989-08-25 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置 |
| JPH0258349U (https=) * | 1988-10-20 | 1990-04-26 | ||
| US5143860A (en) * | 1987-12-23 | 1992-09-01 | Texas Instruments Incorporated | High density EPROM fabricaiton method having sidewall floating gates |
| JPH09116033A (ja) * | 1995-10-16 | 1997-05-02 | Nec Corp | 不揮発性半導体記憶装置 |
| US5844268A (en) * | 1993-11-30 | 1998-12-01 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device |
| US5923978A (en) * | 1995-12-18 | 1999-07-13 | Nec Corporation | Nonvolatile semiconductor memory and methods for manufacturing and using the same |
| US6111287A (en) * | 1994-08-30 | 2000-08-29 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device allowing electrical writing and erasing of information and method of manufacturing the same |
| JP2007096342A (ja) * | 1998-07-13 | 2007-04-12 | Samsung Electronics Co Ltd | 不揮発性メモリ装置 |
-
1985
- 1985-10-21 JP JP60235735A patent/JPS6294987A/ja active Granted
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6459960A (en) * | 1987-08-31 | 1989-03-07 | Agency Ind Science Techn | Nonvolatile semiconductor memory element |
| JPH01161770A (ja) * | 1987-12-17 | 1989-06-26 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置 |
| US5143860A (en) * | 1987-12-23 | 1992-09-01 | Texas Instruments Incorporated | High density EPROM fabricaiton method having sidewall floating gates |
| JPH01212472A (ja) * | 1988-02-19 | 1989-08-25 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置 |
| JPH0258349U (https=) * | 1988-10-20 | 1990-04-26 | ||
| US5844268A (en) * | 1993-11-30 | 1998-12-01 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device |
| US6111287A (en) * | 1994-08-30 | 2000-08-29 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device allowing electrical writing and erasing of information and method of manufacturing the same |
| JPH09116033A (ja) * | 1995-10-16 | 1997-05-02 | Nec Corp | 不揮発性半導体記憶装置 |
| US6188102B1 (en) | 1995-10-16 | 2001-02-13 | Nec Corporation | Non-volatile semiconductor memory device having multiple different sized floating gates |
| KR100295222B1 (ko) * | 1995-10-16 | 2001-09-17 | 가네꼬 히사시 | 비-휘발성반도체메모리장치 |
| US5923978A (en) * | 1995-12-18 | 1999-07-13 | Nec Corporation | Nonvolatile semiconductor memory and methods for manufacturing and using the same |
| US5929480A (en) * | 1995-12-18 | 1999-07-27 | Nec Corporation | Nonvolatile semiconductor memory device having first and second floating gates |
| JP2007096342A (ja) * | 1998-07-13 | 2007-04-12 | Samsung Electronics Co Ltd | 不揮発性メモリ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0571146B2 (https=) | 1993-10-06 |
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