JPS628947B2 - - Google Patents
Info
- Publication number
- JPS628947B2 JPS628947B2 JP1566480A JP1566480A JPS628947B2 JP S628947 B2 JPS628947 B2 JP S628947B2 JP 1566480 A JP1566480 A JP 1566480A JP 1566480 A JP1566480 A JP 1566480A JP S628947 B2 JPS628947 B2 JP S628947B2
- Authority
- JP
- Japan
- Prior art keywords
- unit
- capacitive element
- capacitance
- semiconductor
- capacitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1566480A JPS56112750A (en) | 1980-02-12 | 1980-02-12 | Semiconductor capacitive element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1566480A JPS56112750A (en) | 1980-02-12 | 1980-02-12 | Semiconductor capacitive element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56112750A JPS56112750A (en) | 1981-09-05 |
JPS628947B2 true JPS628947B2 (US07223432-20070529-C00017.png) | 1987-02-25 |
Family
ID=11895000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1566480A Granted JPS56112750A (en) | 1980-02-12 | 1980-02-12 | Semiconductor capacitive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56112750A (US07223432-20070529-C00017.png) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57199249A (en) * | 1981-06-01 | 1982-12-07 | Matsushita Electronics Corp | Semiconductor device |
US4527180A (en) * | 1983-01-31 | 1985-07-02 | Intel Corporation | MOS Voltage divider structure suitable for higher potential feedback regulation |
JPH0638466B2 (ja) * | 1986-12-04 | 1994-05-18 | 三菱電機株式会社 | 半導体集積回路装置 |
US5006480A (en) * | 1988-08-08 | 1991-04-09 | Hughes Aircraft Company | Metal gate capacitor fabricated with a silicon gate MOS process |
-
1980
- 1980-02-12 JP JP1566480A patent/JPS56112750A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS56112750A (en) | 1981-09-05 |
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