JPS6284971A - デイスク部材の洗浄装置 - Google Patents

デイスク部材の洗浄装置

Info

Publication number
JPS6284971A
JPS6284971A JP60223727A JP22372785A JPS6284971A JP S6284971 A JPS6284971 A JP S6284971A JP 60223727 A JP60223727 A JP 60223727A JP 22372785 A JP22372785 A JP 22372785A JP S6284971 A JPS6284971 A JP S6284971A
Authority
JP
Japan
Prior art keywords
cleaning
disk
disk member
chuck
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60223727A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532118B2 (enrdf_load_stackoverflow
Inventor
Kazuhiko Kenmori
権守　和彦
Takashi Hibiya
隆 日比谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60223727A priority Critical patent/JPS6284971A/ja
Publication of JPS6284971A publication Critical patent/JPS6284971A/ja
Publication of JPH0532118B2 publication Critical patent/JPH0532118B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP60223727A 1985-10-09 1985-10-09 デイスク部材の洗浄装置 Granted JPS6284971A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60223727A JPS6284971A (ja) 1985-10-09 1985-10-09 デイスク部材の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60223727A JPS6284971A (ja) 1985-10-09 1985-10-09 デイスク部材の洗浄装置

Publications (2)

Publication Number Publication Date
JPS6284971A true JPS6284971A (ja) 1987-04-18
JPH0532118B2 JPH0532118B2 (enrdf_load_stackoverflow) 1993-05-14

Family

ID=16802735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60223727A Granted JPS6284971A (ja) 1985-10-09 1985-10-09 デイスク部材の洗浄装置

Country Status (1)

Country Link
JP (1) JPS6284971A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6041465A (en) * 1997-12-19 2000-03-28 Speedfam Co., Ltd. Cleaning apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5880960U (ja) * 1981-11-30 1983-06-01 富士通株式会社 洗浄用スポンジ
JPS58215771A (ja) * 1982-06-07 1983-12-15 Fujitsu Ltd デイスク洗浄乾燥装置
JPS59107722U (ja) * 1982-12-29 1984-07-20 富士通株式会社 磁気記録媒体の製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5880960U (ja) * 1981-11-30 1983-06-01 富士通株式会社 洗浄用スポンジ
JPS58215771A (ja) * 1982-06-07 1983-12-15 Fujitsu Ltd デイスク洗浄乾燥装置
JPS59107722U (ja) * 1982-12-29 1984-07-20 富士通株式会社 磁気記録媒体の製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6041465A (en) * 1997-12-19 2000-03-28 Speedfam Co., Ltd. Cleaning apparatus

Also Published As

Publication number Publication date
JPH0532118B2 (enrdf_load_stackoverflow) 1993-05-14

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