JPS6284971A - Washing device for disk member - Google Patents

Washing device for disk member

Info

Publication number
JPS6284971A
JPS6284971A JP60223727A JP22372785A JPS6284971A JP S6284971 A JPS6284971 A JP S6284971A JP 60223727 A JP60223727 A JP 60223727A JP 22372785 A JP22372785 A JP 22372785A JP S6284971 A JPS6284971 A JP S6284971A
Authority
JP
Japan
Prior art keywords
cleaning
disk member
disk
chuck
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60223727A
Other languages
Japanese (ja)
Other versions
JPH0532118B2 (en
Inventor
Kazuhiko Kenmori
権守 和彦
Takashi Hibiya
隆 日比谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60223727A priority Critical patent/JPS6284971A/en
Publication of JPS6284971A publication Critical patent/JPS6284971A/en
Publication of JPH0532118B2 publication Critical patent/JPH0532118B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to completely remove foreign matter stuck to the outer surface of a disc member, by providing a cleaning member for cleaning the disc member chucked by a chuck member, and by providing a supply member for feeding cleaning liquid. CONSTITUTION:Cleaning liquid is fed into cleaning tools 28a, 28b through hoses 34a, 34b while they are driven for rotation by means of a motor or the like through the intermediary of a rotary shaft 30, a pulley 31, belts 32a, 32b pulleys 29a, 29b and rotary shafts 27a. 27b. Thereby, the outer surface of the disc member 9 is rubbed so that the front and back surfaces of the disc member 9 are cleaned with its entirety. At this time, foreign matters such as abrasion powder or the like residing between the cleaning tools 28a, 28b and the disc member 9, may be smoothly discharged to the outside since he cleaning tools 28a, 28b are rotated during cleaning, thereby no uncleaned part remains after cleaning so that it is possible to provide a complete cleaning process.

Description

【発明の詳細な説明】 [産業上の利用分Yf] 本発明は磁気ディスク、光ディスク等のように表面に記
QRが形成されるディスク部材を洗浄するディスク部材
の洗浄装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Yf] The present invention relates to a disk member cleaning device for cleaning a disk member on which a QR mark is formed, such as a magnetic disk or an optical disk.

C従来の技術] ディスク部材として、例えば、磁気ディスクは、アルミ
ニウム等の同項状板体からなるディスク部材をラッピン
グ加工等の研削加工を施こすことにより平滑化し、然る
後に該ディスク部材の表面に磁性体を塗布することによ
って、磁気記録層が形成されるようになっている。ここ
で、前述の記録層の膜圧を均一なものにするために、予
じめディスク部材の表面に塵埃等の異物が付着していな
い状態となして、゛磁性体の塗布を行う必要がある。こ
のために、記録層の形成前、また必要に応じて記録層形
成後にもディスク部材の洗浄が行なわれる。
C. Prior Art] As a disk member, for example, a magnetic disk is made by smoothing a disk member made of a homogeneous plate of aluminum or the like by subjecting it to a grinding process such as lapping, and then smoothing the surface of the disk member. A magnetic recording layer is formed by applying a magnetic material to the magnetic material. Here, in order to make the film thickness of the recording layer uniform as described above, it is necessary to apply the magnetic material after making sure that no foreign matter such as dust has adhered to the surface of the disk member in advance. be. For this purpose, the disk member is cleaned before the recording layer is formed and, if necessary, after the recording layer is formed.

従来、このディスク部材の洗浄は、多数のディスフ部材
をラックに装着した状態で洗浄液に浸漬させ、この洗浄
液を高周波振動させたり、または洗浄液中でスポンジ等
の洗浄具を用いて手作業で表面を拭うようにしていた。
Conventionally, this cleaning of disk members has been carried out by immersing a large number of disk members mounted on a rack in a cleaning solution, and then vibrating the cleaning solution at high frequency, or by manually cleaning the surface using a cleaning tool such as a sponge in the cleaning solution. I was trying to wipe it.

[発明が解決しようとする問題点] 前述のように、高周波振動により洗浄を行うようにする
と、洗浄装置の全体構造が複雑となり、装置構成が大型
になる等の不都合があるだけでなく、ディスク部材の汚
れのうち油汚れのようなものを完全に除去できない等の
欠点があった。一方、手作業による洗浄は手間がかかる
と共に、洗浄が完全に行なわれない場合が生じる欠点も
あった。
[Problems to be Solved by the Invention] As mentioned above, if cleaning is performed using high-frequency vibrations, not only will the overall structure of the cleaning device become complicated and the device configuration become large, but also the disk There are drawbacks such as the inability to completely remove dirt such as oil stains from parts. On the other hand, manual cleaning is time-consuming and has the disadvantage that cleaning may not be completed completely.

本発明は前述した従来技術の欠点を解消するためになさ
れたもので、簡単で、コンパクトな構成によりディスク
部材の表面全体を円滑かつ確実に自動洗浄することがで
きるようにしたディスク部材の洗浄装置を提供すること
を目的とするものである。
The present invention has been made in order to eliminate the drawbacks of the prior art described above, and is a cleaning device for a disk member that is capable of automatically cleaning the entire surface of a disk member smoothly and reliably with a simple and compact configuration. The purpose is to provide the following.

[問題点を解決するための手段] 前述の目的を達成するために本発明に係る洗浄装置は、
円環状に形成したディスク部材の外周縁または内周縁を
回転可能にチャックするチャック部材と、該チャック部
材によってチャックしたディスク部材の表面に当接させ
てこの表面を擦ることによって該ディスク部材を洗浄す
る洗浄部材と、該洗浄部材を回転させる回転駆動手段と
、この洗浄部材の内部に洗浄液を供給する洗浄液供給部
材とから構成したことをその特徴とするものである。
[Means for solving the problems] In order to achieve the above-mentioned object, the cleaning device according to the present invention has the following features:
A chuck member that rotatably chucks the outer circumferential edge or inner circumferential edge of a disk member formed in an annular shape, and cleaning the disk member by bringing the chuck member into contact with the surface of the chucked disk member and rubbing this surface. It is characterized in that it is composed of a cleaning member, a rotation drive means for rotating the cleaning member, and a cleaning liquid supply member for supplying cleaning liquid into the interior of the cleaning member.

[作用] 前述のように構成される洗浄装置を使用してディスク部
材の洗浄を行うには、洗浄すべきディスク部材をハンド
リング手段により1枚ずつチャック部材に装着し、洗浄
部材を該ディスク部材の表面に押し当てると共に該洗浄
部材を回転させ、かつ該洗浄部材の内部に向けて洗浄液
を供給しながらディスク部材の表面を擦ることによって
、該ディスク部材の表面に付着した異物や油汚れ等を除
去する。そして、洗浄部材の回転によってディスク部材
に回転力が付与され、このディスク部材の回転によって
、該ディスク部材全体がむらなく、円滑かつ確実に自動
洗浄される。しかも、洗浄部材を回転させることにより
、それとディスク部材の表面との間に介在する異物等は
洗浄部材の回転力によって該洗浄部材の外周側から外部
に移行して除去されることになり、洗浄性能が向上する
。さらに、洗浄部材の内部に洗浄液を供給することによ
り、洗浄作業中に該洗浄部材とディスク部材との間に適
度の液膜が形成され、該ディスク部材の表面が損傷する
等の不都合はない。
[Operation] In order to clean disk members using the cleaning device configured as described above, the disk members to be cleaned are mounted one by one on the chuck member by the handling means, and the cleaning member is attached to the chuck member. By pressing the cleaning member against the surface, rotating the cleaning member, and rubbing the surface of the disc member while supplying cleaning liquid toward the inside of the cleaning member, foreign matter, oil stains, etc. attached to the surface of the disc member are removed. do. Rotation of the cleaning member applies rotational force to the disk member, and the rotation of the disk member automatically cleans the entire disk member evenly, smoothly, and reliably. Moreover, by rotating the cleaning member, foreign matter interposed between it and the surface of the disk member is removed by moving from the outer circumferential side of the cleaning member to the outside due to the rotational force of the cleaning member. Improved performance. Furthermore, by supplying the cleaning liquid inside the cleaning member, a suitable liquid film is formed between the cleaning member and the disk member during the cleaning operation, and there is no problem such as damage to the surface of the disk member.

[実施例] 以下、本発明の実施例を図面に基づいて詳細に説明する
[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings.

まず、第1図において、1は洗浄装置本体を構成するハ
ウジングで、該ハウジングl内には搬入用ラック2を搬
送する搬入部3.搬出用ラック4を搬送する搬出部5が
形成されると共に、作業室6が形成されている。
First, in FIG. 1, reference numeral 1 denotes a housing that constitutes the main body of the cleaning device, and inside the housing 1 there is a loading section 3 for transporting a loading rack 2. A carry-out section 5 for carrying the carry-out rack 4 is formed, and a work chamber 6 is also formed.

作業室6内は洗浄部7と乾燥部8とに分れ、かつ該作業
室6には搬入用ラック2においてラッピング処理された
ディスク部材9が立設状態で搬送され、またこの搬送途
中でシャワー10により予備洗浄されたディスク部材を
1枚ずつ取出す搬入ハンドラ11が設けられると共に、
洗浄、乾燥後のディスク部材9を搬出用ラック2に移送
する搬出ハンドラ12が設けられ、該各ハンドラ11,
12はそれぞれ回動アームIla、12aの先端にディ
スク部材9をチャックするチャック部材11b、12b
を装着することにより構成される。さらに、搬入ハンド
ラ11から洗浄部7、該洗浄部7から乾燥部8、該乾燥
部8から搬出ハンドラ12ヘディスク部材9を移載する
移載ハンドラ13が作業室6内に配設され、該移載ハン
ドラ13は所定角度往復回動じ得ると共にその回動軸線
に沿って前後に往復動し得るようになっている。
The inside of the work room 6 is divided into a washing section 7 and a drying section 8, and a wrapped disk member 9 is transported in an upright state in the carrying rack 2 to the work room 6, and a shower is installed during the transport. A carry-in handler 11 is provided for taking out the disk members pre-cleaned by 10 one by one, and
A carry-out handler 12 is provided to transfer the disk member 9 after cleaning and drying to the carry-out rack 2, and each handler 11,
Reference numerals 12 denote chuck members 11b and 12b that chuck the disk member 9 at the tips of the rotating arms Ila and 12a, respectively.
It is configured by attaching the . Furthermore, a transfer handler 13 for transferring disk members 9 from the carry-in handler 11 to the cleaning section 7, from the washing section 7 to the drying section 8, and from the drying section 8 to the carry-out handler 12 is disposed in the work chamber 6. The mounting handler 13 can reciprocate by a predetermined angle and can also reciprocate back and forth along its rotation axis.

洗浄部7は第2図乃至第4図にしたように、回動軸14
aによって所定角度ずつ回動せしめられるロータリテー
ブル14を有し、該ロータリテーブル14上は十字状の
仕切壁15によって4つの作業部に区画形成されている
。第2図において、図中上方の作業区画部Aは、移載ハ
ンドラ13との間でディスク部材9の着脱を行う着脱部
となり1図中右方の作業区画部Bは洗浄部材16により
ディスク部材の表裏の各面を洗浄する洗浄部、下方の作
業区画部Cはすすぎ部材17によって洗浄後のすすぎを
行うすすぎ部、さらに図中右方の作業区画部りはエツジ
洗い部材18によりディスク部材9の内外の各周縁部の
洗浄を行うエツジ洗い部となっている。そして、前述の
各作業区画部A、B、C,Dにはディスク部材9の外周
縁部を回転可能に挟持するためにチャック部材19が取
付けられている。
As shown in FIGS. 2 to 4, the cleaning section 7 has a rotating shaft 14.
The rotary table 14 has a rotary table 14 that can be rotated by a predetermined angle by a angle a, and the rotary table 14 is divided into four working sections by a cross-shaped partition wall 15. In FIG. 2, the working section A on the upper side of the figure is an attachment/detachment section for attaching and detaching the disk member 9 to and from the transfer handler 13, and the working section B on the right side of FIG. The lower working section C is a rinsing section that performs rinsing after cleaning with a rinsing member 17, and the working section on the right side of the figure is an edge washing member 18 that cleans the disk member 9. This is an edge washing section that cleans the inner and outer peripheral parts of the machine. A chuck member 19 is attached to each of the aforementioned work sections A, B, C, and D to rotatably clamp the outer peripheral edge of the disk member 9.

該チャック部材19はディスク部材9の3位置において
それと係合するチャッキングローラ19aと、該チャッ
キングローラ19aを回転可能に支持する支持軸19b
と、チャッキングローラ19aを第2図における作業区
画部Aに実線で示したチャック位置と鎖線で示したチャ
ック解除位置との間に変位させる作動片19cの各部材
を3組設置することにより構成される。そして、前述の
チャック位置とチャック解除位置との間の変位を可能な
らしめるために、同図の作業区画部りにおいて示した如
く、チャック部材18における各作動片19cを変位さ
せる歯車駆動部20が設けられている。この歯車駆動部
20の駆動歯車20aは第3図及び第4図に示した如く
ロータリテーブル14の裏面側においてレバー21と連
結されており、該レバー21は常時には鎖線で示したよ
うにばね22よりスットパ23に当接した位置にあり、
このときチャック部材19はチャック位置となり、作業
区画部Aに対応する位置に設けた回動駆動部24に連結
した作動片25を鎖線位置から実線位置に回動させるこ
とによりレバー21を実線位置に移行させて、チャック
部材19のチャックを解除するチャック解除位薗に変位
させることができるようになっている。
The chuck member 19 includes a chucking roller 19a that engages with the disk member 9 at three positions, and a support shaft 19b that rotatably supports the chucking roller 19a.
and three sets of actuating pieces 19c for displacing the chucking roller 19a between the chuck position shown by a solid line and the chuck release position shown by a chain line in the working section A in FIG. 2. be done. In order to enable the displacement between the chuck position and the chuck release position described above, a gear drive unit 20 for displacing each actuating piece 19c of the chuck member 18 is provided as shown in the working section of the figure. It is provided. The drive gear 20a of the gear drive unit 20 is connected to a lever 21 on the back side of the rotary table 14 as shown in FIGS. It is located in a position closer to the stopper 23,
At this time, the chuck member 19 is in the chuck position, and the lever 21 is moved to the solid line position by rotating the operating piece 25 connected to the rotation drive unit 24 provided at the position corresponding to the work compartment A from the chain line position to the solid line position. The chuck member 19 can be moved to a chuck release position for releasing the chuck.

次に、作業区画部Bに対応する位置に設けた洗浄部材1
6は、第5図に示したように、上下1対のアーム28a
、28bを有し、該各アーム2[ia 、 28bには
回転軸27a、27bが挿嵌されでおり、該各回転軸2
7a、27bの一端部には洗浄具28a、28bが取付
けられ、該洗浄具28a、28bはディスク部材9の内
縁と外縁との間の幅より大きな外径の円環状のスポンジ
、ブラシ等の柔軟材で形成されている。そして、回転軸
27a、27bの他端部にはプーリ29a 、 2!3
bが取付けられて、該各プーリ29a。
Next, the cleaning member 1 provided at a position corresponding to the work compartment B
6 is a pair of upper and lower arms 28a as shown in FIG.
, 28b, and rotating shafts 27a, 27b are inserted into each arm 2[ia, 28b, and each rotating shaft 2
Cleaning tools 28a, 28b are attached to one ends of 7a, 27b, and the cleaning tools 28a, 28b are flexible, such as annular sponges or brushes having an outer diameter larger than the width between the inner and outer edges of the disk member 9. It is made of wood. Pulleys 29a and 2!3 are provided at the other ends of the rotating shafts 27a and 27b.
b is attached to each pulley 29a.

29bと回転軸30に設けたプーリ31a、31bとの
間にベルト32a、32bを巻回して設け、この回転軸
30を作業室6を画成するパネルPを介して外部に突出
させて、該回転軸30にモータ等の駆動源を接続してそ
れ回転させることにより洗浄具28a。
29b and pulleys 31a, 31b provided on the rotating shaft 30, belts 32a, 32b are wound and provided, and this rotating shaft 30 is made to protrude outside through the panel P that defines the working chamber 6. The cleaning tool 28a is constructed by connecting a drive source such as a motor to the rotating shaft 30 and rotating it.

28bを回転させることができるようになっている。こ
れらプーリ29a 、 29b 、回転軸30.プーリ
31a、 31 b及びベルト32a、32bによッテ
回転駆動手段が構成され、この回転駆動手段により洗浄
328a、28bが回転せしめられ、第6図に示したよ
うにこの洗浄具28a、28bの矢示(イ)方向の回転
によってディスク部材9はチャック部材19に保持され
た状態で矢示(ロ)方向に回転駆動せしめられるように
なっている。
28b can be rotated. These pulleys 29a, 29b, rotating shaft 30. The pulleys 31a, 31b and the belts 32a, 32b constitute a rotary driving means, which rotates the cleaning tools 328a, 28b, as shown in FIG. By rotating in the direction of the arrow (A), the disk member 9 is rotated in the direction of the arrow (B) while being held by the chuck member 19.

ここで、洗浄!1.28a、28bは前述したように円
環状となっており、この洗浄具28a、28bの内部に
中性洗剤、純水等からなる洗浄液が供給するために、第
7図に示したようにアーム2Ela、28bに取付けた
回転軸支持ブロック33a、33bに形成した円環状の
液室34a、34 bに洗浄液を供給するホース35a
、35bが接続されており、該各ホース35a。
Clean here! 1.28a and 28b are annular as described above, and in order to supply cleaning liquid consisting of neutral detergent, pure water, etc. to the inside of these cleaning tools 28a and 28b, as shown in FIG. A hose 35a that supplies cleaning liquid to annular liquid chambers 34a and 34b formed in rotating shaft support blocks 33a and 33b attached to arms 2Ela and 28b.
, 35b are connected to each hose 35a.

35bからの洗浄液を洗浄具28a、28b内部に供給
するために回転軸2?a、27bには洗浄具28a。
In order to supply the cleaning liquid from 35b into the cleaning tools 28a and 28b, the rotating shaft 2? A and 27b are cleaning tools 28a.

28bの内部に開口する通路38a、38bが穿設され
ている。
Passages 38a and 38b opening into the interior of 28b are bored.

また、作業区画部Cに対応する位置に設置したすすぎ部
材17は、洗浄部材16と同様の構造を有し1回転軸3
7により回転せしめられるすすぎ洗浄具38a、38b
にホース39a、39 bを介してすすぎ水を供給する
ことによって、洗浄後のディスク部材9のすすぎを行な
うことができるようになっている。
Further, a rinsing member 17 installed at a position corresponding to the work compartment C has a structure similar to that of the cleaning member 16, and has one rotating shaft 3.
Rinse cleaning tools 38a and 38b rotated by 7
By supplying rinsing water through the hoses 39a and 39b, the disk member 9 can be rinsed after cleaning.

さらに、エツジ洗い部材18はスポンジ等からなる外縁
、内縁の各洗浄具40a、40bを有し、該洗浄具40
a、40bは回転可能に支持アーム41に取付けられて
、該支持アーム41は揺動可能となっている。
Further, the edge cleaning member 18 has outer and inner edge cleaning tools 40a and 40b made of sponges, etc.
a and 40b are rotatably attached to a support arm 41, and the support arm 41 is swingable.

未実施例は前述のように構成されるもので、次にその作
動にって説明する。
The unembodied embodiment is constructed as described above, and its operation will be explained next.

洗浄すべきディスク部材9は搬入ラック2に立設状態に
設置され、この状態で搬入ラック2を搬入部3に装着さ
せる。そして、該搬入ラック2が搬入部3を搬送させる
途中でシャワー9で洗浄することによって大部分の研摩
粉を洗い流す、そして、搬入ラック2が搬入部3の所定
の位置に到達したときに、搬入ハンドラ11を搬入ラッ
ク2側に回動させて、チャック部材11bによりディス
ク部材9をチャックする。然る後、搬入ハンドラ11を
回動させて、該ディスク部材9を移載ハンドラ13に移
載させる。
The disk member 9 to be cleaned is installed in an upright state on the carry-in rack 2, and the carry-in rack 2 is attached to the carry-in section 3 in this state. While the carry-in rack 2 is transporting the carry-in section 3, most of the abrasive powder is washed away by washing with a shower 9, and when the carry-in rack 2 reaches a predetermined position in the carry-in section 3, the carry-in section 3 is The handler 11 is rotated toward the carry-in rack 2 side, and the disk member 9 is chucked by the chuck member 11b. Thereafter, the carry-in handler 11 is rotated to transfer the disk member 9 to the transfer handler 13.

ディスク部材9が移載ハンドラ13に移載された後、該
移載ハンドラ13をロータリテーブル14から離間する
方向に突出変位させると共に90度回動させて、ロータ
リテーブル14の作業区画部Aと対面させて、該ロータ
リテーブル14に近接する方向に縮小変位させ、ディス
ク部材9をチャック部材19に移載する。そして、ロー
タリテーブル14に移載されたディスク部材9は回動軸
14aによりロータリテーブル14を90度回動させる
ことによって洗浄を行う作業区画部Bに移行させる。こ
のとき洗浄部材1B、すすぎ部材17及びエツジ洗い部
材18は、ロータリテーブル14におt−hるチャック
部材18や仕切壁15と接触しないようにするために、
それぞれの回転軸を中心として回動し、第2図に鎖線で
示した作動位置から一旦実線で示した非作動位置に変位
してロータリテーブル14から離間し、再び鎖線の作動
位置に復帰することによって洗浄具28a、2eb間に
ディスク部材9を挟み込ませる。このようにしてディス
ク部材9の作業区画部Bへの移行が完了した後、ホース
34a、34bから中性洗剤等からなる洗浄液を洗浄具
28a、28bの内部に供給すると共に、該洗浄具28
a、28bを回転させる。これによって、洗浄具28a
、28bによりディスク部材9の表面が擦られることに
よって該ディスク部材9の洗浄が行なわれ、しかもこの
洗浄具28a、28bの回転によってディスク部材9に
回転力が与えられて、ディスク部材9の表裏各面全体に
対する洗浄が行なわれる。
After the disk member 9 is transferred to the transfer handler 13, the transfer handler 13 is moved to protrude in a direction away from the rotary table 14 and rotated 90 degrees to face the work section A of the rotary table 14. Then, the disk member 9 is reduced and displaced in a direction approaching the rotary table 14, and the disk member 9 is transferred to the chuck member 19. Then, the disk member 9 transferred to the rotary table 14 is moved to the work section B where cleaning is performed by rotating the rotary table 14 by 90 degrees using the rotation shaft 14a. At this time, the cleaning member 1B, the rinsing member 17, and the edge cleaning member 18 are
It rotates around its respective rotation axis, and is once displaced from the operating position indicated by the chain line in FIG. 2 to the non-operating position indicated by the solid line, separated from the rotary table 14, and then returned to the operating position indicated by the chain line. The disk member 9 is sandwiched between the cleaning tools 28a and 2eb. After the transfer of the disk member 9 to the work compartment B is completed in this way, a cleaning liquid consisting of a neutral detergent or the like is supplied from the hoses 34a and 34b into the cleaning tools 28a and 28b, and
Rotate a and 28b. As a result, the cleaning tool 28a
, 28b scrub the surface of the disk member 9, thereby cleaning the disk member 9, and rotation of the cleaning tools 28a, 28b applies rotational force to the disk member 9, thereby cleaning the front and back surfaces of the disk member 9. The entire surface is cleaned.

ここで、洗浄具28a、28bとディスク部材9との間
に介在する摩耗粉等の異物は、洗浄中において洗浄Jj
28a、29bが回転せしめられるので、該洗浄共28
a、28bの回転によって円滑にその外周面側に移動し
て外部に排出され、洗い残しがなく、完全な洗浄が可能
となる。しかも、洗浄具28a、28bとディスク部材
9との間に適度な洗浄液の液膜が形成されるから、洗浄
中に洗浄具28a、28bや異物の摩擦によりディスク
部材9の表面が損傷する等の不都合を生じることはない
Here, foreign matter such as abrasion powder interposed between the cleaning tools 28a, 28b and the disk member 9 is removed by cleaning Jj during cleaning.
Since 28a and 29b are rotated, the washing 28
By the rotation of a and 28b, it smoothly moves to the outer circumference side and is discharged to the outside, making it possible to completely clean without leaving any residue. Moreover, since a suitable liquid film of cleaning liquid is formed between the cleaning tools 28a, 28b and the disk member 9, the surface of the disk member 9 is prevented from being damaged due to friction of the cleaning tools 28a, 28b or foreign objects during cleaning. There will be no inconvenience.

このディスク部材9の洗浄が完了すると、ロータリテー
ブル14を90度回動させて、すすぎを行う作業区画部
Cに移行させる。そして、この作業区画部Cにおいては
、前述の作業区画部Bにおけると同様の手法ですすぎ部
材17を使用して、すすぎ洗浄具38a、38bの内部
にホース38a、39bを介してすすぎ水を供給するこ
とにより洗浄液を洗い流すすすぎ洗浄を行う、この後、
ロータリテーブル14をさらに90度回動させることに
よってエツジ洗いを行う作業区画部りに移送し、エツジ
洗い部材18を作動させることによってこのディスク部
材9の内外の各周縁部の洗浄が行なわれ、ディスク部材
9から異物2油汚れ等を完全に除去した後。
When the cleaning of the disk member 9 is completed, the rotary table 14 is rotated 90 degrees and transferred to the work compartment C where rinsing is performed. In this working section C, the rinsing member 17 is used in the same manner as in the above-mentioned working section B to supply rinsing water to the inside of the rinsing cleaning tools 38a and 38b via the hoses 38a and 39b. Perform rinsing to wash away the cleaning solution by doing this. After this,
By further rotating the rotary table 14 by 90 degrees, the rotary table 14 is transferred to a work section where edge cleaning is performed, and by operating the edge cleaning member 18, the inner and outer peripheral edges of the disk member 9 are cleaned. After completely removing foreign matter 2, oil stains, etc. from member 9.

さらにロータリテーブル14を90度回動させることに
よって、洗浄完了後のディスク部材は再び作業区画部A
に帰還せしめられる。
By further rotating the rotary table 14 by 90 degrees, the disk member after cleaning is returned to the working section A.
was forced to return to

前述のようにして、洗浄が完了したディスク部材9が作
業区画部Aに帰還し、移載ノーンドラ13がロータリテ
ーブル14側に変位したときに、該移載ハンドラ13に
よってこのディスク部材9をチャ、。
As described above, when the disk member 9 that has been cleaned returns to the work section A and the transfer handler 13 is displaced toward the rotary table 14, the disk member 9 is chucked by the transfer handler 13. .

りし、搬入ハンドラ11に移載されて、洗浄後のディス
ク部材9は乾燥部8に移行して該乾燥部8において高速
スピン乾燥等により乾燥せしめられる。このように乾燥
したディスク部材9は移載/\ンドラ13の作動により
、該移載ハンドラ13に移載し、該移載ハンドラ13の
回動によって搬出/飄ンドラ3に移載され、該搬出ハン
ドラ3の回動により搬出ラック4内に載置される。この
動作を順次繰返すことによってディスク部材9の洗浄が
行なわれ、搬出ラック4を搬出部5から外部に搬送する
ことによって洗浄の完了したディスク部材9が取出され
る。
The cleaned disk member 9 is transferred to the carry-in handler 11, and transferred to the drying section 8, where it is dried by high-speed spin drying or the like. The disk member 9 dried in this way is transferred to the transfer handler 13 by the operation of the transfer handler 13, transferred to the transfer handler 13 by the rotation of the transfer handler 13, and then transferred to the transfer handler 3, and then transferred to the transfer handler 13 by the rotation of the transfer handler 13. The handler 3 rotates to place it in the carry-out rack 4. By sequentially repeating this operation, the disk member 9 is cleaned, and by transporting the carry-out rack 4 to the outside from the carry-out section 5, the disk member 9 that has been completely cleaned is taken out.

なお、前述の実施例では洗浄部材の洗浄具を円環状に形
成したものを示したが、これに代えて円柱状の洗浄具を
使用することもできる。また、洗浄部材はディスク部材
の両面に当接させるものだけでなく1片面のみに当接さ
せるようにすることもできる。さらに、チャック部材は
ロータリテーブル上に設置するものとしたが、これは複
数の洗浄工程でディスク部材を洗浄するようにしたため
で、弔−の洗浄工程で洗浄する場合には固定的に設けた
支持部材に設置することもできる。
In the above-described embodiments, the cleaning tool of the cleaning member was formed in an annular shape, but a cylindrical cleaning tool may be used instead. Further, the cleaning member may not only be brought into contact with both surfaces of the disk member, but may also be brought into contact with only one side. Furthermore, the chuck member was installed on a rotary table, but this was because the disc member was cleaned in multiple cleaning processes. It can also be installed on a member.

[発明の効果] 以上詳述した如く本発明は、ディスク部材をチャック部
材に回転可能にチャックさせた状態で洗浄部材によって
該ディスク部材を洗浄するようになし、しかも洗浄時に
洗浄部材を回転させながその内部に洗浄液を供給するよ
うに構成したから、ディスク部材の表面に付着する摩耗
粉等の異物を該ディスク部材と洗浄部材との間に食み込
ませることなく完全に除去でき、ディスク部材の全体を
円滑かつ確実に自動洗浄することができると共に、ディ
スク部材の表面に適度の液膜を形成した状態で洗浄する
ことができるので、該ディスク部材が異物や洗浄部材に
より損傷するおそれはない。
[Effects of the Invention] As described in detail above, the present invention allows the cleaning member to clean the disc member while the disc member is rotatably chucked by the chuck member, and the cleaning member does not need to be rotated during cleaning. Since the cleaning liquid is supplied to the interior of the disk member, foreign matter such as abrasion particles adhering to the surface of the disk member can be completely removed without getting stuck between the disk member and the cleaning member. The entire surface of the disc can be automatically cleaned smoothly and reliably, and it can be cleaned with an appropriate liquid film formed on the surface of the disc member, so there is no risk of the disc member being damaged by foreign objects or the cleaning member. .

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す洗浄装置の全体構成図
、第2図は洗浄部の拡大正面図、第3図は第2図のx−
x矢視図、第4図はロータリテーブルのチャック部材の
作動機構を示す構成説明1:ハウジング、7:洗浄部、
9:ディスク部材、14:ロータリテーブル、16:洗
浄部材、19:チャ”/り部材、30:回転軸、28a
、28b :洗浄具。
FIG. 1 is an overall configuration diagram of a cleaning device showing an embodiment of the present invention, FIG. 2 is an enlarged front view of the cleaning section, and FIG. 3 is an x-
X-arrow view, FIG. 4 shows the operating mechanism of the chuck member of the rotary table. 1: Housing, 7: Cleaning section,
9: Disk member, 14: Rotary table, 16: Cleaning member, 19: Cha''/ri member, 30: Rotating shaft, 28a
, 28b: Cleaning tool.

Claims (2)

【特許請求の範囲】[Claims] (1)円環状に形成したディスク部材の外周縁または内
周縁を回転可能にチャックするチャック部材と、該チャ
ック部材によってチャックしたディスク部材の表面に当
接させてこの表面を擦ることによって該ディスク部材を
洗浄する洗浄部材と、該洗浄部材を回転させる回転駆動
手段と、前記洗浄部材の内部に洗浄液を供給する洗浄液
供給部材とから構成したことを特徴するディスク部材の
洗浄装置。
(1) A chuck member that rotatably chucks the outer or inner circumferential edge of a disc member formed in an annular shape, and the disc member that is brought into contact with the surface of the chucked disc member by the chuck member and rubbed against the surface. 1. A cleaning device for a disk member, comprising: a cleaning member for cleaning the cleaning member; a rotation drive means for rotating the cleaning member; and a cleaning liquid supply member for supplying cleaning liquid into the cleaning member.
(2)前記洗浄部材を前記ディスク部材の表裏両面に当
接させるように構成したことを特徴とする特許請求の範
囲第1項記載のディスク部材の洗浄装置
(2) A cleaning device for a disk member according to claim 1, characterized in that the cleaning member is configured to come into contact with both the front and back surfaces of the disk member.
JP60223727A 1985-10-09 1985-10-09 Washing device for disk member Granted JPS6284971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60223727A JPS6284971A (en) 1985-10-09 1985-10-09 Washing device for disk member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60223727A JPS6284971A (en) 1985-10-09 1985-10-09 Washing device for disk member

Publications (2)

Publication Number Publication Date
JPS6284971A true JPS6284971A (en) 1987-04-18
JPH0532118B2 JPH0532118B2 (en) 1993-05-14

Family

ID=16802735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60223727A Granted JPS6284971A (en) 1985-10-09 1985-10-09 Washing device for disk member

Country Status (1)

Country Link
JP (1) JPS6284971A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6041465A (en) * 1997-12-19 2000-03-28 Speedfam Co., Ltd. Cleaning apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5880960U (en) * 1981-11-30 1983-06-01 富士通株式会社 cleaning sponge
JPS58215771A (en) * 1982-06-07 1983-12-15 Fujitsu Ltd Device for cleaning and drying disc
JPS59107722U (en) * 1982-12-29 1984-07-20 富士通株式会社 Magnetic recording media manufacturing equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5880960U (en) * 1981-11-30 1983-06-01 富士通株式会社 cleaning sponge
JPS58215771A (en) * 1982-06-07 1983-12-15 Fujitsu Ltd Device for cleaning and drying disc
JPS59107722U (en) * 1982-12-29 1984-07-20 富士通株式会社 Magnetic recording media manufacturing equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6041465A (en) * 1997-12-19 2000-03-28 Speedfam Co., Ltd. Cleaning apparatus

Also Published As

Publication number Publication date
JPH0532118B2 (en) 1993-05-14

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