JPS6284970A - ディスク部材の洗浄装置 - Google Patents

ディスク部材の洗浄装置

Info

Publication number
JPS6284970A
JPS6284970A JP60223726A JP22372685A JPS6284970A JP S6284970 A JPS6284970 A JP S6284970A JP 60223726 A JP60223726 A JP 60223726A JP 22372685 A JP22372685 A JP 22372685A JP S6284970 A JPS6284970 A JP S6284970A
Authority
JP
Japan
Prior art keywords
cleaning
disk
disk member
section
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60223726A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446194B2 (enrdf_load_stackoverflow
Inventor
Kazuhiko Kenmori
権守　和彦
Takashi Hibiya
隆 日比谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60223726A priority Critical patent/JPS6284970A/ja
Publication of JPS6284970A publication Critical patent/JPS6284970A/ja
Publication of JPH0446194B2 publication Critical patent/JPH0446194B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP60223726A 1985-10-09 1985-10-09 ディスク部材の洗浄装置 Granted JPS6284970A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60223726A JPS6284970A (ja) 1985-10-09 1985-10-09 ディスク部材の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60223726A JPS6284970A (ja) 1985-10-09 1985-10-09 ディスク部材の洗浄装置

Publications (2)

Publication Number Publication Date
JPS6284970A true JPS6284970A (ja) 1987-04-18
JPH0446194B2 JPH0446194B2 (enrdf_load_stackoverflow) 1992-07-29

Family

ID=16802719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60223726A Granted JPS6284970A (ja) 1985-10-09 1985-10-09 ディスク部材の洗浄装置

Country Status (1)

Country Link
JP (1) JPS6284970A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5826292A (en) * 1996-06-27 1998-10-27 Speedfam Co., Ltd. Disk cleaning and drying apparatus
CN104624539A (zh) * 2015-02-14 2015-05-20 济南大学 一种三爪卡盘式钢丝绳除垢装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107722U (ja) * 1982-12-29 1984-07-20 富士通株式会社 磁気記録媒体の製造装置
JPS608188A (ja) * 1983-06-28 1985-01-17 Nissan Motor Co Ltd ヨツトのセ−ル支持構造

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107722U (ja) * 1982-12-29 1984-07-20 富士通株式会社 磁気記録媒体の製造装置
JPS608188A (ja) * 1983-06-28 1985-01-17 Nissan Motor Co Ltd ヨツトのセ−ル支持構造

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5826292A (en) * 1996-06-27 1998-10-27 Speedfam Co., Ltd. Disk cleaning and drying apparatus
CN104624539A (zh) * 2015-02-14 2015-05-20 济南大学 一种三爪卡盘式钢丝绳除垢装置

Also Published As

Publication number Publication date
JPH0446194B2 (enrdf_load_stackoverflow) 1992-07-29

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