JPS6280281A - フオトリソエツチング加工法 - Google Patents

フオトリソエツチング加工法

Info

Publication number
JPS6280281A
JPS6280281A JP22118885A JP22118885A JPS6280281A JP S6280281 A JPS6280281 A JP S6280281A JP 22118885 A JP22118885 A JP 22118885A JP 22118885 A JP22118885 A JP 22118885A JP S6280281 A JPS6280281 A JP S6280281A
Authority
JP
Japan
Prior art keywords
resist
substrate
film
curved surface
desired pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22118885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520515B2 (enExample
Inventor
Keiji Fujimagari
藤曲　啓志
Kenichi Kobayashi
健一 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP22118885A priority Critical patent/JPS6280281A/ja
Publication of JPS6280281A publication Critical patent/JPS6280281A/ja
Publication of JPH0520515B2 publication Critical patent/JPH0520515B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H05K3/064—Photoresists
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Electronic Switches (AREA)
JP22118885A 1985-10-04 1985-10-04 フオトリソエツチング加工法 Granted JPS6280281A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22118885A JPS6280281A (ja) 1985-10-04 1985-10-04 フオトリソエツチング加工法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22118885A JPS6280281A (ja) 1985-10-04 1985-10-04 フオトリソエツチング加工法

Publications (2)

Publication Number Publication Date
JPS6280281A true JPS6280281A (ja) 1987-04-13
JPH0520515B2 JPH0520515B2 (enExample) 1993-03-19

Family

ID=16762854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22118885A Granted JPS6280281A (ja) 1985-10-04 1985-10-04 フオトリソエツチング加工法

Country Status (1)

Country Link
JP (1) JPS6280281A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103313520A (zh) * 2012-03-14 2013-09-18 深圳光启创新技术有限公司 一种曲面金属图形的制作方法和曲面金属图形基板

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916433A (ja) * 1982-07-20 1984-01-27 Matsushita Electric Ind Co Ltd 選択呼出受信装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916433A (ja) * 1982-07-20 1984-01-27 Matsushita Electric Ind Co Ltd 選択呼出受信装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103313520A (zh) * 2012-03-14 2013-09-18 深圳光启创新技术有限公司 一种曲面金属图形的制作方法和曲面金属图形基板

Also Published As

Publication number Publication date
JPH0520515B2 (enExample) 1993-03-19

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