JPS6272517A - シリカの微細粉末の製造方法 - Google Patents
シリカの微細粉末の製造方法Info
- Publication number
- JPS6272517A JPS6272517A JP21222185A JP21222185A JPS6272517A JP S6272517 A JPS6272517 A JP S6272517A JP 21222185 A JP21222185 A JP 21222185A JP 21222185 A JP21222185 A JP 21222185A JP S6272517 A JPS6272517 A JP S6272517A
- Authority
- JP
- Japan
- Prior art keywords
- water
- mineral acid
- silica
- added
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 176
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 84
- 239000000843 powder Substances 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000002253 acid Substances 0.000 claims abstract description 55
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052500 inorganic mineral Inorganic materials 0.000 claims abstract description 44
- 239000011707 mineral Substances 0.000 claims abstract description 44
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910052910 alkali metal silicate Inorganic materials 0.000 claims abstract description 31
- 239000002002 slurry Substances 0.000 claims abstract description 20
- 239000000203 mixture Substances 0.000 claims abstract description 18
- 150000001298 alcohols Chemical class 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 16
- 238000003756 stirring Methods 0.000 claims description 15
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 12
- 239000007864 aqueous solution Substances 0.000 claims description 12
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical group [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 9
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims description 6
- 239000004115 Sodium Silicate Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 5
- -1 alkylene diols Chemical class 0.000 claims description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 239000012065 filter cake Substances 0.000 claims description 3
- 230000003472 neutralizing effect Effects 0.000 claims description 3
- 229920000233 poly(alkylene oxides) Polymers 0.000 claims description 3
- 230000001376 precipitating effect Effects 0.000 claims 1
- 239000002244 precipitate Substances 0.000 abstract description 22
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 4
- 239000007787 solid Substances 0.000 abstract description 4
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 33
- 235000019441 ethanol Nutrition 0.000 description 32
- 239000012535 impurity Substances 0.000 description 13
- 239000002994 raw material Substances 0.000 description 13
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 238000001914 filtration Methods 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 10
- 238000002386 leaching Methods 0.000 description 10
- 238000005406 washing Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000001556 precipitation Methods 0.000 description 8
- 150000007513 acids Chemical class 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000000741 silica gel Substances 0.000 description 6
- 229910002027 silica gel Inorganic materials 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 235000019353 potassium silicate Nutrition 0.000 description 5
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000000967 suction filtration Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000000499 gel Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000008213 purified water Substances 0.000 description 3
- 239000005368 silicate glass Substances 0.000 description 3
- 150000004760 silicates Chemical class 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001879 gelation Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- QNVRIHYSUZMSGM-UHFFFAOYSA-N hexan-2-ol Chemical compound CCCCC(C)O QNVRIHYSUZMSGM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- QNVRIHYSUZMSGM-LURJTMIESA-N 2-Hexanol Natural products CCCC[C@H](C)O QNVRIHYSUZMSGM-LURJTMIESA-N 0.000 description 1
- 241000206761 Bacillariophyta Species 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004111 Potassium silicate Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910001854 alkali hydroxide Inorganic materials 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 150000001340 alkali metals Chemical group 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 239000010433 feldspar Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- PAZHGORSDKKUPI-UHFFFAOYSA-N lithium metasilicate Chemical compound [Li+].[Li+].[O-][Si]([O-])=O PAZHGORSDKKUPI-UHFFFAOYSA-N 0.000 description 1
- 229910052912 lithium silicate Inorganic materials 0.000 description 1
- 210000003141 lower extremity Anatomy 0.000 description 1
- 229910052914 metal silicate Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- QQZOPKMRPOGIEB-UHFFFAOYSA-N n-butyl methyl ketone Natural products CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000001637 plasma atomic emission spectroscopy Methods 0.000 description 1
- 238000000918 plasma mass spectrometry Methods 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229910052913 potassium silicate Inorganic materials 0.000 description 1
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- HFQQZARZPUDIFP-UHFFFAOYSA-M sodium;2-dodecylbenzenesulfonate Chemical compound [Na+].CCCCCCCCCCCCC1=CC=CC=C1S([O-])(=O)=O HFQQZARZPUDIFP-UHFFFAOYSA-M 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21222185A JPS6272517A (ja) | 1985-09-27 | 1985-09-27 | シリカの微細粉末の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21222185A JPS6272517A (ja) | 1985-09-27 | 1985-09-27 | シリカの微細粉末の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6272517A true JPS6272517A (ja) | 1987-04-03 |
| JPH0468246B2 JPH0468246B2 (enrdf_load_stackoverflow) | 1992-10-30 |
Family
ID=16618948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21222185A Granted JPS6272517A (ja) | 1985-09-27 | 1985-09-27 | シリカの微細粉末の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6272517A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005169191A (ja) * | 2003-12-09 | 2005-06-30 | Asahi Kasei Chemicals Corp | シリコンウエハーエッチング用苛性アルカリ水溶液の回収再生方法およびそれによって回収された苛性アルカリ水溶液 |
| JP2013209243A (ja) * | 2012-03-30 | 2013-10-10 | Taiheiyo Cement Corp | 高純度シリカの製造方法 |
| JP2014224004A (ja) * | 2013-05-15 | 2014-12-04 | 株式会社トクヤマ | 金属酸化物ゾルの製造方法 |
-
1985
- 1985-09-27 JP JP21222185A patent/JPS6272517A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005169191A (ja) * | 2003-12-09 | 2005-06-30 | Asahi Kasei Chemicals Corp | シリコンウエハーエッチング用苛性アルカリ水溶液の回収再生方法およびそれによって回収された苛性アルカリ水溶液 |
| JP2013209243A (ja) * | 2012-03-30 | 2013-10-10 | Taiheiyo Cement Corp | 高純度シリカの製造方法 |
| JP2014224004A (ja) * | 2013-05-15 | 2014-12-04 | 株式会社トクヤマ | 金属酸化物ゾルの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0468246B2 (enrdf_load_stackoverflow) | 1992-10-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4678652A (en) | Process for producing silica in fine powder form | |
| US7140201B2 (en) | Method for producing silica particles | |
| JPH0335245B2 (enrdf_load_stackoverflow) | ||
| KR100364375B1 (ko) | 지르코니아 수성 졸 및 그 제조방법 | |
| TW200930663A (en) | Method of recycling fluoride from a waste solution including hydrofluoric acid to produce fluosilicate | |
| JPS6272517A (ja) | シリカの微細粉末の製造方法 | |
| JPS61158810A (ja) | 高純度シリカゾルの製造法 | |
| JPH0891821A (ja) | 球状中空多孔質シリカ粒子の製造方法 | |
| JP2018526318A (ja) | 粒子状ヒドロキシアパタイト組成物及びその作製方法 | |
| JP3662966B2 (ja) | 非晶質珪酸ナトリウム・金属硫酸塩複合粉末及びその製造方法 | |
| GB2222823A (en) | A process for producing high purity silica | |
| JPS63144122A (ja) | 塩酸酸洗廃液からけい素を除去する方法 | |
| US3345132A (en) | Process of preparing silicic acid in a two-dimensional structure | |
| JP3427211B2 (ja) | ジルコニウム塩化物水溶液の製造方法 | |
| JPS62270418A (ja) | フルオロ硫酸ジルコニウムからミクロン以下の安定化されたジルコニアを製造する方法 | |
| JPH0457606B2 (enrdf_load_stackoverflow) | ||
| JP3503116B2 (ja) | 高濃度フリーヒドロキシルアミン水溶液の製造法 | |
| JP4000399B2 (ja) | 超高純度シリカ粉の製造方法および該製造方法で得られた超高純度シリカ粉並びにそれを用いた石英ガラスルツボ | |
| JPS60195024A (ja) | 水酸化コバルトの製造方法 | |
| JP3312816B2 (ja) | 非晶質珪酸ナトリウム粉末及びその製造方法 | |
| JPH0516372B2 (enrdf_load_stackoverflow) | ||
| RU2170213C1 (ru) | Способ получения полисиликатов калия | |
| NO171105B (no) | Fremgangsmaate ved fremstilling av finfordelt silisiumdioksyd | |
| JP4070154B2 (ja) | 超高純度シリカ粉及びその製造方法、並びに前記超高純度シリカ粉を用いた単結晶引上げ用シリカガラスルツボ | |
| JP2556713B2 (ja) | 抽出水電導度の低い三酸化アンチモンの製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |