JPS6269405A - 光電素子用透明導電基板 - Google Patents

光電素子用透明導電基板

Info

Publication number
JPS6269405A
JPS6269405A JP60208363A JP20836385A JPS6269405A JP S6269405 A JPS6269405 A JP S6269405A JP 60208363 A JP60208363 A JP 60208363A JP 20836385 A JP20836385 A JP 20836385A JP S6269405 A JPS6269405 A JP S6269405A
Authority
JP
Japan
Prior art keywords
transparent conductive
chlorine
conductive substrate
substrate
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60208363A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572686B2 (enExample
Inventor
昌宏 平田
雅郎 御園生
秀夫 河原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP60208363A priority Critical patent/JPS6269405A/ja
Priority to EP86402059A priority patent/EP0216703B1/fr
Priority to AT86402059T priority patent/ATE71925T1/de
Priority to ES8602025A priority patent/ES2003352A6/es
Priority to DE8686402059T priority patent/DE3683575D1/de
Publication of JPS6269405A publication Critical patent/JPS6269405A/ja
Publication of JPH0572686B2 publication Critical patent/JPH0572686B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/16Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/169Thin semiconductor films on metallic or insulating substrates
    • H10F77/1692Thin semiconductor films on metallic or insulating substrates the films including only Group IV materials
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/245Oxides by deposition from the vapour phase
    • C03C17/2453Coating containing SnO2
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/138Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
JP60208363A 1985-09-20 1985-09-20 光電素子用透明導電基板 Granted JPS6269405A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60208363A JPS6269405A (ja) 1985-09-20 1985-09-20 光電素子用透明導電基板
EP86402059A EP0216703B1 (fr) 1985-09-20 1986-09-19 Substrat conducteur et transparent pour élément photoélectrique
AT86402059T ATE71925T1 (de) 1985-09-20 1986-09-19 Leitfaehiges und durchsichtiges substrat fuer ein photoelektrisches element.
ES8602025A ES2003352A6 (es) 1985-09-20 1986-09-19 Substrato conductor y transparente para elemento fotoelectrico
DE8686402059T DE3683575D1 (de) 1985-09-20 1986-09-19 Leitfaehiges und durchsichtiges substrat fuer ein photoelektrisches element.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60208363A JPS6269405A (ja) 1985-09-20 1985-09-20 光電素子用透明導電基板

Publications (2)

Publication Number Publication Date
JPS6269405A true JPS6269405A (ja) 1987-03-30
JPH0572686B2 JPH0572686B2 (enExample) 1993-10-12

Family

ID=16555049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60208363A Granted JPS6269405A (ja) 1985-09-20 1985-09-20 光電素子用透明導電基板

Country Status (5)

Country Link
EP (1) EP0216703B1 (enExample)
JP (1) JPS6269405A (enExample)
AT (1) ATE71925T1 (enExample)
DE (1) DE3683575D1 (enExample)
ES (1) ES2003352A6 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63275187A (ja) * 1987-05-07 1988-11-11 Nippon Sheet Glass Co Ltd 二層構造を有する透明導電膜体
JPH01236525A (ja) * 1988-03-17 1989-09-21 Nippon Sheet Glass Co Ltd 透明導電膜の製造方法
CN104310790A (zh) * 2014-09-28 2015-01-28 中国建材国际工程集团有限公司 大面积透明导电膜玻璃的制备方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19715048C2 (de) * 1997-04-11 1999-08-19 Bosch Gmbh Robert Verfahren zum Strukturieren einer transparenten, elektrisch leitfähigen Schicht
US6602606B1 (en) * 1999-05-18 2003-08-05 Nippon Sheet Glass Co., Ltd. Glass sheet with conductive film, method of manufacturing the same, and photoelectric conversion device using the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534668A (en) * 1978-09-04 1980-03-11 Toshiba Corp Forming method for transparent conductive composite film

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136477A (ja) * 1982-12-23 1984-08-06 Nippon Sheet Glass Co Ltd 基体に酸化錫膜を形成する方法
JPS59162269A (ja) * 1983-03-07 1984-09-13 Nippon Sheet Glass Co Ltd 基体に酸化錫膜を形成する方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534668A (en) * 1978-09-04 1980-03-11 Toshiba Corp Forming method for transparent conductive composite film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63275187A (ja) * 1987-05-07 1988-11-11 Nippon Sheet Glass Co Ltd 二層構造を有する透明導電膜体
JPH01236525A (ja) * 1988-03-17 1989-09-21 Nippon Sheet Glass Co Ltd 透明導電膜の製造方法
CN104310790A (zh) * 2014-09-28 2015-01-28 中国建材国际工程集团有限公司 大面积透明导电膜玻璃的制备方法

Also Published As

Publication number Publication date
DE3683575D1 (de) 1992-03-05
ATE71925T1 (de) 1992-02-15
EP0216703B1 (fr) 1992-01-22
EP0216703A3 (en) 1989-04-26
EP0216703A2 (fr) 1987-04-01
JPH0572686B2 (enExample) 1993-10-12
ES2003352A6 (es) 1991-03-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term