JPS6269044A - 空気清浄室 - Google Patents

空気清浄室

Info

Publication number
JPS6269044A
JPS6269044A JP20834485A JP20834485A JPS6269044A JP S6269044 A JPS6269044 A JP S6269044A JP 20834485 A JP20834485 A JP 20834485A JP 20834485 A JP20834485 A JP 20834485A JP S6269044 A JPS6269044 A JP S6269044A
Authority
JP
Japan
Prior art keywords
floor
air
room
dust
lattice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20834485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510569B2 (enExample
Inventor
Yasuo Nishiguchi
泰夫 西口
Toshihiko Yamazaki
俊彦 山崎
Masayuki Maeda
真之 前田
Minoru Muto
武藤　実
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Hitachi Ltd
Original Assignee
Kyocera Corp
Hitachi Plant Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp, Hitachi Plant Engineering and Construction Co Ltd filed Critical Kyocera Corp
Priority to JP20834485A priority Critical patent/JPS6269044A/ja
Publication of JPS6269044A publication Critical patent/JPS6269044A/ja
Publication of JPH0510569B2 publication Critical patent/JPH0510569B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP20834485A 1985-09-20 1985-09-20 空気清浄室 Granted JPS6269044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20834485A JPS6269044A (ja) 1985-09-20 1985-09-20 空気清浄室

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20834485A JPS6269044A (ja) 1985-09-20 1985-09-20 空気清浄室

Publications (2)

Publication Number Publication Date
JPS6269044A true JPS6269044A (ja) 1987-03-30
JPH0510569B2 JPH0510569B2 (enExample) 1993-02-10

Family

ID=16554718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20834485A Granted JPS6269044A (ja) 1985-09-20 1985-09-20 空気清浄室

Country Status (1)

Country Link
JP (1) JPS6269044A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8137161B2 (en) 2007-03-23 2012-03-20 Showa Denko K.K. Disk-shaped substrate manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8137161B2 (en) 2007-03-23 2012-03-20 Showa Denko K.K. Disk-shaped substrate manufacturing method

Also Published As

Publication number Publication date
JPH0510569B2 (enExample) 1993-02-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees