JPS626690Y2 - - Google Patents

Info

Publication number
JPS626690Y2
JPS626690Y2 JP1982095772U JP9577282U JPS626690Y2 JP S626690 Y2 JPS626690 Y2 JP S626690Y2 JP 1982095772 U JP1982095772 U JP 1982095772U JP 9577282 U JP9577282 U JP 9577282U JP S626690 Y2 JPS626690 Y2 JP S626690Y2
Authority
JP
Japan
Prior art keywords
wafer
rotation
chuck
centering
orientation flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982095772U
Other languages
English (en)
Japanese (ja)
Other versions
JPS592135U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9577282U priority Critical patent/JPS592135U/ja
Publication of JPS592135U publication Critical patent/JPS592135U/ja
Application granted granted Critical
Publication of JPS626690Y2 publication Critical patent/JPS626690Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
JP9577282U 1982-06-28 1982-06-28 ウエハ回転装置 Granted JPS592135U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9577282U JPS592135U (ja) 1982-06-28 1982-06-28 ウエハ回転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9577282U JPS592135U (ja) 1982-06-28 1982-06-28 ウエハ回転装置

Publications (2)

Publication Number Publication Date
JPS592135U JPS592135U (ja) 1984-01-09
JPS626690Y2 true JPS626690Y2 (enrdf_load_html_response) 1987-02-16

Family

ID=30228550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9577282U Granted JPS592135U (ja) 1982-06-28 1982-06-28 ウエハ回転装置

Country Status (1)

Country Link
JP (1) JPS592135U (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666375B2 (ja) * 1987-03-30 1994-08-24 株式会社日立製作所 ウエハ搬送方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS443578Y1 (enrdf_load_html_response) * 1966-06-18 1969-02-08
JPS5521341Y2 (enrdf_load_html_response) * 1974-12-28 1980-05-22
JPS52135064U (enrdf_load_html_response) * 1976-04-08 1977-10-14
JPS5441079A (en) * 1977-09-08 1979-03-31 Kobatoron Kk Device for inspecting semiconductor
JPS5456356A (en) * 1977-10-14 1979-05-07 Hitachi Ltd Dicing device

Also Published As

Publication number Publication date
JPS592135U (ja) 1984-01-09

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