JPS592135U - ウエハ回転装置 - Google Patents

ウエハ回転装置

Info

Publication number
JPS592135U
JPS592135U JP9577282U JP9577282U JPS592135U JP S592135 U JPS592135 U JP S592135U JP 9577282 U JP9577282 U JP 9577282U JP 9577282 U JP9577282 U JP 9577282U JP S592135 U JPS592135 U JP S592135U
Authority
JP
Japan
Prior art keywords
wafer
rotation
axis
rotation device
arc length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9577282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS626690Y2 (enrdf_load_html_response
Inventor
圭一 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP9577282U priority Critical patent/JPS592135U/ja
Publication of JPS592135U publication Critical patent/JPS592135U/ja
Application granted granted Critical
Publication of JPS626690Y2 publication Critical patent/JPS626690Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
JP9577282U 1982-06-28 1982-06-28 ウエハ回転装置 Granted JPS592135U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9577282U JPS592135U (ja) 1982-06-28 1982-06-28 ウエハ回転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9577282U JPS592135U (ja) 1982-06-28 1982-06-28 ウエハ回転装置

Publications (2)

Publication Number Publication Date
JPS592135U true JPS592135U (ja) 1984-01-09
JPS626690Y2 JPS626690Y2 (enrdf_load_html_response) 1987-02-16

Family

ID=30228550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9577282U Granted JPS592135U (ja) 1982-06-28 1982-06-28 ウエハ回転装置

Country Status (1)

Country Link
JP (1) JPS592135U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241948A (ja) * 1987-03-30 1988-10-07 Hitachi Ltd ウエハ搬送方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS443578Y1 (enrdf_load_html_response) * 1966-06-18 1969-02-08
JPS5186969U (enrdf_load_html_response) * 1974-12-28 1976-07-12
JPS52135064U (enrdf_load_html_response) * 1976-04-08 1977-10-14
JPS5441079A (en) * 1977-09-08 1979-03-31 Kobatoron Kk Device for inspecting semiconductor
JPS5456356A (en) * 1977-10-14 1979-05-07 Hitachi Ltd Dicing device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS443578Y1 (enrdf_load_html_response) * 1966-06-18 1969-02-08
JPS5186969U (enrdf_load_html_response) * 1974-12-28 1976-07-12
JPS52135064U (enrdf_load_html_response) * 1976-04-08 1977-10-14
JPS5441079A (en) * 1977-09-08 1979-03-31 Kobatoron Kk Device for inspecting semiconductor
JPS5456356A (en) * 1977-10-14 1979-05-07 Hitachi Ltd Dicing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241948A (ja) * 1987-03-30 1988-10-07 Hitachi Ltd ウエハ搬送方法

Also Published As

Publication number Publication date
JPS626690Y2 (enrdf_load_html_response) 1987-02-16

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