JPS6257263B2 - - Google Patents

Info

Publication number
JPS6257263B2
JPS6257263B2 JP56204886A JP20488681A JPS6257263B2 JP S6257263 B2 JPS6257263 B2 JP S6257263B2 JP 56204886 A JP56204886 A JP 56204886A JP 20488681 A JP20488681 A JP 20488681A JP S6257263 B2 JPS6257263 B2 JP S6257263B2
Authority
JP
Japan
Prior art keywords
oxide film
nitride film
silicon nitride
silicon oxide
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56204886A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58106873A (ja
Inventor
Masahiro Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP56204886A priority Critical patent/JPS58106873A/ja
Publication of JPS58106873A publication Critical patent/JPS58106873A/ja
Publication of JPS6257263B2 publication Critical patent/JPS6257263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/69—IGFETs having charge trapping gate insulators, e.g. MNOS transistors

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP56204886A 1981-12-18 1981-12-18 半導体装置の製造方法 Granted JPS58106873A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56204886A JPS58106873A (ja) 1981-12-18 1981-12-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56204886A JPS58106873A (ja) 1981-12-18 1981-12-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58106873A JPS58106873A (ja) 1983-06-25
JPS6257263B2 true JPS6257263B2 (enrdf_load_stackoverflow) 1987-11-30

Family

ID=16498019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56204886A Granted JPS58106873A (ja) 1981-12-18 1981-12-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58106873A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4342621B2 (ja) 1998-12-09 2009-10-14 株式会社東芝 不揮発性半導体記憶装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1491205A (en) * 1973-11-07 1977-11-09 Ici Ltd Flameless heaters
JPS5733700B2 (enrdf_load_stackoverflow) * 1974-05-08 1982-07-19

Also Published As

Publication number Publication date
JPS58106873A (ja) 1983-06-25

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