JPS6256443B2 - - Google Patents

Info

Publication number
JPS6256443B2
JPS6256443B2 JP17695581A JP17695581A JPS6256443B2 JP S6256443 B2 JPS6256443 B2 JP S6256443B2 JP 17695581 A JP17695581 A JP 17695581A JP 17695581 A JP17695581 A JP 17695581A JP S6256443 B2 JPS6256443 B2 JP S6256443B2
Authority
JP
Japan
Prior art keywords
light
light beam
processing surface
measuring
receiving section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17695581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5876711A (ja
Inventor
Shinji Okamoto
Satoshi Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP17695581A priority Critical patent/JPS5876711A/ja
Publication of JPS5876711A publication Critical patent/JPS5876711A/ja
Publication of JPS6256443B2 publication Critical patent/JPS6256443B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP17695581A 1981-10-31 1981-10-31 回転体の表面粗さ測定方法およびその装置 Granted JPS5876711A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17695581A JPS5876711A (ja) 1981-10-31 1981-10-31 回転体の表面粗さ測定方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17695581A JPS5876711A (ja) 1981-10-31 1981-10-31 回転体の表面粗さ測定方法およびその装置

Publications (2)

Publication Number Publication Date
JPS5876711A JPS5876711A (ja) 1983-05-09
JPS6256443B2 true JPS6256443B2 (enrdf_load_stackoverflow) 1987-11-26

Family

ID=16022637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17695581A Granted JPS5876711A (ja) 1981-10-31 1981-10-31 回転体の表面粗さ測定方法およびその装置

Country Status (1)

Country Link
JP (1) JPS5876711A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61288108A (ja) * 1985-06-15 1986-12-18 Ishizuka Glass Ltd ガラス壜の胴へこみ検査方法
JPH07122570B2 (ja) * 1987-03-13 1995-12-25 キヤノン株式会社 面形状測定装置
JP5036644B2 (ja) * 2008-07-03 2012-09-26 住友重機械工業株式会社 表面検査方法、及びびびりマーク検査装置

Also Published As

Publication number Publication date
JPS5876711A (ja) 1983-05-09

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