JPS6250972B2 - - Google Patents
Info
- Publication number
- JPS6250972B2 JPS6250972B2 JP54073379A JP7337979A JPS6250972B2 JP S6250972 B2 JPS6250972 B2 JP S6250972B2 JP 54073379 A JP54073379 A JP 54073379A JP 7337979 A JP7337979 A JP 7337979A JP S6250972 B2 JPS6250972 B2 JP S6250972B2
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- ion
- impurities
- metal film
- implantation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7337979A JPS55165640A (en) | 1979-06-11 | 1979-06-11 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7337979A JPS55165640A (en) | 1979-06-11 | 1979-06-11 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55165640A JPS55165640A (en) | 1980-12-24 |
| JPS6250972B2 true JPS6250972B2 (OSRAM) | 1987-10-28 |
Family
ID=13516485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7337979A Granted JPS55165640A (en) | 1979-06-11 | 1979-06-11 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55165640A (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH028485U (OSRAM) * | 1988-06-29 | 1990-01-19 | ||
| JPH0250362U (OSRAM) * | 1988-10-03 | 1990-04-09 | ||
| JPH0250363U (OSRAM) * | 1988-10-03 | 1990-04-09 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH027422A (ja) * | 1988-06-24 | 1990-01-11 | Ricoh Co Ltd | レーザによる高温熱処理方法 |
| JP2005183604A (ja) * | 2003-12-18 | 2005-07-07 | Semiconductor Leading Edge Technologies Inc | 半導体装置の熱処理方法 |
| JP2024053334A (ja) * | 2022-10-03 | 2024-04-15 | 株式会社デンソー | 半導体装置の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4825816A (OSRAM) * | 1971-08-11 | 1973-04-04 |
-
1979
- 1979-06-11 JP JP7337979A patent/JPS55165640A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH028485U (OSRAM) * | 1988-06-29 | 1990-01-19 | ||
| JPH0250362U (OSRAM) * | 1988-10-03 | 1990-04-09 | ||
| JPH0250363U (OSRAM) * | 1988-10-03 | 1990-04-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55165640A (en) | 1980-12-24 |
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