JPS6249735B2 - - Google Patents

Info

Publication number
JPS6249735B2
JPS6249735B2 JP19470481A JP19470481A JPS6249735B2 JP S6249735 B2 JPS6249735 B2 JP S6249735B2 JP 19470481 A JP19470481 A JP 19470481A JP 19470481 A JP19470481 A JP 19470481A JP S6249735 B2 JPS6249735 B2 JP S6249735B2
Authority
JP
Japan
Prior art keywords
insulating film
etching
film
semiconductor device
electrode wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19470481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5895840A (ja
Inventor
Katsuhiro Tsukamoto
Hideo Kotani
Hisao Yakushiji
Hirotsugu Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19470481A priority Critical patent/JPS5895840A/ja
Publication of JPS5895840A publication Critical patent/JPS5895840A/ja
Publication of JPS6249735B2 publication Critical patent/JPS6249735B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP19470481A 1981-11-30 1981-11-30 半導体装置の製造法 Granted JPS5895840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19470481A JPS5895840A (ja) 1981-11-30 1981-11-30 半導体装置の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19470481A JPS5895840A (ja) 1981-11-30 1981-11-30 半導体装置の製造法

Publications (2)

Publication Number Publication Date
JPS5895840A JPS5895840A (ja) 1983-06-07
JPS6249735B2 true JPS6249735B2 (enrdf_load_html_response) 1987-10-21

Family

ID=16328870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19470481A Granted JPS5895840A (ja) 1981-11-30 1981-11-30 半導体装置の製造法

Country Status (1)

Country Link
JP (1) JPS5895840A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05312643A (ja) * 1992-05-13 1993-11-22 Orc Mfg Co Ltd 光量計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05312643A (ja) * 1992-05-13 1993-11-22 Orc Mfg Co Ltd 光量計

Also Published As

Publication number Publication date
JPS5895840A (ja) 1983-06-07

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