JPS6248370B2 - - Google Patents

Info

Publication number
JPS6248370B2
JPS6248370B2 JP4597276A JP4597276A JPS6248370B2 JP S6248370 B2 JPS6248370 B2 JP S6248370B2 JP 4597276 A JP4597276 A JP 4597276A JP 4597276 A JP4597276 A JP 4597276A JP S6248370 B2 JPS6248370 B2 JP S6248370B2
Authority
JP
Japan
Prior art keywords
growth
solution
substrate
liquid phase
atmospheric gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4597276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS52129277A (en
Inventor
Saburo Yamamoto
Morichika Yano
Yukio Kurata
Kaneki Matsui
Akira Komuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP4597276A priority Critical patent/JPS52129277A/ja
Publication of JPS52129277A publication Critical patent/JPS52129277A/ja
Publication of JPS6248370B2 publication Critical patent/JPS6248370B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP4597276A 1976-04-21 1976-04-21 Liquid phase epitaxial growth method Granted JPS52129277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4597276A JPS52129277A (en) 1976-04-21 1976-04-21 Liquid phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4597276A JPS52129277A (en) 1976-04-21 1976-04-21 Liquid phase epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS52129277A JPS52129277A (en) 1977-10-29
JPS6248370B2 true JPS6248370B2 (enExample) 1987-10-13

Family

ID=12734126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4597276A Granted JPS52129277A (en) 1976-04-21 1976-04-21 Liquid phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS52129277A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57191294A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Automatic epitaxial device of liquid phase

Also Published As

Publication number Publication date
JPS52129277A (en) 1977-10-29

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