JPS6246967B2 - - Google Patents

Info

Publication number
JPS6246967B2
JPS6246967B2 JP11225879A JP11225879A JPS6246967B2 JP S6246967 B2 JPS6246967 B2 JP S6246967B2 JP 11225879 A JP11225879 A JP 11225879A JP 11225879 A JP11225879 A JP 11225879A JP S6246967 B2 JPS6246967 B2 JP S6246967B2
Authority
JP
Japan
Prior art keywords
pattern
metal mask
ion implantation
crystal substrate
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11225879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5636120A (en
Inventor
Yoshio Sato
Tsutomu Myashita
Koei Kamishiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11225879A priority Critical patent/JPS5636120A/ja
Publication of JPS5636120A publication Critical patent/JPS5636120A/ja
Publication of JPS6246967B2 publication Critical patent/JPS6246967B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP11225879A 1979-09-01 1979-09-01 Manufacture of magnetic bubble device Granted JPS5636120A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11225879A JPS5636120A (en) 1979-09-01 1979-09-01 Manufacture of magnetic bubble device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11225879A JPS5636120A (en) 1979-09-01 1979-09-01 Manufacture of magnetic bubble device

Publications (2)

Publication Number Publication Date
JPS5636120A JPS5636120A (en) 1981-04-09
JPS6246967B2 true JPS6246967B2 (OSRAM) 1987-10-06

Family

ID=14582195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11225879A Granted JPS5636120A (en) 1979-09-01 1979-09-01 Manufacture of magnetic bubble device

Country Status (1)

Country Link
JP (1) JPS5636120A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716956U (OSRAM) * 1980-06-30 1982-01-28

Also Published As

Publication number Publication date
JPS5636120A (en) 1981-04-09

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