JPS6246189Y2 - - Google Patents
Info
- Publication number
- JPS6246189Y2 JPS6246189Y2 JP1982063163U JP6316382U JPS6246189Y2 JP S6246189 Y2 JPS6246189 Y2 JP S6246189Y2 JP 1982063163 U JP1982063163 U JP 1982063163U JP 6316382 U JP6316382 U JP 6316382U JP S6246189 Y2 JPS6246189 Y2 JP S6246189Y2
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- pattern
- exposure mask
- transparent substrate
- transmission pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005540 biological transmission Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982063163U JPS58166644U (ja) | 1982-04-30 | 1982-04-30 | 長尺物用露光マスク版 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982063163U JPS58166644U (ja) | 1982-04-30 | 1982-04-30 | 長尺物用露光マスク版 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58166644U JPS58166644U (ja) | 1983-11-07 |
| JPS6246189Y2 true JPS6246189Y2 (OSRAM) | 1987-12-11 |
Family
ID=30073273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982063163U Granted JPS58166644U (ja) | 1982-04-30 | 1982-04-30 | 長尺物用露光マスク版 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58166644U (OSRAM) |
-
1982
- 1982-04-30 JP JP1982063163U patent/JPS58166644U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58166644U (ja) | 1983-11-07 |
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