JPS58166644U - 長尺物用露光マスク版 - Google Patents

長尺物用露光マスク版

Info

Publication number
JPS58166644U
JPS58166644U JP1982063163U JP6316382U JPS58166644U JP S58166644 U JPS58166644 U JP S58166644U JP 1982063163 U JP1982063163 U JP 1982063163U JP 6316382 U JP6316382 U JP 6316382U JP S58166644 U JPS58166644 U JP S58166644U
Authority
JP
Japan
Prior art keywords
exposure mask
mask plate
long objects
pattern
transmission pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982063163U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246189Y2 (OSRAM
Inventor
羽生　利明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Inc filed Critical Toppan Inc
Priority to JP1982063163U priority Critical patent/JPS58166644U/ja
Publication of JPS58166644U publication Critical patent/JPS58166644U/ja
Application granted granted Critical
Publication of JPS6246189Y2 publication Critical patent/JPS6246189Y2/ja
Granted legal-status Critical Current

Links

JP1982063163U 1982-04-30 1982-04-30 長尺物用露光マスク版 Granted JPS58166644U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982063163U JPS58166644U (ja) 1982-04-30 1982-04-30 長尺物用露光マスク版

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982063163U JPS58166644U (ja) 1982-04-30 1982-04-30 長尺物用露光マスク版

Publications (2)

Publication Number Publication Date
JPS58166644U true JPS58166644U (ja) 1983-11-07
JPS6246189Y2 JPS6246189Y2 (OSRAM) 1987-12-11

Family

ID=30073273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982063163U Granted JPS58166644U (ja) 1982-04-30 1982-04-30 長尺物用露光マスク版

Country Status (1)

Country Link
JP (1) JPS58166644U (OSRAM)

Also Published As

Publication number Publication date
JPS6246189Y2 (OSRAM) 1987-12-11

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