JPS6245382U - - Google Patents

Info

Publication number
JPS6245382U
JPS6245382U JP13766785U JP13766785U JPS6245382U JP S6245382 U JPS6245382 U JP S6245382U JP 13766785 U JP13766785 U JP 13766785U JP 13766785 U JP13766785 U JP 13766785U JP S6245382 U JPS6245382 U JP S6245382U
Authority
JP
Japan
Prior art keywords
pipe
cryopump
pump case
expansion head
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13766785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037587Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985137667U priority Critical patent/JPH037587Y2/ja
Publication of JPS6245382U publication Critical patent/JPS6245382U/ja
Application granted granted Critical
Publication of JPH037587Y2 publication Critical patent/JPH037587Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1985137667U 1985-09-09 1985-09-09 Expired JPH037587Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985137667U JPH037587Y2 (enrdf_load_stackoverflow) 1985-09-09 1985-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985137667U JPH037587Y2 (enrdf_load_stackoverflow) 1985-09-09 1985-09-09

Publications (2)

Publication Number Publication Date
JPS6245382U true JPS6245382U (enrdf_load_stackoverflow) 1987-03-19
JPH037587Y2 JPH037587Y2 (enrdf_load_stackoverflow) 1991-02-25

Family

ID=31041935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985137667U Expired JPH037587Y2 (enrdf_load_stackoverflow) 1985-09-09 1985-09-09

Country Status (1)

Country Link
JP (1) JPH037587Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582379U (ja) * 1981-06-30 1983-01-08 日本真空技術株式会社 クライオポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582379U (ja) * 1981-06-30 1983-01-08 日本真空技術株式会社 クライオポンプ

Also Published As

Publication number Publication date
JPH037587Y2 (enrdf_load_stackoverflow) 1991-02-25

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