JPS6247783U - - Google Patents

Info

Publication number
JPS6247783U
JPS6247783U JP13859285U JP13859285U JPS6247783U JP S6247783 U JPS6247783 U JP S6247783U JP 13859285 U JP13859285 U JP 13859285U JP 13859285 U JP13859285 U JP 13859285U JP S6247783 U JPS6247783 U JP S6247783U
Authority
JP
Japan
Prior art keywords
cryopump
pump case
head
ultra
panels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13859285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0113821Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13859285U priority Critical patent/JPH0113821Y2/ja
Publication of JPS6247783U publication Critical patent/JPS6247783U/ja
Application granted granted Critical
Publication of JPH0113821Y2 publication Critical patent/JPH0113821Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP13859285U 1985-09-10 1985-09-10 Expired JPH0113821Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13859285U JPH0113821Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13859285U JPH0113821Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Publications (2)

Publication Number Publication Date
JPS6247783U true JPS6247783U (enrdf_load_stackoverflow) 1987-03-24
JPH0113821Y2 JPH0113821Y2 (enrdf_load_stackoverflow) 1989-04-24

Family

ID=31043720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13859285U Expired JPH0113821Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Country Status (1)

Country Link
JP (1) JPH0113821Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0113821Y2 (enrdf_load_stackoverflow) 1989-04-24

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