JPS6254285U - - Google Patents

Info

Publication number
JPS6254285U
JPS6254285U JP14525985U JP14525985U JPS6254285U JP S6254285 U JPS6254285 U JP S6254285U JP 14525985 U JP14525985 U JP 14525985U JP 14525985 U JP14525985 U JP 14525985U JP S6254285 U JPS6254285 U JP S6254285U
Authority
JP
Japan
Prior art keywords
cryopanel
panel
cryopump
pump case
adsorbent layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14525985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14525985U priority Critical patent/JPS6254285U/ja
Publication of JPS6254285U publication Critical patent/JPS6254285U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP14525985U 1985-09-24 1985-09-24 Pending JPS6254285U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14525985U JPS6254285U (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14525985U JPS6254285U (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Publications (1)

Publication Number Publication Date
JPS6254285U true JPS6254285U (enrdf_load_stackoverflow) 1987-04-03

Family

ID=31056631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14525985U Pending JPS6254285U (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Country Status (1)

Country Link
JP (1) JPS6254285U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825873A (ja) * 1981-08-10 1983-02-16 Mitsubishi Heavy Ind Ltd 溶接電極位置検出方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825873A (ja) * 1981-08-10 1983-02-16 Mitsubishi Heavy Ind Ltd 溶接電極位置検出方法

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