JPH0183187U - - Google Patents

Info

Publication number
JPH0183187U
JPH0183187U JP1987179350U JP17935087U JPH0183187U JP H0183187 U JPH0183187 U JP H0183187U JP 1987179350 U JP1987179350 U JP 1987179350U JP 17935087 U JP17935087 U JP 17935087U JP H0183187 U JPH0183187 U JP H0183187U
Authority
JP
Japan
Prior art keywords
adsorbent
temperature
cryopanel
low
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987179350U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987179350U priority Critical patent/JPH0183187U/ja
Publication of JPH0183187U publication Critical patent/JPH0183187U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1987179350U 1987-11-24 1987-11-24 Pending JPH0183187U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987179350U JPH0183187U (enrdf_load_stackoverflow) 1987-11-24 1987-11-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987179350U JPH0183187U (enrdf_load_stackoverflow) 1987-11-24 1987-11-24

Publications (1)

Publication Number Publication Date
JPH0183187U true JPH0183187U (enrdf_load_stackoverflow) 1989-06-02

Family

ID=31470908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987179350U Pending JPH0183187U (enrdf_load_stackoverflow) 1987-11-24 1987-11-24

Country Status (1)

Country Link
JP (1) JPH0183187U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557973A (en) * 1978-07-04 1980-01-21 Alpha Eng Kk Adsorbing panel

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557973A (en) * 1978-07-04 1980-01-21 Alpha Eng Kk Adsorbing panel

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