JPS557973A - Adsorbing panel - Google Patents

Adsorbing panel

Info

Publication number
JPS557973A
JPS557973A JP8128378A JP8128378A JPS557973A JP S557973 A JPS557973 A JP S557973A JP 8128378 A JP8128378 A JP 8128378A JP 8128378 A JP8128378 A JP 8128378A JP S557973 A JPS557973 A JP S557973A
Authority
JP
Japan
Prior art keywords
panel
carbon fiber
cooling
cryopump
adsorbent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8128378A
Other languages
Japanese (ja)
Inventor
Junichiro Moriya
Hitoshi Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALPHA ENG KK
Original Assignee
ALPHA ENG KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALPHA ENG KK filed Critical ALPHA ENG KK
Priority to JP8128378A priority Critical patent/JPS557973A/en
Publication of JPS557973A publication Critical patent/JPS557973A/en
Pending legal-status Critical Current

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE: To widely improve adsorptive efficiency of gas molecules by fitting activated carbon fiber as adsorbent on the surface of a cooling panel connected to a cooling means in the cooling panel used for a cryopump, etc.
CONSTITUTION: Activated carbon fiber is used as adsorbent 4 in the structure arranged the absorbent 4 on the surface of a cooling panel 2 connected to a cooling means 1 for adsorbing gas molecules remaining in exhaust space in a cryopump. This carbon fiber is used, for example, multistuffing in permeable bag 5, in other words, bundles and felt-shaped formation, or textile type, which are fitted on the surface of a panel 2 through a plate or wire net 6 with use of screws 7. This facilitates to secure large thermal contact area with the panel surface, to tatally effectively cool off because of good thermal conductivity in carbon fiber, and to considerably improve adsorbing efficiency.
COPYRIGHT: (C)1980,JPO&Japio
JP8128378A 1978-07-04 1978-07-04 Adsorbing panel Pending JPS557973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8128378A JPS557973A (en) 1978-07-04 1978-07-04 Adsorbing panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8128378A JPS557973A (en) 1978-07-04 1978-07-04 Adsorbing panel

Publications (1)

Publication Number Publication Date
JPS557973A true JPS557973A (en) 1980-01-21

Family

ID=13742038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8128378A Pending JPS557973A (en) 1978-07-04 1978-07-04 Adsorbing panel

Country Status (1)

Country Link
JP (1) JPS557973A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0512674U (en) * 1991-07-26 1993-02-19 岩谷産業株式会社 Soap pump with refrigerator
CN105003417A (en) * 2015-08-10 2015-10-28 安徽万瑞冷电科技有限公司 Novel cold umbrella for cryopump and preparation method for cold umbrella

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924487A (en) * 1972-06-30 1974-03-04
JPS518174A (en) * 1974-07-10 1976-01-22 Toyo Boseki JUGAIGA SUGANJUKITAINO SHORISOCHI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924487A (en) * 1972-06-30 1974-03-04
JPS518174A (en) * 1974-07-10 1976-01-22 Toyo Boseki JUGAIGA SUGANJUKITAINO SHORISOCHI

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0512674U (en) * 1991-07-26 1993-02-19 岩谷産業株式会社 Soap pump with refrigerator
CN105003417A (en) * 2015-08-10 2015-10-28 安徽万瑞冷电科技有限公司 Novel cold umbrella for cryopump and preparation method for cold umbrella

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