CN105003417A - Novel cold umbrella for cryopump and preparation method for cold umbrella - Google Patents
Novel cold umbrella for cryopump and preparation method for cold umbrella Download PDFInfo
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- CN105003417A CN105003417A CN201510486296.7A CN201510486296A CN105003417A CN 105003417 A CN105003417 A CN 105003417A CN 201510486296 A CN201510486296 A CN 201510486296A CN 105003417 A CN105003417 A CN 105003417A
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- cold umbrella
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- copper ball
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Abstract
The invention discloses a novel cold umbrella for a cryopump and a preparation method for the cold umbrella. The cold umbrella comprises a cold umbrella body on which cold umbrella cold plates are arranged; copper balls are uniformly distributed on each cold umbrella cold plate; activated carbon is stuck to the surfaces of the copper balls. The preparation method comprises the following steps: firstly, sticking activated carbon onto the copper balls through a cryogenic adhesive; secondly, forming threaded holes in the cold umbrella cold plates for the cryopump and the copper balls; finally, fixing the copper balls fully covered with activated carbon to the cold umbrella cold plates for the cryopump through studs. According to the method, activated carbon is stuck to the copper balls to enable activated carbon to be adhered to all surfaces of each copper ball, so that a problem that contact surfaces cannot adsorb gas as activated carbon is directly stuck to the cold plates is solved, and the gas adsorption area of activated carbon are enlarged; meanwhile, due to the excellent thermal conductivity of the cooper balls, gas adsorbed on the surface of activated carbon can be quickly released in the regeneration process, and the disassembly is convenient.
Description
Technical field
The present invention relates to cryogenic vacuum pumps field, be specially cold umbrella of a kind of new type low temperature pump and preparation method thereof.
Background technique
Cryogenic vacuum pumps is generally referred to as cryopump or cold pump (cryopump), and small-sized refrigerator is a kind of gas trapping formula vacuum pump apparatus that low-temperature receiver utilizes low temperature face condensation adsorption gas, is a kind of application technology being combined by vacuum and cryogenic technique and formed.As producing the basic means of high vacuum high-cleanness at field of industrial production in many experimental studies, in the production of IC, LCD, HD, mainly as the standard configuration of thin film deposition processes vacuum system, there is extensive and important application.Refrigerator in cryopump produces refrigeration on two temperature levels, cools two low-temperature surfaces respectively, is just cooled on low-temperature surface by the gas taken out.The one-level of refrigerator is usually operated at 50K-70K scope, it is used for cooling outer cold screen, this cold screen both served as radiation-resistant shielding for colder cold drawing, was used for again cooling the venetian blind (baffle) of gear at pump intake place simultaneously, was just chilled in above it when water vapor is encountered on baffle.The secondary of refrigerator, the gases such as namely the coldest one-level, is usually operated between 10K-20K, is used for cooling inner cold drawing, its freezing N2, O2, Ar through venetian blind.The active carbon adsorption of cold drawing inside can not be positioned at by the gas that this temperature is freezing.In cryopump, one-level cold drawing is generally made up of radiation screen and one baffle, and the one-level cold head with refrigerator is connected; Cold umbrella connects with refrigerator secondary cold head, is usually operated between 10K ~ 20K, and the outer surface of cold umbrella is that condensation is bled, for extracting N
2, O
2, the condensable gas such as Ar, and to He, Ne, H
2precooling is carried out Deng non-condensable gas; The inner side of bonding active carbon mainly extracts He, Ne, H in the mode of cryogenic absorption
2.
Due to active carbon, to be directly bonded in area of contact on cold umbrella comparatively large, causes bonding surface of contact can not adsorbed gas, therefore proposes cold umbrella of a kind of new type low temperature pump and preparation method thereof.
Summary of the invention
The object of the invention is to provide cold umbrella of a kind of new type low temperature pump and preparation method thereof, is directly bonded in the problem that the cold umbrella of cryopump causes gas absorption to reduce because area of contact is comparatively large, increases adsorption area to solve existing active carbon.
In order to achieve the above object, the technical solution adopted in the present invention is:
The cold umbrella of a kind of new type low temperature pump, it is characterized in that: include cold umbrella body, cold umbrella body is provided with cold umbrella cold drawing; Described cold umbrella cold drawing is evenly distributed with copper ball, and the surface of copper ball is bonded with active carbon.
The described cold umbrella of a kind of new type low temperature pump, is characterized in that: described cold umbrella cold drawing and copper ball are respectively equipped with tapped hole, and each copper ball is fixed on cold umbrella cold drawing respectively by a stud.
The described cold umbrella of a kind of new type low temperature pump, it is characterized in that: the diameter range of described copper ball is 5-20mm, the distance between adjacent copper ball is 1mm.
A preparation method for the cold umbrella of new type low temperature pump, it is characterized in that, the method comprises the following steps:
1), low temperature glue is used to be bonded on copper ball by active carbon;
2), on the cold umbrella cold drawing and copper ball of cryopump, tapped hole is made respectively;
3), stud is used to be fixed on the cold umbrella cold drawing of cryopump by the copper ball being covered with active carbon.
Active carbon has larger surface area, can obtain larger adsorption area, can improve the pumping capacity of cryopump, and in regenerative process, at room temperature gas can desorption easily.
Copper ball good heat conductivity, in regenerating active carbon process, air release speed is fast, and when using low temperature glue to be bonded on copper ball by active carbon, can make each face attachment activity charcoal of copper ball.
Advantage of the present invention is:
Active carbon is bonded on copper ball by using low temperature glue by the present invention, each face attachment activity charcoal of such copper ball, avoiding directly to be bonded in by active carbon cold umbrella cover causes surface of contact can not adsorbed gas, thus the area of active carbon adsorption gas can be increased, simultaneously in regenerative process at room temperature because copper ball has good heat-conducting property, the gas being adsorbed on activated carbon surface can be discharged soon, and use stud to be separately fixed on copper ball and cold umbrella, be convenient to dismounting.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is cold umbrella cold drawing structural representation of the present invention.
Fig. 3 is cold umbrella fixed copper spherical structure partial enlarged drawing of the present invention.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described.
Cold umbrella is fixed on the secondary cold head of Cryo Refrigerator by screw, and cold umbrella connects with refrigerator secondary cold head in cryopump, is lowered the temperature, be usually operated between 10K ~ 20K by the cold head of Cryo Refrigerator, and the outer surface of cold umbrella is that condensation is bled, for extracting N
2, O
2, the condensable gas such as Ar, and to He, Ne, H
2precooling is carried out Deng non-condensable gas; The inner side of bonding active carbon mainly extracts He, Ne, H in the mode of cryogenic absorption
2.
As Figure 1-3.The cold umbrella of a kind of new type low temperature pump, include cold umbrella body 1, cold umbrella body 1 is provided with cold umbrella cold drawing 2; Cold umbrella cold drawing 2 is evenly distributed with copper ball 3, and the surface of copper ball 3 is bonded with active carbon.
Cold umbrella cold drawing 2 and copper ball 3 are respectively equipped with tapped hole, and each copper ball 3 is fixed on cold umbrella cold drawing 2 respectively by a stud 4.
The diameter range of copper ball 3 is 5-20mm, and the distance between adjacent copper ball 3 is 1mm.
A preparation method for the cold umbrella of new type low temperature pump, the method comprises the following steps:
1), low temperature glue is used to be bonded on copper ball by active carbon;
2), on the cold umbrella cold drawing and copper ball of cryopump, tapped hole is made respectively;
3), stud is used to be fixed on the cold umbrella cold drawing of cryopump by the copper ball being covered with active carbon.
Claims (4)
1. the cold umbrella of new type low temperature pump, is characterized in that: include cold umbrella body, and cold umbrella body is provided with cold umbrella cold drawing; Described cold umbrella cold drawing is evenly distributed with copper ball, and the surface of copper ball is bonded with active carbon.
2. the cold umbrella of a kind of new type low temperature pump according to claim 1, is characterized in that: described cold umbrella cold drawing and copper ball are respectively equipped with tapped hole, and each copper ball is fixed on cold umbrella cold drawing respectively by a stud.
3. the cold umbrella of a kind of new type low temperature pump according to claim 1, it is characterized in that: the diameter range of described copper ball is 5-20mm, the distance between adjacent copper ball is 1mm.
4. a preparation method for the cold umbrella of new type low temperature pump, it is characterized in that, the method comprises the following steps:
1), low temperature glue is used to be bonded on copper ball by active carbon;
2), on the cold umbrella cold drawing and copper ball of cryopump, tapped hole is made respectively;
3), stud is used to be fixed on the cold umbrella cold drawing of cryopump by the copper ball being covered with active carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510486296.7A CN105003417A (en) | 2015-08-10 | 2015-08-10 | Novel cold umbrella for cryopump and preparation method for cold umbrella |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510486296.7A CN105003417A (en) | 2015-08-10 | 2015-08-10 | Novel cold umbrella for cryopump and preparation method for cold umbrella |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105003417A true CN105003417A (en) | 2015-10-28 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510486296.7A Pending CN105003417A (en) | 2015-08-10 | 2015-08-10 | Novel cold umbrella for cryopump and preparation method for cold umbrella |
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| CN (1) | CN105003417A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS557973A (en) * | 1978-07-04 | 1980-01-21 | Alpha Eng Kk | Adsorbing panel |
| JPS60249678A (en) * | 1984-05-25 | 1985-12-10 | Toshiba Corp | Cryopump |
| JPS648370A (en) * | 1987-06-29 | 1989-01-12 | Sanyo Electric Co | Cryopump |
| JP2000240569A (en) * | 1999-02-19 | 2000-09-05 | Kansai Coke & Chem Co Ltd | Cryopump cold panel to stick adsorbent on, and method to stick adsorbent on cold panel |
| CN1822898A (en) * | 2003-05-16 | 2006-08-23 | 万罗赛斯公司 | Microchannel with internal fin support for catalyst or sorption medium |
| CN201152655Y (en) * | 2007-12-05 | 2008-11-19 | 安徽万瑞冷电科技有限公司 | Absorbing array structure for refrigeration typed low-temperature pump |
| CN203175786U (en) * | 2012-12-17 | 2013-09-04 | 浙江博开机电科技有限公司 | Groove type absorption array structure used in refrigerating machine type low temperature pump |
| CN204900195U (en) * | 2015-08-10 | 2015-12-23 | 安徽万瑞冷电科技有限公司 | Novel cold umbrella of cryogenic pump |
-
2015
- 2015-08-10 CN CN201510486296.7A patent/CN105003417A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS557973A (en) * | 1978-07-04 | 1980-01-21 | Alpha Eng Kk | Adsorbing panel |
| JPS60249678A (en) * | 1984-05-25 | 1985-12-10 | Toshiba Corp | Cryopump |
| JPS648370A (en) * | 1987-06-29 | 1989-01-12 | Sanyo Electric Co | Cryopump |
| JP2000240569A (en) * | 1999-02-19 | 2000-09-05 | Kansai Coke & Chem Co Ltd | Cryopump cold panel to stick adsorbent on, and method to stick adsorbent on cold panel |
| CN1822898A (en) * | 2003-05-16 | 2006-08-23 | 万罗赛斯公司 | Microchannel with internal fin support for catalyst or sorption medium |
| CN201152655Y (en) * | 2007-12-05 | 2008-11-19 | 安徽万瑞冷电科技有限公司 | Absorbing array structure for refrigeration typed low-temperature pump |
| CN203175786U (en) * | 2012-12-17 | 2013-09-04 | 浙江博开机电科技有限公司 | Groove type absorption array structure used in refrigerating machine type low temperature pump |
| CN204900195U (en) * | 2015-08-10 | 2015-12-23 | 安徽万瑞冷电科技有限公司 | Novel cold umbrella of cryogenic pump |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20151028 |
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| RJ01 | Rejection of invention patent application after publication |