JPS6314878U - - Google Patents

Info

Publication number
JPS6314878U
JPS6314878U JP10857586U JP10857586U JPS6314878U JP S6314878 U JPS6314878 U JP S6314878U JP 10857586 U JP10857586 U JP 10857586U JP 10857586 U JP10857586 U JP 10857586U JP S6314878 U JPS6314878 U JP S6314878U
Authority
JP
Japan
Prior art keywords
cryopanel
adsorbent
temperature
low
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10857586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355829Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986108575U priority Critical patent/JPH0355829Y2/ja
Publication of JPS6314878U publication Critical patent/JPS6314878U/ja
Application granted granted Critical
Publication of JPH0355829Y2 publication Critical patent/JPH0355829Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1986108575U 1986-07-15 1986-07-15 Expired JPH0355829Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986108575U JPH0355829Y2 (enrdf_load_stackoverflow) 1986-07-15 1986-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986108575U JPH0355829Y2 (enrdf_load_stackoverflow) 1986-07-15 1986-07-15

Publications (2)

Publication Number Publication Date
JPS6314878U true JPS6314878U (enrdf_load_stackoverflow) 1988-01-30
JPH0355829Y2 JPH0355829Y2 (enrdf_load_stackoverflow) 1991-12-12

Family

ID=30985895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986108575U Expired JPH0355829Y2 (enrdf_load_stackoverflow) 1986-07-15 1986-07-15

Country Status (1)

Country Link
JP (1) JPH0355829Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101527071B1 (ko) * 2013-03-19 2015-06-09 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프, 및 비응축성 기체의 진공배기방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4521047B2 (ja) * 2008-05-16 2010-08-11 住友重機械工業株式会社 クライオポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910040A (ja) * 1982-07-09 1984-01-19 Hitachi Ltd スペ−ス・ダイバ−シテイ受信機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910040A (ja) * 1982-07-09 1984-01-19 Hitachi Ltd スペ−ス・ダイバ−シテイ受信機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101527071B1 (ko) * 2013-03-19 2015-06-09 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프, 및 비응축성 기체의 진공배기방법

Also Published As

Publication number Publication date
JPH0355829Y2 (enrdf_load_stackoverflow) 1991-12-12

Similar Documents

Publication Publication Date Title
JPS6314878U (enrdf_load_stackoverflow)
JPH0183187U (enrdf_load_stackoverflow)
JPS6219304U (enrdf_load_stackoverflow)
JPS61166193U (enrdf_load_stackoverflow)
JPS61108843U (enrdf_load_stackoverflow)
JPS6226575U (enrdf_load_stackoverflow)
JPS634380U (enrdf_load_stackoverflow)
JPH0250182U (enrdf_load_stackoverflow)
JPH0460877U (enrdf_load_stackoverflow)
JPH01136378U (enrdf_load_stackoverflow)
JPS61159766U (enrdf_load_stackoverflow)
JPS60101659U (ja) 吸着式冷凍機
JPS6269769U (enrdf_load_stackoverflow)
JPS61156876U (enrdf_load_stackoverflow)
JPS62152193U (enrdf_load_stackoverflow)
JPS6236683U (enrdf_load_stackoverflow)
JPS59193516U (ja) 低温精製器
JPS6095299U (ja) 液化ガス低温貯槽
JPS6216977U (enrdf_load_stackoverflow)
JPS6254285U (enrdf_load_stackoverflow)
JPH0166577U (enrdf_load_stackoverflow)
JPS6345050U (enrdf_load_stackoverflow)
JPS6226577U (enrdf_load_stackoverflow)
JPH0442273U (enrdf_load_stackoverflow)
JPS61156880U (enrdf_load_stackoverflow)