JPS6314878U - - Google Patents

Info

Publication number
JPS6314878U
JPS6314878U JP10857586U JP10857586U JPS6314878U JP S6314878 U JPS6314878 U JP S6314878U JP 10857586 U JP10857586 U JP 10857586U JP 10857586 U JP10857586 U JP 10857586U JP S6314878 U JPS6314878 U JP S6314878U
Authority
JP
Japan
Prior art keywords
cryopanel
adsorbent
temperature
low
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10857586U
Other languages
Japanese (ja)
Other versions
JPH0355829Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986108575U priority Critical patent/JPH0355829Y2/ja
Publication of JPS6314878U publication Critical patent/JPS6314878U/ja
Application granted granted Critical
Publication of JPH0355829Y2 publication Critical patent/JPH0355829Y2/ja
Expired legal-status Critical Current

Links

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ないし第３図は本考案の実施例を示し、
第１図はクライオパネルを裏面から見た部分斜視
図、第２図は第１図の―線断面図、第３図は
クライオポンプの全体構成を示す断面図である。
第４図は従来例における第１図相当図、第５図は
第４図の―線断面図である。 Ａ……クライオポンプ、２……ヘリウム冷凍機
、７，８……ヒートステーシヨン、９，１０……
クライオパネル、１１……吸着媒、１２……接着
剤。 1 to 3 show embodiments of the present invention,
FIG. 1 is a partial perspective view of the cryopanel seen from the back side, FIG. 2 is a sectional view taken along the line -- in FIG. 1, and FIG. 3 is a sectional view showing the overall structure of the cryopump.
FIG. 4 is a view corresponding to FIG. 1 in the conventional example, and FIG. 5 is a sectional view taken along the line -- in FIG. A... Cryopump, 2... Helium refrigerator, 7, 8... Heat station, 9, 10...
Cryopanel, 11... Adsorption medium, 12... Adhesive.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 冷凍機２のヒートステーシヨン８に熱接触して
約２０Ｋ以下の温度に冷却されるクライオパネル
１０に低温吸着媒１１が接着され、この低温吸着
媒１１によりガスを吸着させて排気するようにし
たクライオポンプにおいて、上記吸着媒１１は板
状に成形されてクライオパネル１０に接着されて
いることを特徴とするクライオポンプ。 A cryopanel 10 is cooled to a temperature of about 20 K or less by thermal contact with a heat station 8 of a refrigerator 2, and a low-temperature adsorbent 11 is bonded to the cryopanel 10, and the low-temperature adsorbent 11 adsorbs gas and exhausts the gas. A cryopump characterized in that the adsorbent 11 is formed into a plate shape and adhered to the cryopanel 10.
JP1986108575U 1986-07-15 1986-07-15 Expired JPH0355829Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986108575U JPH0355829Y2 (en) 1986-07-15 1986-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986108575U JPH0355829Y2 (en) 1986-07-15 1986-07-15

Publications (2)

Publication Number Publication Date
JPS6314878U true JPS6314878U (en) 1988-01-30
JPH0355829Y2 JPH0355829Y2 (en) 1991-12-12

Family

ID=30985895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986108575U Expired JPH0355829Y2 (en) 1986-07-15 1986-07-15

Country Status (1)

Country Link
JP (1) JPH0355829Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101527071B1 (en) * 2013-03-19 2015-06-09 스미도모쥬기가이고교 가부시키가이샤 Cryopump and method for evacuation of non-condensing gas

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4521047B2 (en) * 2008-05-16 2010-08-11 住友重機械工業株式会社 Cryopump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910040A (en) * 1982-07-09 1984-01-19 Hitachi Ltd Space diversity receiver

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910040A (en) * 1982-07-09 1984-01-19 Hitachi Ltd Space diversity receiver

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101527071B1 (en) * 2013-03-19 2015-06-09 스미도모쥬기가이고교 가부시키가이샤 Cryopump and method for evacuation of non-condensing gas

Also Published As

Publication number Publication date
JPH0355829Y2 (en) 1991-12-12

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