JPH0243475U - - Google Patents
Info
- Publication number
- JPH0243475U JPH0243475U JP11034889U JP11034889U JPH0243475U JP H0243475 U JPH0243475 U JP H0243475U JP 11034889 U JP11034889 U JP 11034889U JP 11034889 U JP11034889 U JP 11034889U JP H0243475 U JPH0243475 U JP H0243475U
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- cooled
- temperature
- cryopanels
- radiant heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008014 freezing Effects 0.000 claims description 4
- 238000007710 freezing Methods 0.000 claims description 4
- 230000005494 condensation Effects 0.000 claims 2
- 238000009833 condensation Methods 0.000 claims 2
- 239000003463 adsorbent Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は従来のクライオポンプ及びクライオポ
ンプ用ヘリウム冷凍機を示した断面図、第２図及
び第３図はそれぞれ本考案の実施例によるクライ
オポンプ及びクライオポンプ用ヘリウム冷凍機を
示した断面図、第４図は本考案の別の実施例によ
るクライオポンプを示した断面図である。
１，１ａ，１ｂ……一段目の冷凍ステージ、２
，２ａ，２ｂ……二段目の冷凍ステージ、３……
三段目の冷凍ステージ、４，４′，４″，４ａ，
４ｂ……ヘリウム冷凍機、５……第３のクライオ
パネル、６……第１のクライオパネル、６′……
第４のクライオパネル、７……第２のクライオパ
ネル、８……ポンプ容器、９……コンプレツサ、
１０……熱変換器、１１……高圧側バルブ、１２
……低圧側バルブ、１３，１３′，１３″……デ
イスプレーサ、１４，１４′，１４″……蓄冷器
、１５……冷凍機下部空間。
FIG. 1 is a sectional view showing a conventional cryopump and a helium refrigerator for a cryopump, and FIGS. 2 and 3 are sectional views showing a cryopump and a helium refrigerator for a cryopump according to an embodiment of the present invention, respectively. , FIG. 4 is a sectional view showing a cryopump according to another embodiment of the present invention. 1, 1a, 1b...first freezing stage, 2
, 2a, 2b... second freezing stage, 3...
Third freezing stage, 4, 4', 4'', 4a,
4b... Helium refrigerator, 5... Third cryopanel, 6... First cryopanel, 6'...
Fourth cryopanel, 7... Second cryopanel, 8... Pump container, 9... Compressor,
10... Heat converter, 11... High pressure side valve, 12
...Low pressure side valve, 13, 13', 13''...Displacer, 14, 14', 14''...Regenerator, 15...Refrigerating machine lower space.
Claims (1)
縮のための第１のクライオパネルと、実質的に２
０Ｋ°の温度に冷却される、気体吸着剤を備えた
第２のクライオパネルと、実質的１００Ｋ°の温
度に冷却される、前記第１及び第２のクライオパ
ネルへの輻射熱の入射を防ぐための輻射熱シール
ドを兼ねた、気体凝縮のための第３のクライオパ
ネルとを備え、前記第１、第２及び第３のクライ
オパネルの各々が異なる冷凍機冷凍ステージに取
り付け可能とされたことを特徴とするクライオポ
ンプ。 a first cryopanel for gas condensation, cooled to a temperature of substantially 20 K°;
To prevent radiant heat from entering the second cryopanel equipped with a gas adsorbent, which is cooled to a temperature of 0K°, and the first and second cryopanels, which are cooled to a temperature of substantially 100K°. and a third cryopanel for gas condensation which also serves as a radiant heat shield, and each of the first, second and third cryopanels can be attached to a different freezing stage of the refrigerator. cryopump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11034889U JPH0243475U (en) | 1989-09-22 | 1989-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11034889U JPH0243475U (en) | 1989-09-22 | 1989-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0243475U true JPH0243475U (en) | 1990-03-26 |
Family
ID=31347425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11034889U Pending JPH0243475U (en) | 1989-09-22 | 1989-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0243475U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009174470A (en) * | 2008-01-25 | 2009-08-06 | Sumitomo Heavy Ind Ltd | Cryopump and vacuum-exhaust method |
| JP2011117464A (en) * | 2011-03-24 | 2011-06-16 | Sumitomo Heavy Ind Ltd | Cryopump |
-
1989
- 1989-09-22 JP JP11034889U patent/JPH0243475U/ja active Pending
Non-Patent Citations (1)
| Title |
|---|
| JOURNAL OF VACCUM SCIENCE AND TECHNOLOGG=1979 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009174470A (en) * | 2008-01-25 | 2009-08-06 | Sumitomo Heavy Ind Ltd | Cryopump and vacuum-exhaust method |
| JP2011117464A (en) * | 2011-03-24 | 2011-06-16 | Sumitomo Heavy Ind Ltd | Cryopump |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0243475U (en) | ||
| JPH03104189U (en) | ||
| JPH0161471U (en) | ||
| JPS6269083U (en) | ||
| JPH0160158U (en) | ||
| JP2721601B2 (en) | Hydrogen evacuation method and apparatus using cryopump | |
| JPH04121478U (en) | cryopump | |
| JPH03106186U (en) | ||
| JPH04121479U (en) | cryopump | |
| JPH04105980U (en) | cryopump | |
| JPS6422976U (en) | ||
| JPH04109482U (en) | cryopump | |
| JPS63125759U (en) | ||
| JPS6050283A (en) | Cryo-pump | |
| JPH0550085U (en) | Cryopump | |
| JPS6422977U (en) | ||
| JPH0432454U (en) | ||
| JPH0350949B2 (en) | ||
| JPS6314878U (en) | ||
| JPH0244664U (en) | ||
| JPS62171762U (en) | ||
| JPS62135074U (en) | ||
| JPH0380276U (en) | ||
| JPH0188294U (en) | ||
| JPS61153865U (en) |