JPS62204265U - - Google Patents

Info

Publication number
JPS62204265U
JPS62204265U JP9165286U JP9165286U JPS62204265U JP S62204265 U JPS62204265 U JP S62204265U JP 9165286 U JP9165286 U JP 9165286U JP 9165286 U JP9165286 U JP 9165286U JP S62204265 U JPS62204265 U JP S62204265U
Authority
JP
Japan
Prior art keywords
cold panel
cryopump
cold
main body
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9165286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9165286U priority Critical patent/JPS62204265U/ja
Publication of JPS62204265U publication Critical patent/JPS62204265U/ja
Pending legal-status Critical Current

Links

JP9165286U 1986-06-16 1986-06-16 Pending JPS62204265U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9165286U JPS62204265U (enrdf_load_stackoverflow) 1986-06-16 1986-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9165286U JPS62204265U (enrdf_load_stackoverflow) 1986-06-16 1986-06-16

Publications (1)

Publication Number Publication Date
JPS62204265U true JPS62204265U (enrdf_load_stackoverflow) 1987-12-26

Family

ID=33446818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9165286U Pending JPS62204265U (enrdf_load_stackoverflow) 1986-06-16 1986-06-16

Country Status (1)

Country Link
JP (1) JPS62204265U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239841A (en) * 1975-09-25 1977-03-28 Hitachi Ltd Absorption face for sunheat water heater

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239841A (en) * 1975-09-25 1977-03-28 Hitachi Ltd Absorption face for sunheat water heater

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