JPH0113821Y2 - - Google Patents

Info

Publication number
JPH0113821Y2
JPH0113821Y2 JP13859285U JP13859285U JPH0113821Y2 JP H0113821 Y2 JPH0113821 Y2 JP H0113821Y2 JP 13859285 U JP13859285 U JP 13859285U JP 13859285 U JP13859285 U JP 13859285U JP H0113821 Y2 JPH0113821 Y2 JP H0113821Y2
Authority
JP
Japan
Prior art keywords
cryopump
panels
expansion head
pump case
panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13859285U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6247783U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13859285U priority Critical patent/JPH0113821Y2/ja
Publication of JPS6247783U publication Critical patent/JPS6247783U/ja
Application granted granted Critical
Publication of JPH0113821Y2 publication Critical patent/JPH0113821Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP13859285U 1985-09-10 1985-09-10 Expired JPH0113821Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13859285U JPH0113821Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13859285U JPH0113821Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Publications (2)

Publication Number Publication Date
JPS6247783U JPS6247783U (enrdf_load_stackoverflow) 1987-03-24
JPH0113821Y2 true JPH0113821Y2 (enrdf_load_stackoverflow) 1989-04-24

Family

ID=31043720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13859285U Expired JPH0113821Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Country Status (1)

Country Link
JP (1) JPH0113821Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6247783U (enrdf_load_stackoverflow) 1987-03-24

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