JPS6157473B2 - - Google Patents

Info

Publication number
JPS6157473B2
JPS6157473B2 JP21204181A JP21204181A JPS6157473B2 JP S6157473 B2 JPS6157473 B2 JP S6157473B2 JP 21204181 A JP21204181 A JP 21204181A JP 21204181 A JP21204181 A JP 21204181A JP S6157473 B2 JPS6157473 B2 JP S6157473B2
Authority
JP
Japan
Prior art keywords
pump
vacuum chamber
pumps
cryopump
bulk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21204181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58117372A (ja
Inventor
Chikara Hayashi
Muneharu Komya
Kyonori Oowa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP21204181A priority Critical patent/JPS58117372A/ja
Publication of JPS58117372A publication Critical patent/JPS58117372A/ja
Publication of JPS6157473B2 publication Critical patent/JPS6157473B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP21204181A 1981-12-30 1981-12-30 クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ Granted JPS58117372A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21204181A JPS58117372A (ja) 1981-12-30 1981-12-30 クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21204181A JPS58117372A (ja) 1981-12-30 1981-12-30 クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ

Publications (2)

Publication Number Publication Date
JPS58117372A JPS58117372A (ja) 1983-07-12
JPS6157473B2 true JPS6157473B2 (enrdf_load_stackoverflow) 1986-12-06

Family

ID=16615883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21204181A Granted JPS58117372A (ja) 1981-12-30 1981-12-30 クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ

Country Status (1)

Country Link
JP (1) JPS58117372A (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627986A (ja) * 1985-07-03 1987-01-14 Tokuda Seisakusho Ltd 真空排気装置
US6361618B1 (en) 1994-07-20 2002-03-26 Applied Materials, Inc. Methods and apparatus for forming and maintaining high vacuum environments
EP0693626B1 (en) * 1994-07-20 1999-06-09 Applied Materials, Inc. Vacuum chamber for ultra high vacuum processing at high temperatures
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5935395A (en) * 1995-11-08 1999-08-10 Mitel Corporation Substrate processing apparatus with non-evaporable getter pump
US5855118A (en) * 1996-03-26 1999-01-05 Saes Pure Gas, Inc. Combination cryopump/getter pump and method for regenerating same
US6077404A (en) 1998-02-17 2000-06-20 Applied Material, Inc. Reflow chamber and process

Also Published As

Publication number Publication date
JPS58117372A (ja) 1983-07-12

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