JPS58117372A - クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ - Google Patents

クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ

Info

Publication number
JPS58117372A
JPS58117372A JP21204181A JP21204181A JPS58117372A JP S58117372 A JPS58117372 A JP S58117372A JP 21204181 A JP21204181 A JP 21204181A JP 21204181 A JP21204181 A JP 21204181A JP S58117372 A JPS58117372 A JP S58117372A
Authority
JP
Japan
Prior art keywords
pump
cryo
vacuum tank
shield
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21204181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6157473B2 (enrdf_load_stackoverflow
Inventor
Chikara Hayashi
林　主税
Muneharu Komiya
小宮　宗治
Kiyonori Oowa
大輪　清昇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP21204181A priority Critical patent/JPS58117372A/ja
Publication of JPS58117372A publication Critical patent/JPS58117372A/ja
Publication of JPS6157473B2 publication Critical patent/JPS6157473B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP21204181A 1981-12-30 1981-12-30 クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ Granted JPS58117372A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21204181A JPS58117372A (ja) 1981-12-30 1981-12-30 クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21204181A JPS58117372A (ja) 1981-12-30 1981-12-30 クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ

Publications (2)

Publication Number Publication Date
JPS58117372A true JPS58117372A (ja) 1983-07-12
JPS6157473B2 JPS6157473B2 (enrdf_load_stackoverflow) 1986-12-06

Family

ID=16615883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21204181A Granted JPS58117372A (ja) 1981-12-30 1981-12-30 クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ

Country Status (1)

Country Link
JP (1) JPS58117372A (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627986A (ja) * 1985-07-03 1987-01-14 Tokuda Seisakusho Ltd 真空排気装置
EP0693626A1 (en) * 1994-07-20 1996-01-24 Applied Materials, Inc. Vacuum chamber for ultra high vacuum processing at high temperatures
WO1996017171A3 (en) * 1994-12-02 1996-10-24 Saes Pure Gas Inc Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5855118A (en) * 1996-03-26 1999-01-05 Saes Pure Gas, Inc. Combination cryopump/getter pump and method for regenerating same
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5935395A (en) * 1995-11-08 1999-08-10 Mitel Corporation Substrate processing apparatus with non-evaporable getter pump
US6077404A (en) * 1998-02-17 2000-06-20 Applied Material, Inc. Reflow chamber and process
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US6361618B1 (en) 1994-07-20 2002-03-26 Applied Materials, Inc. Methods and apparatus for forming and maintaining high vacuum environments

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627986A (ja) * 1985-07-03 1987-01-14 Tokuda Seisakusho Ltd 真空排気装置
EP0693626A1 (en) * 1994-07-20 1996-01-24 Applied Materials, Inc. Vacuum chamber for ultra high vacuum processing at high temperatures
US6361618B1 (en) 1994-07-20 2002-03-26 Applied Materials, Inc. Methods and apparatus for forming and maintaining high vacuum environments
US6043137A (en) * 1994-10-31 2000-03-28 Saes Getters S.P.A. Getter pump module and system
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5879134A (en) * 1994-10-31 1999-03-09 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5980213A (en) * 1994-10-31 1999-11-09 Saes Getters S.P.A. Getter pump module and system
US5993165A (en) * 1994-10-31 1999-11-30 Saes Pure Gas, Inc. In Situ getter pump system and method
US5997255A (en) * 1994-10-31 1999-12-07 Saes Getters S.P.A. Method for pumping a chamber using an in situ getter pump
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US6165328A (en) * 1994-10-31 2000-12-26 Saes Getters S.P.A. Method for processing wafers with in situ gettering
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
WO1996017171A3 (en) * 1994-12-02 1996-10-24 Saes Pure Gas Inc Getter pump module and system
US5935395A (en) * 1995-11-08 1999-08-10 Mitel Corporation Substrate processing apparatus with non-evaporable getter pump
US5855118A (en) * 1996-03-26 1999-01-05 Saes Pure Gas, Inc. Combination cryopump/getter pump and method for regenerating same
US6077404A (en) * 1998-02-17 2000-06-20 Applied Material, Inc. Reflow chamber and process
US6299689B1 (en) 1998-02-17 2001-10-09 Applied Materials, Inc. Reflow chamber and process

Also Published As

Publication number Publication date
JPS6157473B2 (enrdf_load_stackoverflow) 1986-12-06

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