JPS6157473B2 - - Google Patents
Info
- Publication number
- JPS6157473B2 JPS6157473B2 JP21204181A JP21204181A JPS6157473B2 JP S6157473 B2 JPS6157473 B2 JP S6157473B2 JP 21204181 A JP21204181 A JP 21204181A JP 21204181 A JP21204181 A JP 21204181A JP S6157473 B2 JPS6157473 B2 JP S6157473B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum chamber
- pumps
- cryopump
- bulk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 8
- 238000005086 pumping Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 2
- 230000007420 reactivation Effects 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
【発明の詳細な説明】
この発明は、バルクゲツタポンプ素子とクライ
オポンプパネルを同一の真空槽内に特殊な配列に
組合わせた超高真空ポンプに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultra-high vacuum pump in which a bulk getter pump element and a cryopump panel are combined in a special arrangement within the same vacuum chamber.
非常に活性なZr−Al合金が金属のストリツプ
の両面にそれぞれ例えば50μの厚さ、重量にして
約17mg／cm2にコートされ、このコートされたZr−
Al合金層が活性非蒸発ゲツタとして働くバルク
ゲツタポンプが真空ポンプとして利用されている
ことは従来より知られている。しかしこのポンプ
は蒸発型ゲツタポンプと同様に活性ガスに対して
は大きな排気速度をもつているが、不活性ガスを
排気することは困難である欠点をもつている。又
このポンプは通常動作温度が400℃〜室温で、活
性化時に750℃まで昇温することが必要である。 A highly active Zr-Al alloy is coated on each side of the metal strip to a thickness of, for example, 50 μm and a weight of about 17 mg/cm 2 .
It has been known that bulk getter pumps, in which the Al alloy layer acts as an active non-evaporable getter, are used as vacuum pumps. However, although this pump, like the evaporative getter pump, has a high pumping speed for active gas, it has the disadvantage that it is difficult to pump inert gas. Also, this pump normally operates at a temperature of 400°C to room temperature, and it is necessary to raise the temperature to 750°C during activation.
一方例えば10〓の極低温面に大気成分のガスを
凝結させることにより排気作用を行う形式のクラ
イオポンプも従来より公知である。 On the other hand, a type of cryopump that performs an evacuation action by condensing atmospheric component gases on a cryogenic surface of, for example, 10°C is also known.
本願の発明は、非蒸発ゲツタ材によるガスの吸
収により排気作用を行う形式のバルクゲツタポン
プと、上記の極低温度に大気成分のガスを凝結さ
せて排気作用を行うクライオポンプとを組合わせ
て１つの真空槽内に配置した複合ポンプとして排
気性能を増大させポンプの寿命を著しく延長しよ
うとするものである。 The invention of the present application combines a bulk getter pump that performs an exhaust action by absorbing gas with a non-evaporable getter material, and a cryopump that performs an exhaust action by condensing atmospheric component gases at extremely low temperatures. The aim is to increase the pumping performance and significantly extend the life of the pump as a composite pump placed in one vacuum chamber.
クライオポンプとバルクゲツタポンプとは、い
ずれも排気ガス溜め込み式（吸着式）であるた
め、一定量のガスを吸着すると排気能力が減少す
る。このため再生化処理を行ないポンプ能力の回
復をすることが必要で、、すなわち再生作用が必
要である。 Both cryopumps and bulk getter pumps are exhaust gas storage type (adsorption type), so when a certain amount of gas is adsorbed, the exhaust capacity decreases. For this reason, it is necessary to carry out a regeneration process to restore the pumping capacity, that is, a regeneration action is necessary.
又クライオポンプは水素を多量に排気すると、
吸着平衡圧が上昇し、超高真空での排気速度が著
しく減少する。 Also, when a cryopump pumps out a large amount of hydrogen,
The adsorption equilibrium pressure increases and the pumping speed in ultra-high vacuum decreases significantly.
一方、バルクゲツタポンプは室温の操作でも
H2に対する排気速度は僅かに減少するだけなの
で、多量のH2を排気しても超高真空で排気能力
を保持できる。そのためこの二つのポンプを組合
わせて使用することにより再活性化まで時間を延
長できる訳である。しかしながら上述のように両
者のポンプは温度差のある状態で作動するので、
これを一つの真空槽内に装置するには両者の間に
シールドを設けて熱遮断をしなければ能率が下が
ることは明白で、そのため水又はガスの冷却蛇管
で冷却したシールドを設ける必要がある。 On the other hand, bulk Getta pumps can be operated at room temperature.
Since the pumping speed for H 2 is only slightly reduced, the pumping capacity can be maintained at ultra-high vacuum even if a large amount of H 2 is pumped out. Therefore, by using these two pumps in combination, the time until reactivation can be extended. However, as mentioned above, both pumps operate under a temperature difference, so
In order to install this in one vacuum chamber, it is obvious that efficiency will decrease unless a shield is installed between the two to isolate heat, so it is necessary to install a shield cooled by a water or gas cooling pipe. .
又バルクゲツタポンプは、大気圧にさらすと室
温でも活性ガスを吸収してしまうため、その都度
再活性化が必要となる。ところが再活性化できる
回数は限定されているので、度々ポンプ室を大気
圧状態にすることは好ましくないので、真空槽に
はゲート弁を一体に溶接して排気されるべき真空
槽をポンプ室と遮断し、必要時に一応真空にした
後ゲート弁を開き、両ポンプを作動させれば両ポ
ンプの再活性化の度数が減少し両ポンプの寿命を
著しく延長できる。 In addition, bulk getter pumps absorb active gas even at room temperature when exposed to atmospheric pressure, so they must be reactivated each time. However, since the number of times that the pump can be reactivated is limited, it is not desirable to repeatedly bring the pump chamber to atmospheric pressure, so a gate valve is welded to the vacuum chamber and the vacuum chamber to be evacuated is combined with the pump chamber. By shutting off the pump, creating a vacuum when necessary, opening the gate valve, and operating both pumps, the frequency of reactivation of both pumps can be reduced and the life of both pumps can be significantly extended.
以下に図面についてこの発明の実施例を説明す
る。 Embodiments of the invention will be described below with reference to the drawings.
図面において１はポンプを配置する真空槽であ
り、その中心部にクライオポンプパネル２を設
け、外周に１個又は数個あるいは連続してバルク
ゲツタポンプ素子３を配設し両ポンプの中央にシ
ールド５を設ける。シールド５の外周と真空槽自
体の外壁は水冷蛇管８などで冷却するのが望まし
い。 In the drawing, reference numeral 1 denotes a vacuum chamber in which a pump is placed, and a cryopump panel 2 is provided in the center of the vacuum chamber, and one, several, or a series of bulk getter pump elements 3 are arranged on the outer periphery, and the bulk getter pump element 3 is arranged in the center of both pumps. A shield 5 is provided. It is desirable that the outer periphery of the shield 5 and the outer wall of the vacuum chamber itself be cooled with a water-cooled corrugated tube 8 or the like.
又真空槽１にはゲート弁４を溶接してあるが、
弁の反対側には排気されるべき真空槽９が接続さ
れる。なお６はバツフルを設ける場合もある空
間、７はバルクゲツタポンプ素子の電力導入部を
示し、１０はクライオエンジンを示している。 Also, a gate valve 4 is welded to the vacuum chamber 1,
A vacuum chamber 9 to be evacuated is connected to the opposite side of the valve. Note that 6 is a space in which a buffer may be provided, 7 is a power introduction part of a bulk getter pump element, and 10 is a cryoengine.
図面は発明の実施例の説明図である。
１……真空槽、２……クライオポンプパネル、
３……バルクゲツタポンプ素子、４……ゲート
弁、５……シールド、６……バツフア、７……電
力導入部、８……冷却管、９……排気されるべき
真空槽、１０……クライオエンジン。
The drawings are explanatory diagrams of embodiments of the invention. 1... Vacuum chamber, 2... Cryopump panel,
3...Bulk getter pump element, 4...Gate valve, 5...Shield, 6...Buffer, 7...Power introduction section, 8...Cooling pipe, 9...Vacuum chamber to be evacuated, 10... ...cryo engine.
Claims (1)
ート弁を一体に溶接した真空槽内に中央にクライ
オポンプパネルを設け、その周囲にシールドを介
して１個又は数個のバルクゲツタポンプ素子を配
置したことを特徴とするクライオポンプとバルク
ゲツタポンプを組合わせた超高真空ポンプ。1. A cryopump panel is installed in the center of a vacuum chamber in which a gate valve is integrally welded with one side attached to the vacuum chamber to be evacuated, and one or several bulk getter pump elements are installed around it through a shield. An ultra-high vacuum pump that combines a cryopump and a bulk getta pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21204181A JPS58117372A (en) | 1981-12-30 | 1981-12-30 | Superhigh vacuum pump using cryogenic pump and bulk getter pump in combination |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21204181A JPS58117372A (en) | 1981-12-30 | 1981-12-30 | Superhigh vacuum pump using cryogenic pump and bulk getter pump in combination |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58117372A JPS58117372A (en) | 1983-07-12 |
| JPS6157473B2 true JPS6157473B2 (en) | 1986-12-06 |
Family
ID=16615883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21204181A Granted JPS58117372A (en) | 1981-12-30 | 1981-12-30 | Superhigh vacuum pump using cryogenic pump and bulk getter pump in combination |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58117372A (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS627986A (en) * | 1985-07-03 | 1987-01-14 | Tokuda Seisakusho Ltd | Vacuum exhaust apparatus |
| EP0693626B1 (en) * | 1994-07-20 | 1999-06-09 | Applied Materials, Inc. | Vacuum chamber for ultra high vacuum processing at high temperatures |
| US6361618B1 (en) | 1994-07-20 | 2002-03-26 | Applied Materials, Inc. | Methods and apparatus for forming and maintaining high vacuum environments |
| US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
| US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
| US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
| US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
| US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
| US5935395A (en) * | 1995-11-08 | 1999-08-10 | Mitel Corporation | Substrate processing apparatus with non-evaporable getter pump |
| AU2591297A (en) * | 1996-03-26 | 1997-10-17 | Saes Pure Gas, Inc. | Combination cryopump/getter pump and method for regenerating same |
| US6077404A (en) * | 1998-02-17 | 2000-06-20 | Applied Material, Inc. | Reflow chamber and process |
-
1981
- 1981-12-30 JP JP21204181A patent/JPS58117372A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58117372A (en) | 1983-07-12 |
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