JPS627986A - Vacuum exhaust apparatus - Google Patents

Abstract

PURPOSE:To improve the hydrogen exhausting faculty and safely treat and effectively reutilize hydrogen by connecting a nonevaporation type pump which can selectively exhaust hydrogen with a vacuum exhaust apparatus equipped with a cryopump. CONSTITUTION:A crypopump 2 which can exhaust the gas other than hydrogen including deuterium and tritium, neon and helium is connected to a vacuum tank 1. Then, a nonevaporation type pump 3 made of the metal hydride com pound such as hydrogen occlusion alloy which can safely treat and reutilize hydrogen is connected in series with the cryopump 2. Further, the vacuum pump 4 such as turbomolecular pump which can exhaust neon and helium is connected in series with the nonevaporation type pump 3, and thus a vacuum exhaust apparatus is constituted.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a vacuum evacuation device, and more particularly to a vacuum evacuation device that makes it possible to safely process and reuse hydrogen (including deuterium and tritium). .

[Technical background of the invention and its problems]

Conventionally, various vacuum pumps have been used to evacuate a vacuum chamber, but when a vacuum pump is used alone,
It may not be possible to obtain a completely oil-clean vacuum, or even if it is possible to obtain an oil-clean vacuum, the exhaust capacity is small for gases with high vapor pressure at extremely low temperatures, and It was insufficient to evacuate all gases over the vacuum region.

For this reason, there has been a vacuum 11F gas system which is capable of evacuating all gases from a low vacuum to a high vacuum region by combining a plurality of vacuum pumps.

However, in the case of the above-mentioned equipment, gases such as hydrogen, neon, helium, etc. with low vapor pressure are stored and exhausted at extremely low temperatures, so when the amount of storage reaches its limit, the accumulated gas is released. However, since there is little storage and suspension of hydrogen, it is necessary to perform regeneration frequently, and releasing tritium into the atmosphere poses a problem.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned points, and an object thereof is to provide a vacuum rJI gas apparatus that can increase hydrogen exhaust capacity and safely process hydrogen. It is I].

[Summary of the invention]

In order to achieve the above object, the Chakuu II gas device according to the present invention connects in series a cryopump that exhausts at least gas other than hydrogen and a non-evaporating pump that selectively releases hydrogen to a vacuum chamber. By collecting hydrogen with Type A, its IIF capacity is increased and processing can be carried out easily and safely.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIGS. 1 to 4.

FIG. 1 shows an embodiment of the present invention, in which a cryopump 2 as a reservoir type pump/tube and a non-evaporation type pump 3 are connected in series to a vacuum chamber 1.

The above-mentioned cryopump 2 has a J and a
It has a cooling u1 surface at an angle of 0 to 20 degrees, and each cooling surface is designed to condense and collect gases other than hydrogen, neon, and helium that have a vapor pressure of 10'' or less than 12 Torr. In addition, the non-evaporative pump 3 written in -lx is,
For example, it has a metal hydride such as a hydrogen-absorbing alloy, and hydrogen is stored in this metal hydride.

In this embodiment, the cryopump 2 condenses and collects gases other than hydrogen, and the non-evaporative pump 3 exhausts only hydrogen, so the hydrogen exhaust capacity can be greatly increased. When the hydrogen stored in the non-evaporative pump 3 reaches its limit, the hydrogen in the non-evaporative pump 3 is processed or reused at a predetermined location. Therefore, the air can be effectively reused without polluting the atmosphere with harmful substances, especially tritium.

In addition, FIG. 2 shows another embodiment of the present invention, in which neon or helium such as a [-1-Tali bomb, permeation pump, or turbo molecular pump] is selected for the downstream side of the non-evaporative pump 3. The cryopump 2 is designed to selectively evacuate gases other than hydrogen, neon, and helium.

In this embodiment, the cryopump 2 and the non-evaporative pump 3 are used to supply neon and helium, which are not evaporated, by the vacuum pump 4, and the other parts are the same as in the above embodiment. Therefore, in this embodiment as well, the hydrogen evacuation capacity can be increased, and the hydrogen stored in the evaporative pump 3 can be safely disposed of or reused.

Furthermore, since FIG. 3 shows another embodiment of the present invention 1), FIG. 3(a) shows a connection in which a compression pump 5 is inserted and connected in series to the front stage side of the cryopump 2 of the apparatus shown in FIG. Figure 3(b) 1. ．． 1-1=compression pump 5
is inserted and connected to the downstream side of the cryopump 2. The other parts are the same as the -41 embodiment shown in FIG.

In this example as well, hydrogen is safely disposed of, or
It can be effectively reused, and since the exhaust gas is compressed by the compression pump 5 to increase its concentration, it is possible to improve the exhaust efficiency.

Further, FIG. 4 roughly shows another embodiment of the present invention, in which a compression pump is added to the apparatus shown in FIG. 2 in the same way as in FIG.
is inserted and connected, and this compression pump 5 is shown in FIG.
), the front stage side of the cryopump 2 is equipped with a
) are respectively connected to the subsequent stages.

In this embodiment as well, hydrogen can be safely treated or reused, and the compression pump 5 can improve the exhaust efficiency.

[Effects of the Invention] As described above, the vacuum processing apparatus according to the present invention includes at least a cryopump that covers gases other than hydrogen, neon, and helium, and a non-evaporation pump that selectively exhausts hydrogen. The non-evaporative 7
111 The pump stores only hydrogen and becomes antagonist.J: Because I did this, the time for hydrogen storage increased.1. Is it possible to significantly increase the IF energy capacity?T: What's more, hydrogen safety (2 treatment or effective <77j!C)
It has the effect of cutting down.

[Brief explanation of the drawing]

Figures 1, 2, 3 (a), (b) and 4 (
a) and (b) are system configuration diagrams showing one embodiment of the present invention, respectively. 1... Vacuum chamber, 2... Cryopump, 3... Non-evaporating pump, 4... ...Vacuum pump, 5...Compression pump. Applicant's representative ν1 knee -M] Figure 1 (a), (b) (b) Figure 4

Claims (1)

[Claims] 1. A cryopump that exhausts at least hydrogen (including deuterium and tritium), neon, and gas other than helium, and a non-evaporation pump that selectively exhausts hydrogen are sequentially installed in a vacuum chamber. A vacuum exhaust device characterized by being connected in series. 2. The evacuation device according to claim 1, wherein the non-evaporative pump includes a hydrogen storage alloy such as a metal hydride.