JP3604228B2 - Vacuum exhaust device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an evacuation apparatus, and more particularly, to an improved structure of a cryo-turbo having a high evacuation performance, which is suitable for an evacuation apparatus requiring an ultimate pressure of 10 ^-1 Pa or less, and further developed the improved structure. Regarding the structure.
[0002]
[Prior art]
When a chamber to be evacuated (hereinafter referred to as “evacuation chamber”) is depressurized to a pressure of 10 ⁻¹ Pa or less, gas molecules attached to the wall surface of the evacuation chamber, that is, mainly water molecules, are removed from the evacuation chamber. Released inside. Therefore, in order to evacuate the evacuation chamber to a pressure of 10 ^-1 Pa or less in a short time, it is necessary to use a vacuum pump having a high evacuation rate for water molecules.
[0003]
In general, a cryopump or a turbo-molecular pump is used as a vacuum pump of a device capable of evacuating to a pressure of 10 ^-1 Pa or less.
[0004]
The above two pumps have advantages and disadvantages derived from their respective exhaust principles. Cryopumps have the advantage that the pumping speed for water molecules is high, but because they are accumulating vacuum pumps, the accumulated gas must be re-discharged and refreshed at a certain point in time. It has the disadvantage that it cannot be used continuously. Further, since the turbo molecular pump is a gas transport type vacuum pump, it has an advantage that it can be used continuously for a long period of time, but has a disadvantage that the exhaust speed for water molecules is inferior to that of a cryopump.
[0005]
Therefore, a combined vacuum pump called a cryo-turbo as shown in FIG. 9 that compensates for the drawbacks of the above-described cryopump and turbo-molecular pump may be used as the vacuum pump of the vacuum exhaust device.
[0006]
In the above-described combined vacuum pump, a turbo molecular pump 53 is attached to an exhaust port 52 of a vacuum exhaust chamber 51 which is an internal space of the vacuum vessel 50. The turbo molecular pump 53 is attached to the exhaust port 52 via the nipple 54, and therefore, the turbo molecular pump 53 is attached downstream of the nipple 54. Inside the nipple 54, a cylindrical cooling panel 55 cooled to a temperature of about 55K to about 160K is provided. In such a configuration, water molecules are mainly exhausted by the cylindrical cooling panel 55, and other gases are exhausted by the turbo molecular pump 53. Therefore, a vacuum pump that can be used continuously for a long period of time while improving the pumping speed for water molecules is realized.
[0007]
The cylindrical cooling panel 55 is cooled to a predetermined temperature by a refrigerator 56 attached to the nipple 54, for example. Reference numeral 57 denotes, for example, a disk-shaped gate valve provided in the exhaust port 52, and reference numeral 58 denotes an auxiliary pump.
[0008]
FIG. 10 shows the configuration of another conventional apparatus. 10, the elements substantially the same as those described in FIG. 9 are denoted by the same reference numerals. In this device configuration, a cooling panel 55 similar to that described above is provided inside the vacuum exhaust chamber 51. Also with this device, the water molecules are evacuated by the cooling panel 55, and both the increase in the evacuating speed of the water molecules and the long-term continuous use by the turbo-molecular pump 53 are achieved.
[0009]
[Problems to be solved by the invention]
In each of the above-described conventional devices, the following problems are raised.
[0010]
In the conventional apparatus shown in FIG. 9, the cooling panel 55 for capturing water molecules is provided upstream of the turbo molecular pump 53, so that the conductance of this part is reduced, and the performance such as the exhaust speed that the turbo molecular pump 53 originally has is reduced. There is a problem that it cannot be fully exhibited.
[0011]
Further, in the conventional apparatus shown in FIG. 10, although the exhaust performance of the turbo molecular pump 53 is not impaired, when the vacuum exhaust chamber 51 is opened to the atmosphere, the vacuum exhaust chamber is set to the same condition as the atmosphere side. There is a problem that it is necessary to raise the temperature of the cooling panel 55 to room temperature, and it takes time to open the vacuum exhaust chamber 51 to the atmosphere.
[0012]
A main object of the present invention is to solve the above-described problems, and in a vacuum exhaust device that uses a turbo molecular pump or a cryopump as a vacuum pump that exhausts a vacuum exhaust chamber and has an ultimate pressure of 10 ⁻¹ Pa or less. Another object of the present invention is to provide a vacuum exhaust apparatus that can freely open the vacuum exhaust chamber to the atmosphere and improve the exhaust performance of water molecules without substantially reducing the exhaust performance of the vacuum pump.
[0013]
A further object of the present invention is to combine a refrigerator of the cryopump with a structure of a valve member provided at an opening of the vacuum exhaust chamber, even in a vacuum exhaust apparatus using a cryopump without using a turbo-molecular pump. It is another object of the present invention to provide a vacuum exhaust device that can achieve the same exhaust performance described in the above object.
[0014]
Means and action for solving the problem
The vacuum evacuation apparatus according to the present invention is configured as follows to achieve the above object.
[0015]
A vacuum exhaust device that includes a turbo-molecular pump as a vacuum pump that exhausts an evacuation chamber and has an ultimate pressure of 10 ⁻¹ Pa or less, and exhausts water molecules to an exhaust port of the evacuation chamber toward the turbo-molecular pump. And a valve member (hereinafter referred to as a “cryo-valve”) provided with a normal-temperature valve body portion on the side of the vacuum-evacuation chamber. It is configured to open and close as a gate valve for controlling the exhaust operation. In such a configuration, it is also possible to use a cryopump instead of the turbo molecular pump.
[0016]
In the vacuum evacuation apparatus according to the present invention, a cryogenic valve body having the above-described structure is attached to the exhaust port of the vacuum evacuation chamber as a gate valve. Therefore, when the cryogenic valve body is closed, the valve body facing the vacuum exhaust chamber side is at room temperature, so that the conventional problem caused by the temperature rise of the cooling panel when the vacuum exhaust chamber is opened to the atmosphere is solved. . When the evacuated chamber is evacuated, displacing the cryogenic valve body to the evacuated position can open the space between the evacuated chamber and the vacuum pump so that the desired conductance does not impair the evacuation performance. When the evacuation chamber is evacuated by a turbo-molecular pump or the like in this state, a cooling panel having a high evacuation capacity for water molecules is exposed in the evacuation chamber, and therefore, synergistically with the evacuation capacity of the turbo-molecular pump or the like. It works to increase the pumping speed for water molecules. In addition, since the outer shape of the cryogenic valve body is not much larger than that of a conventional gate valve, the outer shape of the cryogenic valve body does not increase the restriction on the shape of the vacuum exhaust device. Further, the conductance on the upstream side of the turbo molecular pump or the like is reduced, and the exhaust performance of the vacuum pump is not reduced.
[0017]
In the above configuration, the cooling temperature of the cooling panel is preferably a temperature at which water condenses and other gases do not condense. Furthermore, when the other gas is nitrogen, oxygen or argon, the cooling temperature of the cooling panel is preferably a temperature included in the range of 55 to 160K. This temperature range can be changed according to the type of other gas. With this configuration, it is possible to maintain high water exhaust performance without reducing the exhaust performance of other gases.
[0018]
In the above configuration, preferably, the cryogenic valve body is movably supported by a position displacement mechanism such as a sliding mechanism, and the position displacement mechanism displaces the cryogenic valve body to one of the closed position and the exhaust position. It is configured as follows. When the cryovalve moves up and down by the sliding mechanism, the closed position is the lower limit position, and the exhaust position is the most opened upper limit position or any intermediate position thereof. By allowing the cryovalve to be installed at an appropriate exhaust position, it is possible to set an optimal conductance during exhaust.
[0019]
In the above configuration, preferably, the cryogenic valve is provided in the vacuum exhaust chamber, and the exhaust position is set in the vacuum exhaust chamber.
[0020]
In the above configuration, the cooling panel is configured to be connected to the refrigeration unit via the heat transfer member. The refrigeration means is preferably arranged outside the evacuation chamber. An example of the refrigeration means is a well-known refrigerator, but is not limited thereto.
[0021]
In the above configuration, the heat transfer member is preferably formed of a member having deformability or a member having rigidity. According to the heat transfer member having such deformability, it is possible to flexibly cope with a case where the position of the cryogenic valve body is displaced. In addition, by appropriately changing the structure and operation of the cryogenic valve, a rigid member can be used as the heat transfer member.
[0022]
In the above configuration, it is preferable that the cooling panel and the valve body are connected by a heat insulating member, and a heat insulating space is formed between the cooling panel and the valve body. With this configuration, it is possible to maintain the temperatures of the cooling panel and the valve body at desired temperatures.
[0023]
In a configuration in which a cryopump is used as a vacuum pump, the cooling panel may be configured to be cooled by a refrigerator included in the cryopump. According to this configuration, it is not necessary to provide a refrigerator for cooling the cooling panel.
[0024]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
[0025]
1 to 3 show a first embodiment of a vacuum exhaust device according to the present invention. FIG. 1 is a partial vertical cross-sectional view showing a schematic configuration of a vacuum evacuation apparatus, and FIG. 2 is an enlarged vertical cross-sectional view showing a main part in FIG. FIG. 3 is an enlarged vertical cross-sectional view showing a state in which the cryovalve is displaced to a desirable exhaust position (for example, a fully open position at an upper limit).
[0026]
In FIG. 1, the interior space of a vacuum vessel 11 is evacuated, and a vacuum exhaust chamber is formed therein. A circular opening 12 is formed, for example, at the center of the lower wall of the vacuum vessel 11, and a vacuum pump device is provided outside the opening 12. A valve member 13 is provided at a position inside the vacuum vessel inside the opening 12. In the following description, this valve member 13 will be referred to as a “cryovalve” due to its structural features. The cryovalve 13 is a gate valve member having a diameter larger than the diameter of the opening 12 and is supported by, for example, a well-known sliding mechanism (not shown). It is provided so as to move (downward movement in the illustrated example) or move away (upward movement in the illustrated example). The sliding mechanism is an example of a position displacement mechanism for displacing the position of the cryogenic valve body 13, and the configuration of the position displacement mechanism itself is arbitrary. 1 and 2 show that the cryogenic valve body 13 is displaced downward, and the outer peripheral portion of the cryogenic valve body 13 is provided on the peripheral portion of the opening 12 via a seal member (O-ring) 14 provided on the peripheral portion. This shows a state in which the contact is made and the opening 12 is closed. At this time, the cryovalve 13 is at the lower limit position, and creates a closed state. On the other hand, in FIG. 3, the cryovalve 13 is displaced upward and the opening 12 is opened. In the illustrated example, the cryovalve 13 is located at the upper limit position, and is set at the most open exhaust position. The distance a in FIG. 3 is the sliding range of the cryogenic valve 13. In addition, the exhaust position of the cryogenic valve body 13 is not limited to the upper limit position. Even an intermediate open position can be used as the exhaust position.
[0027]
The cryovalve 13 has a disc body 15 having a disk shape with a required thickness, and a circular recess 15a formed on the surface (the lower surface in the figure) of the valve body 15 on the opening 12 side. And a cooling panel 16 arranged. The diameter of the recess 15 a is substantially equal to the diameter of the opening 12. The cooling panel 16 is formed of a material having good heat conductivity such as copper, and is fixed to the valve body 15 via a cooling panel holder 17 made of a heat insulating material. The cooling panel 16 fixed to the recess 15 a is housed in the recess 15 a without protruding from the lower surface of the valve body 15. A relatively narrow space is formed between the valve body 15 and the cooling panel 16.
[0028]
A vacuum pump unit provided below the vacuum vessel 11 includes a nipple 18 for mounting a refrigerator attached to a lower peripheral portion of the opening 12, and a turbo molecular pump 19 fixed below the nipple 18. , A cooling panel refrigerator 20 attached to the cylindrical side projection 18a of the nipple 18, and an auxiliary pump 24 such as a dry pump or an oil rotary pump. Seal members 21 and 22 are interposed between the vacuum vessel 11 and the nipple 18 and between the side projection 18a of the nipple 18 and the refrigerator 20, respectively. The tip portion 20a of the refrigerator 20 extends to the internal space of the nipple 18 through the internal space of the side projection 18a.
[0029]
The cooling panel 16 of the cryovalve 13 is connected to the tip 20 a of the refrigerator 20 by a heat transfer member 23. The cooling panel 16 and the refrigerator 20 are kept in good thermal contact by the heat transfer member 23. The heat transfer member 23 is made of, for example, a copper fiber, has good heat conduction, and has a length and a degree of freedom that can sufficiently cope with a vertical displacement of the cryogenic valve body 13. The heat transfer member 23 has deformation flexibility such that the heat transfer member 23 is freely deformed according to the position of the cryogenic valve body 13. Regarding the state of the heat transfer member 23, FIGS. 1 and 2 show the most bent state, and FIG. 3 shows the most extended state.
[0030]
When it is not necessary to evacuate the inner space of the vacuum vessel 11, the cryovalve 13 is at the lower limit position as shown in FIG. 1 or FIG. The opening 12 is closed, whereby the space between the vacuum container 11 and the vacuum pump device is kept airtight. On the other hand, when it is necessary to evacuate the internal space of the vacuum vessel 11, the cryogenic valve element 1 is displaced to a predetermined upper position (preferably, an upper limit position) by, for example, a sliding mechanism, whereby the opening 12 is opened. Then, the internal space of the vacuum container 11, that is, the vacuum exhaust chamber is evacuated by the turbo molecular pump 19 and the like.
[0031]
The space between the cooling panel 16 and the valve body 15 joined by the cooling panel holder 17 is naturally evacuated when the inside of the vacuum vessel 11 is evacuated. When the cryogenic valve 13 is closed, the space is evacuated by the turbo-molecular pump 19 and the like to be in a vacuum, and thus acts as a vacuum heat insulating part. Therefore, even if the cooling panel 16 is cooled to, for example, a temperature of 55 to 160 K by the action of the refrigerator 20 and the heat transfer member 23, the valve body 15 can be kept at a normal temperature by the above-mentioned space functioning as a vacuum heat insulating part. is there.
[0032]
Regarding how low the cooling panel 16 should be cooled by the refrigerator 20, when the other gas is, for example, nitrogen, oxygen, argon, or the like, it is desirable to set as follows.
[0033]
The equilibrium vapor pressure of water at 160 K is about 10 ⁻⁴ Pa, and the temperature of the cooling panel 16 may be 160 K or less as long as the evacuation device needs to reach a pressure of about 10 ⁻⁴ Pa. However, in practice, a pressure lower than 10 ⁻⁴ Pa is often required. Assuming such a case, it is desirable that the temperature of the cooling panel 16 be 120 K or less at which the equilibrium vapor pressure of water becomes 10 ⁻⁹ Pa or less.
[0034]
When a gas other than water condenses on the cooling panel 16, the internal pressure of the vacuum vessel 11 is determined by the equilibrium vapor pressure of the gas at the temperature of the cooling panel 16 based on the inherent equilibrium vapor pressure characteristic of the condensed gas. Is done. Therefore, the temperature of the cooling panel 16 is such that gases other than water do not condense, i.e., for example, gases such as nitrogen, oxygen and argon, which are usually mainly exhausted gases. Therefore, it is necessary to set the temperature to 55K or more at which the equilibrium vapor pressure becomes 100 Pa or more.
[0035]
Further, usually, when the inside of the vacuum vessel is evacuated, first, rough evacuation is performed from 10 Pa to several tens Pa by a roughing pump (corresponding to the auxiliary pump 24) such as an oil rotary pump or a dry pump. After that, the gate valve is opened, and evacuation is performed by a turbo-molecular pump or a cryopump. According to the present embodiment, the internal space of the vacuum vessel 11 is roughly evacuated from 10 Pa to several tens Pa by the auxiliary pump 24, and then the cryogenic valve 13 is opened, and the vacuum exhaust is performed by the turbo molecular pump 19. Done. Therefore, when the cryovalve 13 is opened, the cooling panel 16 is displaced into the internal space of the vacuum vessel 11 having a pressure of 10 to several tens Pa. At this time, if the partial pressure of the gas present in the internal space of the vacuum vessel 11 is higher than the equilibrium vapor pressure of the gas at the temperature of the cooling panel 16, the gas condenses on the cooling panel 16. For this reason, the temperature of the cooling panel 16 needs to be 55K or more based on the fact that the equilibrium vapor pressure of the gas to be mainly exhausted is a pressure higher than 10 to several tens Pa, for example, a pressure of 100 Pa or more. is there.
[0036]
As is clear from the above description, in order for the cooling panel 16 provided on the cryoplast 13 to effectively exhaust only water molecules, the temperature is maintained at a temperature in the range of 55 to 120K. It is necessary. Further, when the pressure condition of the vacuum exhaust device is about 10 ⁻⁴ Pa and the other gas is nitrogen, oxygen, argon, or the like, which is a gas that is usually mainly exhausted, 55 to 55 The temperature is preferably in the range of 160K. Such a temperature range can vary depending on the type of other gas.
[0037]
According to the vacuum evacuation apparatus having the above configuration, when the cryogenic valve body 13 serving as the gate valve is displaced to the exhaust position, for example, the upper limit position, the cooling panel 16 of the cryogenic valve body 13 has the diameter of the cooling panel 16. It will have the ability to evacuate water molecules at approximately the same pumping speed as a cryopump with the same inlet diameter. Other gases are exhausted by the turbo molecular pump 19 without lowering the original exhaust performance of the turbo molecular pump 19. For this reason, the vacuum evacuation apparatus according to the present embodiment can exhibit the evacuation performance for water molecules at the same level as a cryopump and the original evacuation performance of a turbo-molecular pump.
[0038]
Next, a second embodiment of the evacuation apparatus according to the present invention will be described with reference to FIG. In this embodiment, only a cryopump is used as a vacuum pump, and the internal structure of the cryopump 30 configured in combination with the above-described cryopump 13 is a general one. In FIG. 4, substantially the same elements as those described in the above embodiment are denoted by the same reference numerals.
[0039]
A pump container 31 of the cryopump 30 is attached to the outside of the lower wall of the vacuum container 11 via the sealing member 32 so as to correspond to the opening 12. In the drawing, a refrigerator 34 is attached to a lower wall of a pump container 31 via a seal member 33, and an opening supported inside a portion of the pump container 31 at a first refrigeration stage of the refrigerator 34 described later. A radiation shield 36 having a louver 35 facing the part 12 is provided. A cryo-condensation panel 37 and a cryosorption panel 38 are further attached to the upper end of the refrigerator 34. A portion 39 of the refrigerator 34 is a first freezing stage, and a portion 40 is a second freezing stage. The radiation shield 36 is connected to the first freezing stage 39 of the refrigerator 34 in good thermal contact.
[0040]
The other structure is the same as that of the first embodiment. The cryogenic valve 13 is slidably provided, and the cooling panel 16 is connected to the upper edge of the radiation shield 36 via the heat transfer member 23. . FIG. 4 shows a state in which the cryovalve 13 is displaced to the upper limit exhaust position.
[0041]
The internal structure of the cryopump 30 is a general one as described above. However, the cryopumpulation panel 37 and the cryopsorption panel 38 are connected to the second refrigeration stage 40 with good thermal contact and have a temperature of 10 to 15K. Cooled to a temperature of about Gases such as nitrogen, oxygen, and argon are exhausted by the cryocondensation panel 37, and hydrogen and the like are exhausted by the cryosorption panel 38. Further, the radiation shield 36 and the louver 35 are connected to the first freezing stage 40 with good thermal contact, and are cooled to about 55 to 80K. The radiation shield 36 and the louver 35 protect the second freezing stage 40, the cryosorption panel 38 and the cryocondensation panel 37 from radiation heat, and further discharge water.
[0042]
In the present embodiment, since the first refrigeration stage 39 of the cryopump 30 is cooled to about 55 to 80 K, the members connected thereto, that is, the radiation shield 36 or the louver 35, and the cooling panel 16 of the cryopump 13 are Are connected by the heat transfer member 23, so that a special refrigerator for cooling the cooling panel 16 is not required. In this way, a vacuum pumping device having a very high pumping speed for water can be realized with easy improvement.
[0043]
In each of the above-described embodiments, the cooling panel 16 of the cryovalve 13 is provided in the recess 15 a of the valve body 15. However, if there is room in the structure of the turbo molecular pump 19 or the cryopump 30 on the side of the cryogenic valve 13, as shown in FIG. 5, the cooling panel 16 is provided with a structure protruding from the lower surface of the valve 15. You can also. According to this structure, when the cryogenic valve body 13 is displaced to the exhaust position, the frequency of incidence of water molecules on the cooling panel 16 is significantly increased, and the exhaust performance of water molecules is further improved.
[0044]
In each of the above embodiments, the refrigerator for cooling the cooling panel 16 is provided on the vacuum pump device side. However, the same effect can be obtained even if the refrigerator is air-tightly mounted and mounted on the upper side of the cryovalve 13. Can be obtained.
[0045]
Furthermore, a refrigerator using a GM cycle, a JT effect, a pulse tube method, or the like can be used as a refrigerator that cools the cooling panel 16 provided on the cryogenic valve body 13. As another refrigeration means, the same effect can be achieved by cooling in such a manner that a refrigerant such as liquid nitrogen is circulated instead of the refrigerator as described above.
[0046]
6 to 8 show other modified examples of the heat transfer member 23 described above. In each figure, (a) shows the state of the fully closed position, and (b) shows the state of the fully open position. In the structure of each drawing, unlike the above-described embodiment, the structure does not use a nipple for mounting a refrigerator.
[0047]
The heat transfer member 23A shown in FIG. 6 is based on the assumption that the operation of the cryovalve 13 is used only in one of the fully closed state and the fully open state, and shows the fully closed position shown in FIG. 6A and the fully closed position shown in FIG. It is configured to contact the refrigerator at the fully open position.
[0048]
The heat transfer member 23B shown in FIG. 7 has a considerably large sliding range of the cryogenic valve body 13, and the slack of the heat transfer member 23 made of the above-mentioned copper fiber is a problem when the cryogenic valve body 13 is closed. Assuming such a case, it is configured in an articulated structure using a metal or the like having good thermal conductivity.
[0049]
The heat transfer member 23 </ b> C shown in FIG. 8 is formed in a fixed rod shape as a whole, and is configured to be held by a sliding holding member 41 having good thermal contact connected to the refrigerator 20.
[0050]
In the above-described first embodiment and the like, the structure in which the nipple 18 for attaching the refrigerator 20 is provided is shown. However, the nipple is not an essential structure, and a smaller one is used depending on the size of the refrigeration means. Or none at all.
[0051]
【The invention's effect】
As apparent from the above description, according to the present invention, as a gate valve of the vacuum exhaust chamber, a cooling panel cooled to a temperature suitable for exhausting water molecules to the vacuum pump device unit side, Since the cryovalve having the normal temperature valve body is provided, the vacuum exhaust chamber can be freely opened to the atmosphere, and the exhaust performance for water molecules can be improved without lowering the exhaust performance of the vacuum pump. .
[Brief description of the drawings]
FIG. 1 is a partial longitudinal sectional view showing a schematic configuration of a first embodiment of a vacuum exhaust device according to the present invention.
FIG. 2 is an enlarged vertical sectional view showing a main part in FIG. 1 and showing a state in which a cryogenic valve body has been displaced to an airtight holding position (a lower limit fully closed position).
FIG. 3 is an enlarged vertical cross-sectional view of a relevant part showing a state in which a cryogenic valve body is displaced to a desired exhaust position.
FIG. 4 illustrates a second embodiment of the present invention, and is a view similar to FIG. 1 but using a cryopump as a vacuum pump.
FIG. 5 is a vertical sectional view showing a main part of another embodiment of a cryoplast.
FIG. 6 is a vertical sectional view of a main part showing another embodiment of the heat transfer member.
FIG. 7 is a vertical sectional view of a main part showing still another embodiment of the heat transfer member.
FIG. 8 is a vertical sectional view of a main part showing still another embodiment of the heat transfer member.
FIG. 9 is a longitudinal sectional view showing an example of a conventional evacuation device.
FIG. 10 is a longitudinal sectional view showing another example of a conventional evacuation apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 Vacuum container 12 Opening part 13 Cryo valve body 15 Valve body part 16 Cooling panel 17 Cooling panel holder 18 Nipple 19 Turbo molecular pump 20 Refrigerator 23 Heat transfer member 24 Auxiliary pump 30 Cryop 31 Pump container 34 Refrigerator 35 Louver 36 Radiation Shield 37 Cryocondensation panel 38 Cryosorption panel 39 First freezing stage 41 Second freezing stage

Claims (13)

In a vacuum exhaust device provided with a turbo-molecular pump that exhausts the vacuum exhaust chamber and the ultimate pressure is 10 ⁻¹ Pa or less,
At the exhaust port of the vacuum exhaust chamber, a cooling panel cooled to a temperature suitable for exhausting water molecules was provided on the turbo molecular pump side, and a normal temperature valve body was provided on the vacuum exhaust chamber side. A vacuum exhaust device comprising a valve member, wherein the valve member opens and closes as a partition valve for controlling the exhaust operation of the vacuum exhaust chamber. The vacuum evacuation apparatus according to claim 1, wherein a cryopump is used instead of the turbo molecular pump. 3. The vacuum exhaust device according to claim 1, wherein the cooling temperature of the cooling panel is a temperature at which water condenses and other gases do not condense. 4. The vacuum exhaust device according to claim 3, wherein the cooling temperature of the cooling panel is a temperature included in a range of 55 to 160K. 3. The vacuum according to claim 1, wherein the valve member is movably supported by a position displacement mechanism, and the position displacement mechanism displaces the valve member to one of a closed position and an exhaust position. Exhaust device. The evacuation apparatus according to claim 5, wherein the valve member is provided inside the evacuation chamber, and the evacuation position is set in the evacuation chamber. 3. The vacuum evacuation apparatus according to claim 1, wherein the cooling panel is connected to a refrigeration unit via a heat transfer member. The vacuum evacuation apparatus according to claim 7, wherein the refrigeration unit is disposed outside the vacuum evacuation chamber. 9. The vacuum evacuation device according to claim 7, wherein the refrigeration unit is a refrigerator. The vacuum exhaust device according to claim 7, wherein the heat transfer member is formed of a member having deformability. The vacuum evacuation apparatus according to claim 7, wherein the heat transfer member is formed of a member having rigidity. The vacuum evacuation apparatus according to claim 1, wherein the cooling panel and the valve body are connected by a heat insulating member, and a heat insulating space is formed between the cooling panel and the valve body. The vacuum evacuation apparatus according to claim 2, wherein the cooling panel is cooled by a refrigerator included in the cryopump.

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