JPS6245382U

JPS6245382U -

Info

Publication number: JPS6245382U
Application number: JP13766785U
Authority: JP
Priority date: 1985-09-09
Filing date: 1985-09-09
Publication date: 1987-03-19
Also published as: JPH037587Y2

Description

[Brief explanation of the drawing]

第１図は本考案に係るクライオポンプの再生処
理に使用した状態を示す縦断面図、第２図は同ク
ライオポンプの再生処理の変形例を示す縦断面図
、第３図は本考案に係るクライオポンプを再生処
理もしくは予冷処理に使用した状態を示す縦断面
図、第４図は従来のクライオポンプの再生処理を
説明する断面図である。１０……クライオポンプ、１１……ポンプケー
ス、１２……冷凍機、１３，１４……エキスパン
シヨンヘツド、１５……シールドパネル、１６…
…クライオパネル、１７……バツフルパネル、１
８……吸着剤、１９……高圧真空バルブ、２０…
…真空チヤンバ、２１……金属パイプ、２２……
吸入バルブ、２３……コンプレツサ、２４……排
出バルブ、２５，２６……メカニカルポンプ、２
７……排出バルブ、２８……加熱手段。 Fig. 1 is a vertical cross-sectional view showing a state in which the cryopump according to the present invention is used for regeneration processing, Fig. 2 is a longitudinal cross-sectional view showing a modification of the cryopump according to the regeneration processing, and Fig. 3 is a longitudinal cross-sectional view showing a modified example of the cryopump according to the present invention. FIG. 4 is a longitudinal sectional view showing a cryopump used for regeneration processing or precooling processing, and FIG. 4 is a sectional view illustrating a conventional cryopump regeneration processing. 10... Cryopump, 11... Pump case, 12... Refrigerator, 13, 14... Expansion head, 15... Shield panel, 16...
...Cryopanel, 17...Batsuful panel, 1
8...Adsorbent, 19...High pressure vacuum valve, 20...
...Vacuum chamber, 21...Metal pipe, 22...
Suction valve, 23... Compressor, 24... Discharge valve, 25, 26... Mechanical pump, 2
7... Discharge valve, 28... Heating means.

Claims

[Scope of Claim for Utility Model Registration] (1) An expansion head of a refrigerator disposed inside a pump case, and an expansion head connected to this head,
Equipped with panels such as a shield panel and cryopanel that keep the inside of the pump case in an ultra-low temperature state, by freezing and adsorbing gas in the air on the surface of the panel cooled to an ultra-low temperature, it is possible to move the air from the vacuum chamber side to the pump case side. A cryopump for sucking air into a cryopump, characterized in that a metal pipe is wrapped around the outer periphery of the expansion head, and a heating or cooling medium is supplied into the pipe. (2) sending a heating medium into the pipe by a compressor connected to one side of the pipe;
Utility model registration claim No. 1, which is characterized in that the inside of the pump case is regenerated by heating the expansion head and the panels connected to the head and releasing the gas frozen and adsorbed on the panel surface. Cryopump described in (1). (3) sending a cooling medium into the pipe by a compressor connected to one side of the pipe;
A cryopump according to claim (1) of the utility model registration, characterized in that the cryopump precools panels connected to an expansion head.