JPH0188081U - - Google Patents
Info
- Publication number
- JPH0188081U JPH0188081U JP18299787U JP18299787U JPH0188081U JP H0188081 U JPH0188081 U JP H0188081U JP 18299787 U JP18299787 U JP 18299787U JP 18299787 U JP18299787 U JP 18299787U JP H0188081 U JPH0188081 U JP H0188081U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- cryopanel
- refrigerant
- outlet
- steady state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008929 regeneration Effects 0.000 claims description 5
- 238000011069 regeneration method Methods 0.000 claims description 5
- 239000003507 refrigerant Substances 0.000 claims 4
- 229910052734 helium Inorganic materials 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案を強制循環方式に適用した一実
施例を示すブロツク図、第２図は本考案を自然循
環方式に適用した場合の例を示すブロツク図であ
る。
１ａ，１ｂ，１ｃ……クライオパネル、２ａ，
２ｂ，２ｃ……出口弁、３ａ，３ｂ，３ｃ……定
常弁、４ａ，４ｂ，４ｃ……再生弁、５……戻り
ライン、６……定常ライン、７……再生ライン、
８……冷凍機、９……気液分離器、１０……供給
弁、１１……ガス抜ライン、１２……供給ライン
。
FIG. 1 is a block diagram showing an example in which the present invention is applied to a forced circulation system, and FIG. 2 is a block diagram showing an example in which the invention is applied to a natural circulation system. 1a, 1b, 1c...cryopanel, 2a,
2b, 2c... Outlet valve, 3a, 3b, 3c... Steady valve, 4a, 4b, 4c... Regeneration valve, 5... Return line, 6... Steady line, 7... Regeneration line,
8... Refrigerator, 9... Gas-liquid separator, 10... Supply valve, 11... Gas vent line, 12... Supply line.
Claims (1)
オパネルを個々にヘリウム冷凍機からの冷媒で予
冷、再生するクライオポンプにおいて、個個のク
ライオパネルの入口に定常弁と再生弁を、個々の
クライオパネルの出口に出口弁を、１つのクライ
オパネル当り３個設け、特定のクライオパネルの
再生時には、このクライオパネルの出口弁、及び
定常弁を閉として再生弁より冷媒を回収し、一方
、特定のクライオパネルの予冷時には、定常弁と
出口弁のいずれかを開、他方を閉として冷媒を供
給し、再生弁から冷媒を回収することを特徴とす
るクライオポンプ。 In a cryopump that precools and regenerates multiple cryopanels installed in the same vacuum chamber individually using refrigerant from a helium refrigerator, a steady state valve and a regeneration valve are installed at the inlet of each cryopanel, and Three outlet valves are provided for each cryopanel at the outlet of the panel, and when a specific cryopanel is regenerated, the outlet valve and the steady state valve of this cryopanel are closed and the refrigerant is recovered from the regeneration valve. A cryopump characterized in that, when precooling a cryopanel, one of a steady state valve and an outlet valve is opened, the other is closed, refrigerant is supplied, and the refrigerant is recovered from a regeneration valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18299787U JPH0188081U (en) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18299787U JPH0188081U (en) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188081U true JPH0188081U (en) | 1989-06-09 |
Family
ID=31474433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18299787U Pending JPH0188081U (en) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188081U (en) |
-
1987
- 1987-12-02 JP JP18299787U patent/JPH0188081U/ja active Pending
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