JPS582379U - cryopump - Google Patents

cryopump

Info

Publication number
JPS582379U
JPS582379U JP9606781U JP9606781U JPS582379U JP S582379 U JPS582379 U JP S582379U JP 9606781 U JP9606781 U JP 9606781U JP 9606781 U JP9606781 U JP 9606781U JP S582379 U JPS582379 U JP S582379U
Authority
JP
Japan
Prior art keywords
cold head
stage
cryopanel
shield
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9606781U
Other languages
Japanese (ja)
Inventor
押井　清志
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP9606781U priority Critical patent/JPS582379U/en
Publication of JPS582379U publication Critical patent/JPS582379U/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案ポンプの１例の裁断側面−である。 １・・・開口、２・・・密閉筐体、３・・・冷凍機コー
ルドヘッド、３ａ・・・第１段、３ｂ・・・第２段、４
・・・シールド、５・・・バッフル、６・・・クライオ
パネル、７・・・パイプ。The drawing is a cut side view of one example of the pump of the present invention. DESCRIPTION OF SYMBOLS 1... Opening, 2... Sealed housing, 3... Refrigerator cold head, 3a... 1st stage, 3b... 2nd stage, 4
...Shield, 5...Baffle, 6...Cryopanel, 7...Pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 前方に開口１を有する密閉筐体２内に、ヘリウムガスそ
の他の冷媒ガスが循環する第１段３ａと第４段３ｂを備
えた冷凍機コールドヘッド３を設け、これを囲繞してこ
れと一体のシールド４とバッフル５及びクライオパネル
６とを設けて該筐体２内を真空排気する式のものに於て
、該コールドヘッド３、該シールド４、該クライオパネ
ル６のうちの少なくとも一つにポンプ再生処理時には前
記冷媒ガスが循環されるパイプ７を設けて成るクライオ
ポンプ。A refrigerator cold head 3 having a first stage 3a and a fourth stage 3b through which helium gas or other refrigerant gas circulates is provided in a sealed casing 2 having an opening 1 at the front, and is surrounded by and integrated with the refrigerator cold head 3. In a type that evacuates the inside of the housing 2 by providing a shield 4, a baffle 5, and a cryopanel 6, at least one of the cold head 3, the shield 4, and the cryopanel 6 is provided. A cryopump comprising a pipe 7 through which the refrigerant gas is circulated during pump regeneration processing.
JP9606781U 1981-06-30 1981-06-30 cryopump Pending JPS582379U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9606781U JPS582379U (en) 1981-06-30 1981-06-30 cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9606781U JPS582379U (en) 1981-06-30 1981-06-30 cryopump

Publications (1)

Publication Number Publication Date
JPS582379U true JPS582379U (en) 1983-01-08

Family

ID=29890949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9606781U Pending JPS582379U (en) 1981-06-30 1981-06-30 cryopump

Country Status (1)

Country Link
JP (1) JPS582379U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6245382U (en) * 1985-09-09 1987-03-19
JPH05340622A (en) * 1992-06-09 1993-12-21 Sumitomo Heavy Ind Ltd Cold heat accumulative type freezer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS442296Y1 (en) * 1968-02-29 1969-01-28
JPS57146072A (en) * 1981-03-03 1982-09-09 Nec Corp Cryopump regenerating mechanism

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS442296Y1 (en) * 1968-02-29 1969-01-28
JPS57146072A (en) * 1981-03-03 1982-09-09 Nec Corp Cryopump regenerating mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6245382U (en) * 1985-09-09 1987-03-19
JPH05340622A (en) * 1992-06-09 1993-12-21 Sumitomo Heavy Ind Ltd Cold heat accumulative type freezer

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