JPS606892U - Small helium cryopump - Google Patents

Small helium cryopump

Info

Publication number
JPS606892U
JPS606892U JP9872383U JP9872383U JPS606892U JP S606892 U JPS606892 U JP S606892U JP 9872383 U JP9872383 U JP 9872383U JP 9872383 U JP9872383 U JP 9872383U JP S606892 U JPS606892 U JP S606892U
Authority
JP
Japan
Prior art keywords
cryopump
small helium
type
small
helium refrigerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9872383U
Other languages
Japanese (ja)
Inventor
秀敏 森本
Original Assignee
アルパツク・クライオ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルパツク・クライオ株式会社 filed Critical アルパツク・クライオ株式会社
Priority to JP9872383U priority Critical patent/JPS606892U/en
Publication of JPS606892U publication Critical patent/JPS606892U/en
Pending legal-status Critical Current

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の実施例の一部截断斜視図、第２図はそ
の変形例の要部の截断側面図である。 １・・・・・・クライオポンプ、２・・・・・・ポンプ
ケース、３・・・・・・ヘリウム冷凍機、４・・・・・
・シリンダ、５・・・・・・凝縮部材、６・・・・・・
補助冷却パイプ。FIG. 1 is a partially cutaway perspective view of an embodiment of the present invention, and FIG. 2 is a cutaway side view of the main part of a modification thereof. 1... Cryopump, 2... Pump case, 3... Helium refrigerator, 4...
・Cylinder, 5... Condensing member, 6...
Auxiliary cooling pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クライオポンプ１のポンプケース２内に設けたヘリウム
冷凍機３のシリンダ４に、これにより冷却されて気体分
子を凝縮するシールドその他の凝縮部材５を取付けする
式のものに於て、該凝縮部材５に液体窒素その他の冷却
液が循環する補助冷却バイブロを設けて成る小型ヘリウ
ム冷凍機式クライオポンプ。In a type of cryopump 1 in which a shield or other condensing member 5 is attached to the cylinder 4 of a helium refrigerator 3 provided in the pump case 2 of the cryopump 1 for cooling and condensing gas molecules, the condensing member 5 A small helium refrigerator type cryopump equipped with an auxiliary cooling vibro that circulates liquid nitrogen or other coolant.
JP9872383U 1983-06-28 1983-06-28 Small helium cryopump Pending JPS606892U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9872383U JPS606892U (en) 1983-06-28 1983-06-28 Small helium cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9872383U JPS606892U (en) 1983-06-28 1983-06-28 Small helium cryopump

Publications (1)

Publication Number Publication Date
JPS606892U true JPS606892U (en) 1985-01-18

Family

ID=30234266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9872383U Pending JPS606892U (en) 1983-06-28 1983-06-28 Small helium cryopump

Country Status (1)

Country Link
JP (1) JPS606892U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186075A (en) * 1981-05-12 1982-11-16 Ulvac Corp Cryo-pump and operating method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186075A (en) * 1981-05-12 1982-11-16 Ulvac Corp Cryo-pump and operating method thereof

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