JPS606890U - Cryopump vibration isolator - Google Patents

Cryopump vibration isolator

Info

Publication number
JPS606890U
JPS606890U JP9738783U JP9738783U JPS606890U JP S606890 U JPS606890 U JP S606890U JP 9738783 U JP9738783 U JP 9738783U JP 9738783 U JP9738783 U JP 9738783U JP S606890 U JPS606890 U JP S606890U
Authority
JP
Japan
Prior art keywords
cryopump
bellows
vibration isolator
pump case
refrigerator unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9738783U
Other languages
Japanese (ja)
Other versions
JPH041348Y2 (en
Inventor
押井　清志
秀敏 森本
守住　克己
Original Assignee
アルバツク・クライオ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルバツク・クライオ株式会社 filed Critical アルバツク・クライオ株式会社
Priority to JP9738783U priority Critical patent/JPS606890U/en
Publication of JPS606890U publication Critical patent/JPS606890U/en
Application granted granted Critical
Publication of JPH041348Y2 publication Critical patent/JPH041348Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例の截断側面図、第２図は本考案の実施例
の裁断側面図、第３図及び第４図は本考案の他の実施例
の側面図、第５図及び第６図は夫々本考案の更に他の実
施例の側面図を示す。 １・・・・・・ポンプケース、２・・・・・・冷凍機ユ
ニツｔ−１３・・・・・・挿通孔、４・・・・・・ベロ
ーズ。FIG. 1 is a cut-away side view of a conventional example, FIG. 2 is a cut-away side view of an embodiment of the present invention, FIGS. 3 and 4 are side views of other embodiments of the present invention, and FIGS. The figures each show a side view of further embodiments of the invention. 1... Pump case, 2... Refrigerator unit T-13... Insertion hole, 4... Bellows.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クライオポンプのポンプケース１に冷凍機ユニット２を
挿通し、該ケース１と該ユニット２を一体に気密に取付
けする式のものに於て、該ポンプケース１の冷凍機ユニ
ット２の挿通口３を細径化すると共にその周囲にこれに
適合した細径のベローズ４を設け、冷凍機ユニット２を
該ベローズ４を介して該ポンプケース１に取付けして成
るクライオポンプの防振装置。In a type of cryopump in which the refrigerator unit 2 is inserted into the pump case 1 of the cryopump and the case 1 and the unit 2 are integrally attached airtightly, the insertion port 3 of the refrigerator unit 2 of the pump case 1 is inserted into the cryopump. A vibration isolating device for a cryopump, which has a small diameter and is provided with a bellows 4 of a small diameter adapted to the bellows around the bellows, and a refrigerator unit 2 is attached to the pump case 1 via the bellows 4.
JP9738783U 1983-06-25 1983-06-25 Cryopump vibration isolator Granted JPS606890U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9738783U JPS606890U (en) 1983-06-25 1983-06-25 Cryopump vibration isolator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9738783U JPS606890U (en) 1983-06-25 1983-06-25 Cryopump vibration isolator

Publications (2)

Publication Number Publication Date
JPS606890U true JPS606890U (en) 1985-01-18
JPH041348Y2 JPH041348Y2 (en) 1992-01-17

Family

ID=30231675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9738783U Granted JPS606890U (en) 1983-06-25 1983-06-25 Cryopump vibration isolator

Country Status (1)

Country Link
JP (1) JPS606890U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus

Also Published As

Publication number Publication date
JPH041348Y2 (en) 1992-01-17

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