JPS57146072A - Cryopump regenerating mechanism - Google Patents

Cryopump regenerating mechanism

Info

Publication number
JPS57146072A
JPS57146072A JP3030681A JP3030681A JPS57146072A JP S57146072 A JPS57146072 A JP S57146072A JP 3030681 A JP3030681 A JP 3030681A JP 3030681 A JP3030681 A JP 3030681A JP S57146072 A JPS57146072 A JP S57146072A
Authority
JP
Japan
Prior art keywords
cryopump
gas
torr
removal
completed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3030681A
Other languages
Japanese (ja)
Inventor
Sueo Tsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3030681A priority Critical patent/JPS57146072A/en
Publication of JPS57146072A publication Critical patent/JPS57146072A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE:To enable to shorten the time required for removal of gas, by drawing out gas while detecting characteristics of pressure rise in a cryopump and the temperature of a cryopanel. CONSTITUTION:In case that the pressure rise in a cryopump, detected by a low vacuum gauge 7, is greater than 0.005 Torr/min, it is judged that removal of gas is not completed, and gas is drawn out again by opening a valve 10. when the pressure rise in the pump becomes lower than 0.005 Torr, it is judged that removal of gas has been completed, and the valve 10 is opened again for evacuating the inner space of the cryopump to a level lower than 0.3 Torr. Then, the valve 10 is closed and the cryopump is set into operation. Regeneration of the cryopump is completed by detecting whether the pump has been evacuated completely or not by means of a thermocouple 2.
JP3030681A 1981-03-03 1981-03-03 Cryopump regenerating mechanism Pending JPS57146072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3030681A JPS57146072A (en) 1981-03-03 1981-03-03 Cryopump regenerating mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3030681A JPS57146072A (en) 1981-03-03 1981-03-03 Cryopump regenerating mechanism

Publications (1)

Publication Number Publication Date
JPS57146072A true JPS57146072A (en) 1982-09-09

Family

ID=12300073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3030681A Pending JPS57146072A (en) 1981-03-03 1981-03-03 Cryopump regenerating mechanism

Country Status (1)

Country Link
JP (1) JPS57146072A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582379U (en) * 1981-06-30 1983-01-08 日本真空技術株式会社 cryopump
JPS608480A (en) * 1983-06-27 1985-01-17 Arubatsuku Kuraio Kk Cryopump regenerating method
CN102808754A (en) * 2011-06-03 2012-12-05 住友重机械工业株式会社 Cryopump control apparatus, cryopump system, and method for evaluating vacuum retention of cryopumps

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582379U (en) * 1981-06-30 1983-01-08 日本真空技術株式会社 cryopump
JPS608480A (en) * 1983-06-27 1985-01-17 Arubatsuku Kuraio Kk Cryopump regenerating method
JPH0361033B2 (en) * 1983-06-27 1991-09-18 Ulvac Cryo Kk
CN102808754A (en) * 2011-06-03 2012-12-05 住友重机械工业株式会社 Cryopump control apparatus, cryopump system, and method for evaluating vacuum retention of cryopumps
JP2012251500A (en) * 2011-06-03 2012-12-20 Sumitomo Heavy Ind Ltd Cryopump control apparatus, cryopump system, and method for determining vacuum retention of cryopump
US8887514B2 (en) 2011-06-03 2014-11-18 Sumitomo Heavy Industries, Ltd. Cryopump control apparatus, cryopump system, and method for evaluating vacuum retention of cryopumps
CN102808754B (en) * 2011-06-03 2015-03-25 住友重机械工业株式会社 Cryopump control apparatus, cryopump system, and method for evaluating vacuum retention of cryopumps

Similar Documents

Publication Publication Date Title
US4172477A (en) Generation of high vacuums
GB1436133A (en) Drying method and apparatus
JPS57146072A (en) Cryopump regenerating mechanism
US2806644A (en) Vacuum system apparatus
US5114316A (en) Method of regenerating a vacuum pumping device
KR890004764A (en) Exhaust gas treatment method and apparatus for semiconductor manufacturing process
US3525229A (en) On-off thermal switch for a cryopump
US3650039A (en) Silverware cabinet
ES8505800A1 (en) Rinser for pail milking systems
JPS5578859A (en) Shaft sealing device
JPS59133365A (en) Vacuum device
US3104049A (en) High purity vacuum systems
JPH11343972A (en) Cryopump, regenerating method and device for cryopump, and method of controlling cryopump
CN220962563U (en) Dangerous gas emergency evacuation device for chemical safety
JPS6332935Y2 (en)
GB1316673A (en) Methods of and apparatus for casting articles
SE7903743L (en) Separation of steam from gas
JPS54144862A (en) Electron gun
JPS5718899A (en) Substitution method of gas inside explosion-proof sealed vessel
SU391286A1 (en) SUPER-HIGH-QUALITY INSTALLATION
JPS5720485A (en) Cryogenic refrigerating plant
US2343324A (en) Vacuum moistening system
SU1460410A1 (en) Vacuum system
JPS58165584A (en) Vacuum exhaust apparatus
JP2503234B2 (en) High vacuum exhaust control device