JPS5578859A - Shaft sealing device - Google Patents

Shaft sealing device

Info

Publication number
JPS5578859A
JPS5578859A JP15265278A JP15265278A JPS5578859A JP S5578859 A JPS5578859 A JP S5578859A JP 15265278 A JP15265278 A JP 15265278A JP 15265278 A JP15265278 A JP 15265278A JP S5578859 A JPS5578859 A JP S5578859A
Authority
JP
Japan
Prior art keywords
sealing device
shaft
contacting
vacuum
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15265278A
Other languages
Japanese (ja)
Inventor
Tetsuo Aikawa
Sachiosa Moriwaki
Seiji Terajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15265278A priority Critical patent/JPS5578859A/en
Publication of JPS5578859A publication Critical patent/JPS5578859A/en
Pending legal-status Critical Current

Links

Landscapes

  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Sealing Devices (AREA)

Abstract

PURPOSE: To prevent flowing in of gas when the non-contact sealing device is stopped by providing the non-contacting sealing device to prevent gas flow to the air- tight chamber and the contacting sealing device to prevent gas flow, which can be released freely, to the non-contacting sealing device from outside.
CONSTITUTION: When the vacuum chamber 1 is kept at high degree of vacuum and the shaft 2 is rotating, the non-contacting sealing device 6 is operated while the contacting sealing device 7 is not operated. In this case, air flowing through between the sealing body 12 and the shaft 2 goes into the sealing port 9, and the chamber 1 is kept vacuum by the groove 10. When the shaft 2 is stopped, the control valve 22 is opened to seal compressed air as the working fluid in the sealing body 12. Although the sealing body 12 tends to expand, it is deformed as the outside is held down by the retaining groove 16, and the inner surface is tightly pressed against the shaft 2 so that the air flow to the vacuum chamber from the atmosphere side can be prevented.
COPYRIGHT: (C)1980,JPO&Japio
JP15265278A 1978-12-12 1978-12-12 Shaft sealing device Pending JPS5578859A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15265278A JPS5578859A (en) 1978-12-12 1978-12-12 Shaft sealing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15265278A JPS5578859A (en) 1978-12-12 1978-12-12 Shaft sealing device

Publications (1)

Publication Number Publication Date
JPS5578859A true JPS5578859A (en) 1980-06-13

Family

ID=15545097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15265278A Pending JPS5578859A (en) 1978-12-12 1978-12-12 Shaft sealing device

Country Status (1)

Country Link
JP (1) JPS5578859A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575033A (en) * 1980-06-11 1982-01-11 Asahi Optical Co Ltd Automatic focusing camera of lens interchangeable type
JPS575014A (en) * 1980-06-11 1982-01-11 Asahi Optical Co Ltd Interchangeable lens barrel
JPS575032A (en) * 1980-06-11 1982-01-11 Asahi Optical Co Ltd Automatic focusing camera of lens interchangeable type
EP0067239A1 (en) * 1981-06-13 1982-12-22 Carl Schenck Ag Sealing arrangement in clearance seals for hydrostatically supported piston rods of hydraulic load cylinders
JPH03272365A (en) * 1990-03-20 1991-12-04 Tokyo Electron Ltd Sealing device
DE19751283A1 (en) * 1997-11-19 1999-05-20 Voith Sulzer Papiertech Patent Seal for inner surface of suction and blowing rollers used in paper making machine
CN106884986B (en) * 2017-03-14 2018-06-26 罗小果 The dynamic sealing device and method that a kind of high speed moves back and forth

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494050B1 (en) * 1970-05-14 1974-01-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494050B1 (en) * 1970-05-14 1974-01-30

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575033A (en) * 1980-06-11 1982-01-11 Asahi Optical Co Ltd Automatic focusing camera of lens interchangeable type
JPS575014A (en) * 1980-06-11 1982-01-11 Asahi Optical Co Ltd Interchangeable lens barrel
JPS575032A (en) * 1980-06-11 1982-01-11 Asahi Optical Co Ltd Automatic focusing camera of lens interchangeable type
EP0067239A1 (en) * 1981-06-13 1982-12-22 Carl Schenck Ag Sealing arrangement in clearance seals for hydrostatically supported piston rods of hydraulic load cylinders
JPH03272365A (en) * 1990-03-20 1991-12-04 Tokyo Electron Ltd Sealing device
DE19751283A1 (en) * 1997-11-19 1999-05-20 Voith Sulzer Papiertech Patent Seal for inner surface of suction and blowing rollers used in paper making machine
DE19751283B4 (en) * 1997-11-19 2007-12-20 Voith Patent Gmbh seal means
CN106884986B (en) * 2017-03-14 2018-06-26 罗小果 The dynamic sealing device and method that a kind of high speed moves back and forth

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