JPH0461196B2 - - Google Patents

Info

Publication number
JPH0461196B2
JPH0461196B2 JP58156774A JP15677483A JPH0461196B2 JP H0461196 B2 JPH0461196 B2 JP H0461196B2 JP 58156774 A JP58156774 A JP 58156774A JP 15677483 A JP15677483 A JP 15677483A JP H0461196 B2 JPH0461196 B2 JP H0461196B2
Authority
JP
Japan
Prior art keywords
cryopanel
gas
refrigerator
expander
heat exchanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58156774A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6050283A (ja
Inventor
Hidefumi Saito
Hisashi Mitani
Masanao Ando
Hiroshi Isaka
Munehiro Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP15677483A priority Critical patent/JPS6050283A/ja
Publication of JPS6050283A publication Critical patent/JPS6050283A/ja
Publication of JPH0461196B2 publication Critical patent/JPH0461196B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP15677483A 1983-08-27 1983-08-27 クライオポンプ Granted JPS6050283A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15677483A JPS6050283A (ja) 1983-08-27 1983-08-27 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15677483A JPS6050283A (ja) 1983-08-27 1983-08-27 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS6050283A JPS6050283A (ja) 1985-03-19
JPH0461196B2 true JPH0461196B2 (enrdf_load_stackoverflow) 1992-09-30

Family

ID=15635017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15677483A Granted JPS6050283A (ja) 1983-08-27 1983-08-27 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS6050283A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
JP6857046B2 (ja) * 2016-03-29 2021-04-14 住友重機械工業株式会社 クライオポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56104177A (en) * 1980-01-23 1981-08-19 Aisin Seiki Co Ltd Cryopump using liquid nitrogen

Also Published As

Publication number Publication date
JPS6050283A (ja) 1985-03-19

Similar Documents

Publication Publication Date Title
JPS5880474A (ja) 極低温冷却装置
JP3754992B2 (ja) マルチシステム冷凍機の運転方法、装置及び冷凍装置
US4966016A (en) Cryopump with multiple refrigerators
JP5660979B2 (ja) クライオポンプ及び極低温冷凍機
JP2005515386A (ja) ２段パルス管冷凍機を備えたクライオポンプ
KR102663120B1 (ko) 크라이오펌프
JPS6342178B2 (enrdf_load_stackoverflow)
JPH0461196B2 (enrdf_load_stackoverflow)
JP2763524B2 (ja) 二次ポンプ装置
JP3584186B2 (ja) 深冷ガス分離装置
US4896511A (en) Optimally staged cryopump
JP2721601B2 (ja) クライオポンプによる水素排気方法及び装置
JPH11287525A (ja) 斜板式スターリング冷凍機
CN223203190U (zh) 低温泵和半导体设备
Hands Cryopumping
JPH0323830B2 (enrdf_load_stackoverflow)
JPS6050355A (ja) 極低温冷凍装置
JP3379148B2 (ja) 極低温冷却装置
JP3278927B2 (ja) ヘリウム冷凍機
JPS6248974A (ja) クライオポンプ
JP2698477B2 (ja) 極低温冷凍機
JP2994720B2 (ja) クライオポンプの再生装置
JPS6325461A (ja) ヘリウムガス冷凍機
JPS6325460A (ja) ヘリウムガス冷凍機
JPH10213065A (ja) 可変バッフル型クライオポンプ