JPS56104177A - Cryopump using liquid nitrogen - Google Patents
Cryopump using liquid nitrogenInfo
- Publication number
- JPS56104177A JPS56104177A JP657780A JP657780A JPS56104177A JP S56104177 A JPS56104177 A JP S56104177A JP 657780 A JP657780 A JP 657780A JP 657780 A JP657780 A JP 657780A JP S56104177 A JPS56104177 A JP S56104177A
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- refrigerating machine
- condensing plate
- heat exchanger
- liquid nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To equip a cryopump, having a condensing plate in thermal contact with an expansion cylinder, with a compact, single-stage refrigerating machine instead of a conventional one with larger capacity, by utilizing the latent heat of liquid nitrogen as refrigerating output for a thermal shielding panel.
CONSTITUTION: A vacuum tank 21 is equipped with a condensing plate 22, and circulating working gas of a refrigerating machine used in a cryopump is cooled by a heat exchanger 20 through which high pressure nitrogen gas discharged from a compressor 8 and returning to a high pressure valve 9 flows. The working gas is then cooled through a hot regenerator 24, heat exchanger 14 and cool regenerator 23, and expanded in an expansion space 4 of an expansion cylinder 1 to cool the condensing plate 22 to the order of 20k. Liquid nitrogen from a tank 17 also cools the heat exchanger 14, thermal shielding panel 16 and thermal anchor 15a and finally the compressor 8 while being evaporated for the most part. Cooling the condensing plate 22 with output of about 20K is sufficient for the refrigerating machine of cryopump, which means that the refrigerating machine used is compact, instead of a bulky and multistaged one for cooling other units.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP657780A JPS56104177A (en) | 1980-01-23 | 1980-01-23 | Cryopump using liquid nitrogen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP657780A JPS56104177A (en) | 1980-01-23 | 1980-01-23 | Cryopump using liquid nitrogen |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56104177A true JPS56104177A (en) | 1981-08-19 |
Family
ID=11642175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP657780A Pending JPS56104177A (en) | 1980-01-23 | 1980-01-23 | Cryopump using liquid nitrogen |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56104177A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050283A (en) * | 1983-08-27 | 1985-03-19 | Shimadzu Corp | Cryo-pump |
-
1980
- 1980-01-23 JP JP657780A patent/JPS56104177A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050283A (en) * | 1983-08-27 | 1985-03-19 | Shimadzu Corp | Cryo-pump |
JPH0461196B2 (en) * | 1983-08-27 | 1992-09-30 | Shimadzu Corp |
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